Defect engineering in implantation technology of silicon light-emitting structures with dislocation-related luminescence

L. Pavesi, J. Phys.: Condens. Matter 15, R1169 (2003).

H. Ennen, G. Pomrenke, A. Axmann, K. Eisele, W. Haydl, and J. Schneider, Appl. Phys. Lett. 46, 381 (1985).

J. Michel, J. L. Benton, R. F. Ferrante, D. C. Jacobson, D. J. Eaglesham, E. A. Fitzgerald, Y. H. Xie, J. M. Poate, and L. C. Kimerling, J. Appl. Phys. 70, 2672 (1991).

B. Zheng, J. Michel, F. Y. G. Ren, L. C. Kimerling, D. C. Jacobson, and J. M. Poate, Appl. Phys. Lett. 64, 2842 (1994).

G. Franzo, F. Priolo, S. Coffa, A. Polman, and A. Carnera, Appl. Phys. Lett. 64, 2235 (1994).

J. Stimmer, A. Reittinger, J. F. Nützel, G. Abstreiter, H. Holzbrecher, and Ch. Buchal, Appl. Phys. Lett. 68, 3290 (1996).

N. A. Sobolev, O. B. Gusev, E. I. Shek, V. I. Vdovin, T. G. Yugova, and A. M. Emel’yanov, Appl. Phys. Lett. 72, 3326 (1998).

N. A. Sobolev, Fiz. Tekh. Poluprovodn. 29, 1153 (1995) [Semiconductors 29, 595 (1995)].

A. Polman, J. Appl. Phys. 82, 1 (1997).

J. Michel, L. V. Assali, M. T. Morse, and L. C. Kimerling, Semicond. Semimet., vol. 49, Ed. by D. J. Lockwood (1998) p. 111.

S. Coffa, G. Franzo, and F. Priolo, MRS Bull. 23, 25 (1998).

A. J. Kenyon, Semicond. Sci. Technol. 20, R65 (2005).

M. A. Green, J. Zhao, A. Wang, P. J. Reece, and M. Gal, Nature 412, 805 (2001).

N. A. Sobolev, in Advances in Light Emitting Materials, Ed. by H. G. Grimmeiss, B. Monemar, and M. Kittler (Trans. Tech., Switzerland, 2008), ch. 5; Mater. Sci. Forum 590, 79 (2008).

N. A. Drozdov, A. A. Patrin, and V. D. Tkachev, Pis’ma Zh. Éksp. Teor. Fiz. 23, 651 (1976) [JETP Lett. 23, 597 (1976)].

V. V. Kveder, E. A. Steinman, S. A. Shevchenko, and H. G. Grimmeiss, Phys. Rev. B 51, 10 520 (1995).

E. O. Sveinbjornsson and J. Weber, Appl. Phys. Lett. 69, 2686 (1996).

V. Kveder, V. Badylevich, E. Steinman, A. Izotov, M. Zeibt, and W. Schreter, Appl. Phys. Lett. 84, 2106 (2004).

R. Sauer, J. Weber, J. Stolz, E. R. Weber, K. H. Kurster, and H. Alexander, Appl. Phys. A 36, 1 (1985).

S. Pizzini, M. Guzzi, E. Grilli, and G. Borionetti, J. Phys.: Condens. Matter 12, 10131 (2000).

M. Acciarri, S. Binetti, O. V. Feklisova, E. A. Steinman, and E. B. Yakimov, Solid State Phenom. 95–96, 453 (2004).

N. A. Sobolev, A. M. Emel’yanov, E. I. Shek, O. V. Feklisova, E. B. Yakimov, and T. V. Kotereva, Phys. Stat. Solidi C 2, 1842 (2005).

V. V. Kveder, E. A. Steiman, and H. G. Grimmeiss, J. Appl. Phys. 78, 446 (1995).

S. Fukatsu, Y. Mera, M. Inoue, K. Maeda, H. Akiyama, and H. Sakaki, Appl. Phys. Lett. 68, 1889 (1996).

S. Binetti, M. Donghi, S. Pizzini, A. Castaldini, A. Cavallini, F. Fraboni, and N. A. Sobolev, Solid State Phenom. 57–58, 197 (1997).

