Các thông số dải cho các bán dẫn hợp chất III–V và hợp kim của chúng

Journal of Applied Physics - Tập 89 Số 11 - Trang 5815-5875 - 2001
I. Vurgaftman1, J. R. Meyer1, L. R. Ram‐Mohan2
1Code 5613, Naval Research Laboratory, Washington, DC 20375
2Worcester Polytechnic Institute, Worcester, Massachusetts 01609

Tóm tắt

Chúng tôi trình bày một tổng hợp chi tiết và cập nhật về các thông số dải cho các bán dẫn hợp chất III–V có cấu trúc tinh thể zinct blende và wurtzite, bao gồm: GaAs, GaSb, GaP, GaN, AlAs, AlSb, AlP, AlN, InAs, InSb, InP, và InN, cùng với các hợp kim bán dẫn ternary và quaternary của chúng. Dựa trên việc xem xét lại tài liệu hiện có, chúng tôi cung cấp các bộ thông số đầy đủ và nhất quán cho tất cả các vật liệu. Nhấn mạnh vào các thông số cần thiết cho các tính toán cấu trúc vùng, chúng tôi lập bảng các khe năng lượng trực tiếp và gián tiếp, các phân tách do spin-quỹ đạo và trường tinh thể, các tham số bifurcation của hợp kim, các khối lượng hiệu dụng cho điện tử, lỗ trống nặng, nhẹ, và lỗ tách, các tham số Luttinger, các yếu tố ma trận động lượng liên dải, và các tiềm năng biến dạng, bao gồm các phụ thuộc nhiệt độ và thành phần hợp kim khi có thể. Các sự lệch dải heterostructure cũng được cung cấp, trên một tỷ lệ tuyệt đối cho phép bất kỳ vật liệu nào có thể được cân chỉnh so với bất kỳ vật liệu nào khác.

Từ khóa


Tài liệu tham khảo

1990, Rev. Mod. Phys., 62, 173, 10.1103/RevModPhys.62.173

1987, Semicond. Sci. Technol., 2, 460, 10.1088/0268-1242/2/7/012

1987, Semicond. Sci. Technol., 2, 701, 10.1088/0268-1242/2/10/514

1992, J. Phys.: Condens. Matter, 4, 6651

1955, Phys. Rev., 97, 869, 10.1103/PhysRev.97.869

1951, J. Chem. Phys., 19, 1396, 10.1063/1.1748067

1958, J. Phys. Chem. Solids, 6, 236

1976, Phys. Rev. B, 14, 556, 10.1103/PhysRevB.14.556

1967, Physica (Amsterdam), 34, 149, 10.1016/0031-8914(67)90062-6

1984, Phys. Rev. B, 30, 1979, 10.1103/PhysRevB.30.1979

1999, Phys. Status Solidi B, 216, 975, 10.1002/(SICI)1521-3951(199912)216:2<975::AID-PSSB975>3.0.CO;2-N

