Bias stress stability of indium gallium zinc oxide channel based transparent thin film transistors

Applied Physics Letters - Tập 92 Số 3 - 2008
A. Suresh1, John F. Muth1
1North Carolina State University ECE Department, , Raleigh, North Carolina 27695, USA

Tóm tắt

The effects of bias stress on transistor performance are important when considering nontraditional channel materials for thin film transistors. Applying a gate bias stress to indium gallium zinc oxide transparent thin film transistors was found to induce a parallel threshold voltage shift without changing the field effect mobility or the subthreshold gate voltage swing. The threshold voltage change is logarithmically dependent on the duration of the bias stress implying a charge tunneling mechanism resulting in trapped negative charge screening the applied gate voltage.

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Tài liệu tham khảo

2004, Nature (London), 432, 488, 10.1038/nature03090

2005, Appl. Phys. Lett., 86, 013503, 10.1063/1.1843286

2005, Thin Solid Films, 487, 205, 10.1016/j.tsf.2005.01.066

2006, Appl. Phys. Lett., 89, 112123, 10.1063/1.2353811

2007, Appl. Phys. Lett., 90, 123512, 10.1063/1.2716355

2006, Jpn. J. Appl. Phys., Part 2, 45, L1127, 10.1143/JJAP.45.L1127

2000, Jpn. J. Appl. Phys., Part 1, 39, 5763, 10.1143/JJAP.39.5763

2004, IEEE Electron Device Lett., 25, 188, 10.1109/LED.2004.825154

1991, J. Appl. Phys., 69, 7301, 10.1063/1.347577

2003, Thin Solid Films, 426, 250, 10.1016/S0040-6090(03)00040-3

2004, Phys. Rev. B, 70, 235324, 10.1103/PhysRevB.70.235324

2004, Appl. Phys. Lett., 84, 3184, 10.1063/1.1713035

2004, Thin Solid Films, 450, 316, 10.1016/j.tsf.2003.11.295

2007, Appl. Phys. Lett., 90, 063502, 10.1063/1.2458457

2006, Appl. Phys. Lett., 89, 263513, 10.1063/1.2425020

1977, IEEE Trans. Electron Devices, ED-24, 524

Transparent, high mobility InGaZnO thin films deposited by PLD, Thin Solid Films