Effect of segregation on other physicochemical processes in implanted layers

L. K. Izraileva1, E. N. Rumanov1
1Institute of Structural Macrokinetics and Materials Science, Russian Academy of Sciences, Chernogolovka, Moscow oblast, Russia

Tóm tắt

The kinetics of the reaction of implanted atoms with the substrate in the presence of a cluster of implanted atoms is considered. It is shown that the reaction rate changes significantly due to cluster formation.

Tài liệu tham khảo

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