Determination of the height of a microstructure sample by a SEM with a conventional and a digital photogrammetric method

Ultramicroscopy - Tập 63 - Trang 57-64 - 1996
M. Schubert1, A. Gleichmann1, M. Hemmleb2, J. Albertz2, J.M. Köhler1
1Institute for Physical High Technology, IPHT, Helmholtzweg 4, D-07743 Jena, Germany
2Department of Photogrammetry and Cartography, Technical University Berlin, Strasse des 17, Juni 135, D-10623 Berlin, Germany

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