S. Pizzini, E. Leonti, S. Binetti, M. Acciarri, A. Le Donne, and B. Pichaud, Solid State Phenom. 95–96, 273 (2004).

A. A. Kaplyanskii, Opt. Spektrosk. 16, 329 (1964).

N. A. Drozdov, A. A. Patrin, and V. D. Tkachev, Phys. Stat. Solidi B 83, K137 (1977).

M. Suesawa, Y. Sasaki, Y. Nishino, and K. Sumino, Jpn. J. Appl. Phys. 20, 537 (1981).

M. Suesawa, K. Sumino, and Y. Nishina, Jpn. J. Appl. Phys. 21, L518 (1982).

A. E. Huges and W. A. Runciman, Proc. Phys. Soc. 90, 827 (1967).

R. Sauer, Ch. Kisielowski-Kemmerich, and H. Alexander, Phys. Rev. Lett. 57, 1472 (1986).

M. Suezawa and K. Sumino, Phys. Status Solidi A 78, 639 (1983).

G. P. Watson, J. L. Benton, Y.-H. Hie, and E. A. Fitzgerald, J. Appl. Phys. 83, 3773 (1998).

V. Higgs, E. C. Lightowlers, and S. Tajbakhsh, Appl. Phys. Lett. 61, 1087 (1992).

T. Sekiguchi and K. Sumino, Mater. Sci. Forum 196–201, 1201 (1995).

M. Suezawa, Y. Sasaki, and K. Sumino, Phys. Stat. Solidi A 79, 173 (1983).

E. A. Steiman, V. V. Kveder, and H. G. Grimmeiss, Solid State Phenom. 47–48, 217 (1996).

V. Kveder, M. Badylevich, W. Schröter, M. Seibt, E. Steinman, and A. Izotov, Phys. Stat. Solidi A 202, 901 (2005).

L. C. Kimerling and J. R. Patel, Appl. Phys. Lett. 34, 73 (1979).

V. V. Kveder, Yu. A. Ossipyan, W. Schroeter, and G. Zoth, Phys. Stat. Solidi A 72, 701 (1982).

P. Omling, L. Samuelson, and H. G. Grimmeis, J. Appl. Phys. 54, 5117 (1983).

D. Cavalcoli, A. Cavallini, and E. Gombia, Phys. Rev. B 56, 10208 (1997).

Electronic Properties of Dislocations in Semiconductors, Ed. by Yu. A. Osip’yan (Éditorial URSS, Moscow, 2000) [in Russian].

V. Kveder and M. Kittler, in Advances in Light Emitting Materials, Ed. by H. G. Grimmeiss, B. Monemar, and M. Kittler (Trans. Tech., Switzerland, 2008), ch. 3; Mater. Sci. Forum 590, 29 (2008).

G. Davies, Phys. Rep. 176, 83 (1989).

S. Coffa, S. Libertino, and C. Spinella, Appl. Phys. Lett. 76, 321 (2000).

V. Raineri, S. Coffa, E. Szilágyi, J. Gyulai, and E. Rimini, Phys. Rev. B 61, 937 (2000).

N. A. Sobolev, M. S. Bresler, O. B. Gusev, M. I. Makoviichuk, E. O. Parshin, and E. I. Shek, Fiz. Tekh. Poluprovodn. 28, 1995 (1994) [Semiconductors 28, 1100 (1994)].

N. A. Sobolev, O. V. Alexandrov, M. S. Bresler, O. B. Gusev, E. I. Shek, M. I. Makoviichuk, and E. O. Parshin, Mater. Sci. Forum 196–201, 597 (1995).

T. Gregorkiewicz, I. Tsimperidis, C. A. J. Ammerlaan, F. P. Widdershoven, and N. A. Sobolev, MRS Symp. Proc. 422, 207 (1996).