1989, Phys. Rev. B, 39, 12808, 10.1103/PhysRevB.39.12808

1988, Phys. Rev. B, 37, 2695

1984, Solid State Commun., 49, 943, 10.1016/0038-1098(84)90299-0

1990, Phys. Rev. B, 41, 1561, 10.1103/PhysRevB.41.1561

1996, Appl. Phys. Lett., 68, 1657, 10.1063/1.115896

1996, Phys. Rev. B, 54, 2491, 10.1103/PhysRevB.54.2491

1996, Phys. Rev. B, 53, 1997, 10.1103/PhysRevB.53.1997

1999, Appl. Phys. Lett., 74, 1117, 10.1063/1.123461

1976, J. Cryst. Growth, 32, 265, 10.1016/0022-0248(76)90041-5

1990, Phys. Rev. B, 41, 11992, 10.1103/PhysRevB.41.11992

1992, Phys. Rev. B, 46, 9913, 10.1103/PhysRevB.46.9913

1999, Phys. Rev. B, 60, 5404, 10.1103/PhysRevB.60.5404

1990, J. Appl. Phys., 86, 4520

1999, J. Appl. Phys., 85, 3222, 10.1063/1.369664

1991, IEEE J. Quantum Electron., 27, 708, 10.1109/3.81381

1988, Phys. Rev. B, 38, 6151

1989, J. Vac. Sci. Technol. A, 7, 415

1992, Phys. Rev. B, 45, 1204, 10.1103/PhysRevB.45.1204

1998, Phys. Rev. B, 57, 9081, 10.1103/PhysRevB.57.9081

1995, J. Nonlinear Opt. Phys. Mater., 4, 191, 10.1142/S0218863595000094

1989, Electron. Commun. Jpn., Part 2: Electron., 72, 29

1989, IEEE J. Quantum Electron., 25, 889, 10.1109/3.27977

1991, IEEE J. Quantum Electron., 27, 2035, 10.1109/3.83413

1992, IEEE J. Quantum Electron., 28, 1670, 10.1109/3.142554

1994, J. Comput. Phys., 115, 288, 10.1006/jcph.1994.1196

1988, Phys. Rev. B, 38, 9819, 10.1103/PhysRevB.38.9819

1985, Solid State Commun., 53, 777, 10.1016/0038-1098(85)90218-2

1989, Riv. Nuovo Cimento, 12, 1

1987, Appl. Phys. Lett., 51, 1019, 10.1063/1.98817

1990, Superlattices Microstruct., 7, 35, 10.1016/0749-6036(90)90111-J

1993, J. Appl. Phys., 74, 5053, 10.1063/1.354288

1993, Phys. Rev. B, 47, 13498, 10.1103/PhysRevB.47.13498

1993, J. Appl. Phys., 74, 4777, 10.1063/1.354349

1993, Phys. Rev. B, 48, 11469, 10.1103/PhysRevB.48.11469

1954, Phys. Rev., 94, 1498, 10.1103/PhysRev.94.1498

1975, Phys. Status Solidi B, 68, 405, 10.1002/pssb.2220680140

1983, J. Phys. Chem. Solids, 44, 365, 10.1016/0022-3697(83)90064-1

2000, Superlattices Microstruct., 27, 520

1985, Phys. Rev. B, 31, 2056, 10.1103/PhysRevB.31.2056

1986, Phys. Rev. B, 33, 2594, 10.1103/PhysRevB.33.2594

1988, Phys. Rev. B, 37, 8215, 10.1103/PhysRevB.37.8215

1994, Phys. Rev. B, 50, 5429, 10.1103/PhysRevB.50.5429

1959, Phys. Rev., 116, 287, 10.1103/PhysRev.116.287

1961, Phys. Rev., 122, 1821, 10.1103/PhysRev.122.1821

1996, Phys. Rev. B, 53, 7949, 10.1103/PhysRevB.53.7949

1999, Phys. Rev. B, 60, 5590, 10.1103/PhysRevB.60.5590

