Determination of the sensitivity behaviour of an acoustic and thermal flow sensor by electronic characterisation

SENSORS, 2002 IEEE - Tập 2 - Trang 1298-1303 vol.2
J.W. van Honschoten1, V.B. Svetovoy2,1, T.S.J. Lammerink1, G.J.M. Krijnen1, M.C. Elwenspoek1
1Transducers Science and Technology Group, University of Twente, Netherlands
2Institute of Microelectronics, RAS, Yaroslavl, Russia

Tóm tắt

The Microflown is an acoustic and thermal flow sensor that measures the sound particle velocity instead of sound pressure. For most applications the Microflown should be calibrated, which is usually performed acoustically in a standing-wave-tube. Here it is shown that the sensor's sensitivity and frequency behaviour can be determined electronically as well, and an electronic method for determination of the device output response, which is more convenient, is therefore presented. The method is not only less complicated, it also makes it possible to cover easily the entire acoustic frequency spectrum.

Từ khóa

#Thermal sensors #Acoustic sensors #Wires #Equations #Frequency #Acoustic devices #Sensor phenomena and characterization #Acoustic measurements #Temperature sensors #Temperature distribution

Tài liệu tham khảo

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