R. N. Kyutt and N. A. Sobolev, Fiz. Tverd. Tela 39, 853 (1997) [Phys. Solid State 39, 759 (1997)].

N. A. Sobolev, O. B. Gusev, E. I. Shek, V. I. Vdovin, T. G. Yugova, and A. M. Emel’yanov, Appl. Phys. Lett. 72, 3326 (1998).

M. G. Mil’vidskii and V. B. Osvenskii, Structure Defects in the Single Crystals of Semiconductors (Metallurgiya, Moscow, 1984) [in Russian].

K. Ravi, Imperfections and Impurities in Semiconductor Silicon (Wiley, New York, 1981; Mir, Moscow, 1984).

W. Frank, U. Gösele, H. Mehrer, and A. Seeger, in Diffusion in Crystalline Solids, Ed. by G. E. Murch and A. S. Nowick (Academic Press, New York, 1984), p. 63.

P. M. Fahey, P. B. Griffin, and J. D. Plummer, Rev. Mod. Phys. 61, 289 (1989).

N. A. Sobolev, in Semiconductor Technology: Processing and Novel Fabrication Techniques, Ed. by M. Levinshtein and M. Shur (Wiley Intersci., New York, 1997), p. 131.

V. Higgs, F. Chin, X. Wang, J. Mosalski, and R. Beanland, J. Phys.: Condens. Matter 12, 10105 (2000).

N. A. Sobolev, Physica B 401–402, 10 (2007).

N. A. Sobolev, O. B. Gusev, E. I. Shek, V. I. Vdovin, T. G. Yugova, and A. M. Emel’yanov, J. Luminesc. 80, 357 (1999).

P. B. Klein and G. S. Pomrenke, Electron. Lett. 24, 1503 (1988).

O. V. Aleksandrov, Yu. A. Nikolaev, N. A. Sobolev, V. I. Sakharov, I. T. Serenkov, and Yu. A. Kudryavtsev, Fiz. Tekh. Poluprovodn. 33, 652 (1999) [Semiconductors 33, 606 (1999)].

R. N. Kyutt, P. V. Petrashen, and L. M. Sorokin, Phys. Stat. Solidi A 60, 381 (1980).

P. Zaumseil, U. Winter, F. Cembali, M. Servidori, and Z. Sourek, Phys. Stat. Solidi A 100, 95 (1982).

V. A. Bushuev and A. P. Petrakov, Kristallografiya 40, 1050 (1995) [Crystallogr. Rep. 40, 974 (1995)].

O. V. Aleksandrov, R. N. Kyutt, and T. G. Alksnis, Fiz. Tverd. Tela 22, 2892 (1980) [Sov. Phys. Solid State 22, 1688 (1980)].

C. J. Tsai, A. Dommann, M. A. Nicolet, and T. Vreeland, J. Appl. Phys. 69, 2067 (1991).

G. Bai and M.-A. Nicolet, J, Appl. Phys. 70, 649 (1991).

S. Mader and A. F. Michel, Phys. Stat. Solidi A 33, 793 (1976).

T. Sekiguchi, K. Sumino, Z. J. Radzimski, and G. A. Rozgonyi, Mater. Sci. Eng. B 42, 141 (1996).

V. Higgs, E. C. Lightowlers, C. E. Norman, and P. Keighley, Mater. Sci. Forum 83–87, 1309 (1992).

V. I. Vdovin, T. G. Yugova, N. A. Sobolev, E. I. Shek, M. I. Makovijchuk, and E. O. Parshin, Nucl. Instrum. Methods Phys. Res. B 147, 116 (1999).

N. A. Sobolev, E. I. Shek, A. M. Emel’yanov, V. I. Vdovin, and T. G. Yugova, Fiz. Tekh. Poluprovodn. 33, 656 (1999) [Semiconductors 33, 610 (1999)].

V. I. Vdovin, N. A. Sobolev, E. M. Emel’yanov, O. B. Gusev, E. I. Shek, and T. G. Yugova, Mater. Sci. Forum 258–263, 1521 (1997).

