Effects of Nb concentration on photo-electrical properties of Sr/sub 1-x/La/sub x/Nb/sub y/Ti/sub 1-y/O/sub 3/ thin-film resistor
Tóm tắt
Strontium lanthanum titanate-niobate (SrLaNb/sub x/Ti/sub 1-x/O/sub 3/) thin-film resistors are fabricated on SiO/sub 2//Si substrates by an argon ion-beam sputtering technique. Measurements show that the thin-film resistor has superior sensitivity for visible light. Moreover, the effects of Nb concentration on the photo-electrical properties of Sr/sub 1-x/La/sub x/Nb/sub y/Ti/sub 1-y/O/sub 3/ thin-film resistors and frequency effects on the photosensitivity performance are extensively investigated.
Từ khóa
#Niobium #Strontium #Sputtering #Resistors #Lanthanum #Titanium compounds #Semiconductor thin films #Substrates #Argon #TransistorsTài liệu tham khảo
10.1063/1.358749
10.1016/S0040-6090(97)00304-0
10.1016/S0924-4247(00)00438-6
10.7567/JJAPS.22S1.457
wilson, 1989, Optoelectronics An Introduction
yukami, 1986, high-speed cds<inf>0.2</inf>se<inf>0.8</inf>photoconductor and its application to line-image sensors, IEEE Transactions on Electron Devices, 33, 520, 10.1109/T-ED.1986.22522
bube, 1992, Photoelectronic Properties of Semiconductors
10.1016/S0924-4247(97)80509-2
10.1016/0250-6874(83)85012-4
sun, 1997, The Chemicasl research development on the defect of SrTiO3, Yunnan Chemical Industry, 2, 16
10.1109/101.47582