1983, J. Appl. Phys., 53, R123

1975, J. Electrochem. Soc., 122, 1133, 10.1149/1.2134410

1987, Phys. Rev. B, 35, 9174, 10.1103/PhysRevB.35.9174

1988, Appl. Phys. Lett., 53, 1080, 10.1063/1.100027

1992, Phys. Rev. B, 45, 1638, 10.1103/PhysRevB.45.1638

1993, Phys. Rev. B, 48, 4398, 10.1103/PhysRevB.48.4398

1976, Phys. Rev. B, 14, 5331, 10.1103/PhysRevB.14.5331

1973, Phys. Rev. B, 7, 4605, 10.1103/PhysRevB.7.4605

1970, J. Phys. C, 3, L94, 10.1088/0022-3719/3/5/005

1984, J. Phys. C, 17, 4429, 10.1088/0022-3719/17/25/007

1985, J. Phys. Soc. Jpn., 54, 3488, 10.1143/JPSJ.54.3488

1986, J. Phys. Soc. Jpn., 55, 1282, 10.1143/JPSJ.55.1282

1996, Phys. Rev. B, 53, 12813, 10.1103/PhysRevB.53.12813

1983, Phys. Status Solidi B, 120, 715, 10.1002/pssb.2221200231

1991, Semicond. Sci. Technol., 6, 27, 10.1088/0268-1242/6/1/005

1999, Infrared Phys. Technol., 40, 343, 10.1016/S1350-4495(99)00020-1

1992, Semicond. Sci. Technol., 7, 357, 10.1088/0268-1242/7/3/014

1995, Physica B, 210, 1, 10.1016/0921-4526(94)00921-H

1990, J. Appl. Phys., 68, 2367, 10.1063/1.346520

1971, Phys. Rev. B, 4, 3460, 10.1103/PhysRevB.4.3460

1976, J. Phys. C, 9, 2809, 10.1088/0022-3719/9/14/019

1977, Festkoerperprobleme, XVII, 195

1979, Phys. Rev. B, 20, 3303, 10.1103/PhysRevB.20.3303

1988, Phys. Rev. B, 37, 922, 10.1103/PhysRevB.37.922

1988, Phys. Rev. B, 38, 4314, 10.1103/PhysRevB.38.4314

1989, Phys. Rev. B, 39, 3411, 10.1103/PhysRevB.39.3411

1990, Phys. Status Solidi B, 157, 311, 10.1002/pssb.2221570132

1991, Phys. Rev. B, 43, 14734, 10.1103/PhysRevB.43.14734

1976, Phys. Rev. B, 13, 4466, 10.1103/PhysRevB.13.4466

1977, Phys. Rev. B, 15, 823, 10.1103/PhysRevB.15.823

1986, Physica B, 139–140, 401

1991, Semicond. Sci. Technol., 6, 963, 10.1088/0268-1242/6/10/002

1990, IEEE J. Quantum Electron., 26, 213, 10.1109/3.44950

1998, Phys. Rev. B, 58, R1710, 10.1103/PhysRevB.58.R1710

1984, Solid State Commun., 51, 179, 10.1016/0038-1098(84)90545-3

1984, Phys. Status Solidi B, 126, 11, 10.1002/pssb.2221260102

1984, Phys. Rev. B, 30, 5753, 10.1103/PhysRevB.30.5753

1984, Phys. Rev. B, 30, 4571, 10.1103/PhysRevB.30.4571

1992, Phys. Rev. B, 46, 4328, 10.1103/PhysRevB.46.4328

1986, J. Appl. Phys., 59, 3577, 10.1063/1.336782

1987, Phys. Rev. Lett., 59, 501, 10.1103/PhysRevLett.59.501

1989, Phys. Rev. B, 39, 1871, 10.1103/PhysRevB.39.1871

1986, Semicond. Sci. Technol., 1, 128, 10.1088/0268-1242/1/2/006

1998, Phys. Status Solidi B, 210, 353, 10.1002/(SICI)1521-3951(199812)210:2<353::AID-PSSB353>3.0.CO;2-X

