Characteristic of thin-film NTC thermal sensors
SENSORS, 2002 IEEE - Tập 1 - Trang 56-61 vol.1
Tóm tắt
The characteristics of thin-film negative temperature coefficient of resistance (NTC) thermal sensors fabricated by micromachining technology were studied as a function of the thickness of the membrane. The overall structure of the thermal sensor has the form of Au/Ti/NTC/SiO/sub x//(100)Si. An NTC film of Mn/sub 1.5/CoNi/sub 0.5/O/sub 4/ with 0.5 /spl mu/m thickness was deposited on the SiO/sub x/ layer (1.2 /spl mu/m) by PLD (pulsed laser deposition) and annealed at 600-800/spl deg/C in air for 1 hr. Au (200 nm)/Ti (100 nm) electrode was coated on the NTC film by DC sputtering. From the results of microstructure, X-ray and NTC analysis, post-annealed NTC films at 700/spl deg/C for 1 hr showed the best characteristics as an NTC thermal sensing film. In order to reduce the thermal mass and thermal time constant of sensor, the sensing element was built-up on a thin membrane with the thickness of 20-65 /spl mu/m. Sensors with a thin sensing membrane show good detection characteristics.
Từ khóa
#Thin film sensors #Sensor phenomena and characterization #Thermal sensors #Biomembranes #Temperature sensors #Thermal resistance #Gold #Pulsed laser deposition #Micromachining #Optical pulsesTài liệu tham khảo
10.1016/0924-4247(92)80217-Q
putley, 1981, The Applications of pyroelectric devices, 33
baliga, 1994, Sputtered film thermistor IR detectors, SPIE 2225
yokoyama, 1995, Preparation and electrical properties of monophase cubic spinel, J Mat ss, 30
10.1109/55.798053
jerorninek, 1996, Micromachined, uncooled, VO-based, IR bolometer arrays, SPIE 2746
10.1007/BF00324570
10.1117/1.1269061
dziedzic, 1996, Thick-film resistive temperature sensors, Meas Sci Technol, 8
10.1088/0034-4885/49/12/002