Bulk acoustic wave resonator operating at 8GHz for gravimetric sensing of organic films
Tài liệu tham khảo
D.S. Ballantine, R.M. White, S.J. Martin, A.J. Ricco, E.T. Zellers, G.C. Frye, H. Wohltjen, Acoustic Wave Sensors, ed. A. Press, 1997.
Gizeli, 2002
Harding, 1997, Design and properties of quartz-based Love wave acoustic sensors incorporating silicon dioxide and PMMA guiding layers, Smart Mater. Struct., 6, 716, 10.1088/0964-1726/6/6/008
Grudkowski, 1980, Fundamental-mode VHF-UHF miniature acoustic resonators and filters on silicon, Appl. Phys. Lett., 37, 993, 10.1063/1.91745
Nakamura, 1981, ZnO/SiO2-diaphragm composite resonator on a silicon wafer, Electron. Lett., 17, 507, 10.1049/el:19810355
Lakin, 1995, Solidly mounted resonators and filters
Ruby, 2001, Thin film bulk acoustic wave resonators for wireless applications
O’Toole, 1992, Thin aluminium nitride film resonators: miniaturized high sensitivity mass sensors, Anal. Chem., 64, 1289, 10.1021/ac00035a017
Gabl, 2004, First results on label-free detection of DNA and protein molecules using a novel integrated sensor technology based on gravimetric detection principles, Biosens. Bioelectron., 19, 615, 10.1016/S0956-5663(03)00259-8
Narine, 1998, Use of the quartz crystal microbalance to measure the mass of submonolayer deposits: measuring the stoichiometry of surface oxides, J. Vac. Sci. Technol. A, 16, 1857, 10.1116/1.581118
Kösslinger, 1992, A quartz crystal biosensor for measurement in liquids, Biosens. Bioelectron., 7, 397, 10.1016/0956-5663(92)85038-C
Cheng, 1991, The measurement of cathode evaporation rate by quartz crystal microbalance, J. Vac. Sci. Technol. A, 9, 501, 10.1116/1.577396
Dubois, 2001, Stress and piezoelectric properties of AlN thin films deposited onto metal electrodes by pulsed direct current reactive sputtering, J. Appl. Phys., 89, 6389, 10.1063/1.1359162
Martin, 2004, Thickness dependence of properties of highly c-axis textured AlN thin films, J. Vac. Sci. Technol. A, 22, 361, 10.1116/1.1649343
R. Lanz, P. Muralt, Bandpass filters for 8GHz using solidly mounted bulk acoustic wave resonators. IEEE Trans. UFFC, in press.
Dubois, 1999, Properties of aluminium nitride thin films for piezoelectric transducers and microwave filter applications, Appl. Phys. Lett., 4, 3032, 10.1063/1.124055
Dubois, 1999, BAW resonators based on aluminium nitride thin films
Lanz, 2001, Solidly mounted BAW filters for the 6–8GHz range based on AlN thin film.
Nowotny, 1987, General one-dimensional treatment of the layered piezoelectric resonator with two electrodes, J. Acoust. Soc. Am., 82, 513, 10.1121/1.395453