1973, Phys. Rev. B, 8, 5711, 10.1103/PhysRevB.8.5711

1994, J. Appl. Phys., 75, 4779, 10.1063/1.355769

1987, Solid State Commun., 61, 157, 10.1016/0038-1098(87)90021-4

1972, Phys. Rev. B, 5, 2978, 10.1103/PhysRevB.5.2978

1991, Phys. Rev. B, 43, 11950, 10.1103/PhysRevB.43.11950

1992, Phys. Rev. B, 45, 10951, 10.1103/PhysRevB.45.10951

1980, Phys. Rev. B, 21, 659, 10.1103/PhysRevB.21.659

1981, Phys. Status Solidi B, 105, 777, 10.1002/pssb.2221050240

1985, J. Appl. Phys., 58, 495, 10.1063/1.335652

1987, J. Vac. Sci. Technol., 5, 1464, 10.1116/1.574622

1990, J. Appl. Phys., 68, 4310, 10.1063/1.346226

1992, Superlattices Microstruct., 11, 55, 10.1016/0749-6036(92)90361-8

1988, Sov. Phys. Semicond., 22, 163

1988, Fiz. Tekh. Poluprovodn. (S.-Peterburg), 22, 269

1986, Phys. Rev. B, 33, 8564, 10.1103/PhysRevB.33.8564

1973, Phys. Status Solidi B, 55, 187, 10.1002/pssb.2220550118

1972, Phys. Status Solidi B, 49, K167, 10.1002/pssb.2220490115

1991, Solid State Commun., 79, 1039, 10.1016/0038-1098(91)90006-H

1995, J. Phys. Chem. Solids, 56, 429, 10.1016/0022-3697(94)00217-7

1992, Physica B, 177, 465, 10.1016/0921-4526(92)90151-H

1989, J. Appl. Phys., 66, 2108, 10.1063/1.344304

1996, IEEE Electron Device Lett., 17, 69, 10.1109/55.484126

1998, IEE Proc.: Optoelectron., 145, 275

1958, Phys. Rev., 111, 472, 10.1103/PhysRev.111.472

1967, Phys. Rev., 154, 737, 10.1103/PhysRev.154.737

1976, Phys. Status Solidi A, 37, K173, 10.1002/pssa.2210370260

1983, Sov. Phys. Semicond., 17, 449

1983, Fiz. Tekh. Poluprovodn. (S.-Peterburg), 17, 718

1964, Can. J. Phys., 42, 1879, 10.1139/p64-176

1968, Can. J. Phys., 46, 1207, 10.1139/p68-154

1996, J. Appl. Phys., 80, 6416, 10.1063/1.363660

1968, J. Phys. Soc. Jpn., 24, 1178, 10.1143/JPSJ.24.1178

1990, J. Appl. Phys., 67, 7034, 10.1063/1.345050

1994, Jpn. J. Appl. Phys., Part 1, 33, 1740, 10.1143/JJAP.33.1740

1987, J. Appl. Phys., 61, 4869, 10.1063/1.338352

1980, JETP Lett., 31, 154

1980, Pis'ma Zh. Eksp. Teor. Fiz., 31, 169

1966, Phys. Status Solidi, 16, K55

1967, Phys. Status Solidi, 24, K87

1970, Physica B, 48, 112

1971, Can. J. Phys., 49, 2052, 10.1139/p71-248

1971, Sov. Phys. Semicond., 4, 1184

1970, Fiz. Tekh. Poluprovodn. (S.-Peterburg), 4, 1390

1973, Sov. Phys. Semicond., 6, 1568

1973, Fiz. Tekh. Poluprovodn. (S.-Peterburg), 6, 1816

1975, Phys. Rev. B, 12, 5739, 10.1103/PhysRevB.12.5739

1978, Phys. Rev. B, 18, 4394, 10.1103/PhysRevB.18.4394

1981, Jpn. J. Appl. Phys., Part 1, 20, 1265, 10.1143/JJAP.20.1265

1992, Semicond. Sci. Technol., 7, 767, 10.1088/0268-1242/7/6/008

1998, Physica B, 256–258, 625

1998, Phys. Status Solidi B, 210, 845, 10.1002/(SICI)1521-3951(199812)210:2<845::AID-PSSB845>3.0.CO;2-9

1979, J. Appl. Phys., 50, 4872, 10.1063/1.326552

1972, Sov. Phys. Semicond., 5, 1495

1971, Fiz. Tekh. Poluprovodn. (S.-Peterburg), 5, 1710

1985, J. Phys. Chem. Solids, 46, 977, 10.1016/0022-3697(85)90101-5

1967, Solid State Commun., 5, 677, 10.1016/0038-1098(67)90091-9

1968, Phys. Rev., 171, 876, 10.1103/PhysRev.171.876

1978, Phys. Rev. B, 18, 5590, 10.1103/PhysRevB.18.5590

1975, Phys. Rev. B, 12, 1371, 10.1103/PhysRevB.12.1371

1983, J. Phys. Soc. Jpn., 52, 1057, 10.1143/JPSJ.52.1057

1993, Phys. Rev. B, 47, 15588, 10.1103/PhysRevB.47.15588

1996, J. Phys.: Condens. Matter, 8, 4369

1975, Sov. Phys. Semicond., 9, 54

1975, Fiz. Tekh. Poluprovodn. (S.-Peterburg), 9, 85

1983, J. Phys. Soc. Jpn., 52, 2838, 10.1143/JPSJ.52.2838

1979, Phys. Rev. B, 19, 2231, 10.1103/PhysRevB.19.2231

1977, J. Phys. C, 10, 5111, 10.1088/0022-3719/10/24/029

1972, Solid State Commun., 11, 779, 10.1016/0038-1098(72)90269-4

1973, Solid State Commun., 12, 413, 10.1016/0038-1098(73)90785-0

1974, Solid State Commun., 15, 693, 10.1016/0038-1098(74)90242-7

1976, Phys. Rev. Lett., 37, 1292, 10.1103/PhysRevLett.37.1292

1979, Phys. Rev. B, 19, 2209, 10.1103/PhysRevB.19.2209

1978, J. Electron. Mater., 7, 1, 10.1007/BF02656016

1974, Sov. Phys. Semicond., 7, 1449

1973, Fiz. Tekh. Poluprovodn. (S.-Peterburg), 7, 2175

1987, Appl. Phys. Lett., 50, 615, 10.1063/1.98098

1995, Appl. Phys. Lett., 67, 1048, 10.1063/1.114460

1999, Phys. Status Solidi B, 211, 869, 10.1002/(SICI)1521-3951(199902)211:2<869::AID-PSSB869>3.0.CO;2-N