N. A. Sobolev, A. M. Emel’yanov, E. I. Shek, V. I. Sakharov, I. T. Serenkov, Yu. A. Nikolaev, V. I. Vdovin, T. G. Yugova, M. I. Makovijchuk, E. O. Parshin, and S. Pizzini, Mater. Sci. Eng. B 91–92, 167 (2002).

N. A. Sobolev, A. M. Emel’yanov, E. I. Shek, V. I. Vdovin, T. G. Yugova, and S. Pizzini, J. Phys.: Condens. Matter 14, 13241 (2002).

N. A. Sobolev, V. I. Vdovin, T. G. Yugova, E. I. Shek, A. M. Emel’yanov, and A. K. Gutakovskii, in Proc. of the 5th Russ. Conf. on Semiconductor Physics (Nizhn. Novgorod, Russia, 2001), p. 363.

A. Polman, J. S. Guster, E. Snoeks, and G. N. van den Hoven, Appl. Phys. Lett. 62, 507 (1993).

N. A. Sobolev, A. M. Emel’yanov, E. I. Shek, O. V. Feklisova, and E. B. Yakimov, Fiz. Tekh. Poluprovodn. 39, 1271 (2005) [Semiconductors 39, 1229 (2005)].

N. A. Sobolev, A. M. Emel’yanov, E. I. Shek, M. I. Makoviichuk, and E. O. Parshin, in Proc. of the 13th Intern. Symp. on Radiation Physics of Solid State (Sevastopol’, Ukraina, 2003), p. 131.

N. A. Sobolev, A. M. Emel’yanov, V. V. Zabrodskii, N. V. Zabrodskaya, V. L. Sukhanov, and E. I. Shek, Fiz. Tekh. Poluprovodn. 41, 635 (2007) [Semiconductors 41, 616 (2007)].

N. A. Sobolev, Physica B 308–310, 333 (2001).

N. A. Sobolev, A. M. Emel’yanov, R. N. Kyutt, and Yu. A. Nikolaev, Solid State Phenom. 69–70, 371 (1999).

A. M. Emel’yanov and E. I. Shek, Fiz. Tverd. Tela 46, 175 (2004) [Phys. Solid State 46, 1810 (2004)].

W. L. Ng, M. A. Lourenco, R. M. Gwilliam, S. Ledain, G. Shao, and K. P. Homewood, Nature 410, 192 (2001).

D. J. Stowe, S. A. Galloway, S. Senkader, K. Mallik, R. J. Falster, and P. R. Wilshaw, Physica B 340–342, 710 (2003).

T. Hoang, P. LeMinh, J. Holleman, and J. Schmitz, IEEE Electron. Rev. Lett. 27, 105 (2006).

N. A. Sobolev, B. Ya. Ber, A. M. Emel’yanov, A. P. Kovarskii, and E. I. Shek, Fiz. Tekh. Poluprovodn. 41, 295 (2007) [Semiconductors 41, 285 (2007)].

N. A. Sobolev, A. M. Emel’yanov, V. I. Sakharov, I. T. Serenkov, E. I. Shek, and D. I. Tetel’baum, Fiz. Tekh. Poluprovodn. 41, 555 (2007) [Semiconductors 41, 537 (2007)].

N. A. Sobolev, R. N. Kyutt, V. I. Sakharov, I. T. Serenkov, E. I. Shek, and V. I. Vdovin, in Proc. of the 11th Symp. on Nanophysics and Nanoelectronics (Nizhn. Novgorod, Russia, 2007), p. 428.

N. A. Sobolev, V. I. Sakharov, I. T. Serenkov, and V. I. Vdovin, Superlatt. Microstruct. 45, 177 (2009).

N. A. Sobolev, A. E. Kalyadin, and E. I. Shek, in Proc. of the 18th Intern. Symp. on Radiation Physics of Solid State (Sevastopol’, Ukraina, 2003), p. 11.

A. T. Blumenau, R. Jones, S. Öberg, P. R. Briddon, and T. Frauenheim, Phys. Rev. Lett. 87, 187404 (2001).