1975, Phys. Rev. B, 12, 5803, 10.1103/PhysRevB.12.5803

1987, Phys. Rev. B, 36, 4813, 10.1103/PhysRevB.36.4813

1990, Solid State Commun., 73, 15, 10.1016/0038-1098(90)90005-V

1991, Phys. Rev. B, 44, 9052, 10.1103/PhysRevB.44.9052

1987, Phys. Rev. B, 36, 4813, 10.1103/PhysRevB.36.4813

1990, Solid State Commun., 73, 15, 10.1016/0038-1098(90)90005-V

1973, J. Phys. C, 6, 1586, 10.1088/0022-3719/6/9/016

1980, Phys. Rev. B, 22, 2020, 10.1103/PhysRevB.22.2020

1983, Jpn. J. Appl. Phys., Part 2, 22, L742, 10.1143/JJAP.22.L742

1983, Infrared Phys., 23, 311, 10.1016/0020-0891(83)90004-0

1983, Jpn. J. Appl. Phys., Suppl., 23, 69

1984, J. Phys. Soc. Jpn., 53, 3553, 10.1143/JPSJ.53.3553

1985, J. Phys. Soc. Jpn., 54, 725, 10.1143/JPSJ.54.725

1985, Solid State Commun., 53, 547, 10.1016/0038-1098(85)90189-9

1987, Semicond. Sci. Technol., 2, 568, 10.1088/0268-1242/2/9/002

1994, Z. Phys. B: Condens. Matter, 95, 281, 10.1007/BF01343953

1996, Z. Phys. B: Condens. Matter, 100, 33, 10.1007/s002570050090

1996, J. Appl. Phys., 80, 4491, 10.1063/1.363410

1977, Physica B, 89, 139, 10.1016/0378-4363(77)90068-7

1978, Sov. Phys. Semicond., 12, 1243

1978, Fiz. Tekh. Poluprovodn. (S.-Peterburg), 12, 2081

1988, Sov. Phys. Semicond., 22, 355

1988, Fiz. Tekh. Poluprovodn. (S.-Peterburg), 22, 569

1988, Phys. Lett. A, 127, 373, 10.1016/0375-9601(88)90589-0

1979, Phys. Status Solidi B, 92, 425, 10.1002/pssb.2220920210

1997, Appl. Phys. Rev., 81, 5821, 10.1063/1.365356

1992, J. Appl. Phys., 72, 4275, 10.1063/1.352216

1995, Phys. Rev. B, 52, 1463, 10.1103/PhysRevB.52.1463

1997, Solid State Commun., 104, 81, 10.1016/S0038-1098(97)00277-9

1981, Phys. Rev. B, 23, 928, 10.1103/PhysRevB.23.928

1983, Phys. Rev. B, 27, 4946, 10.1103/PhysRevB.27.4946

1984, Solid State Commun., 49, 1071, 10.1016/0038-1098(84)90426-5

1981, Can. J. Phys., 59, 1844, 10.1139/p81-245

1972, Phys. Rev. B, 5, 3033, 10.1103/PhysRevB.5.3033

1973, Phys. Rev. B, 8, 3852, 10.1103/PhysRevB.8.3852

1974, J. Phys. Chem. Solids, 35, 1533, 10.1016/S0022-3697(74)80282-9

1977, Sov. Phys. Semicond., 10, 1234

1976, Fiz. Tekh. Poluprovodn. (S.-Peterburg), 10, 2072

1978, Can. J. Phys., 56, 1468, 10.1139/p78-196

1998, Phys. Rev. B, 58, 4560

1966, Phys. Lett., 20, 217, 10.1016/0031-9163(66)90330-1

1970, Phys. Rev. B, 1, 3450, 10.1103/PhysRevB.1.3450

1988, Phys. Rev. B, 38, 1806, 10.1103/PhysRevB.38.1806

1989, J. Appl. Phys., 66, 383, 10.1063/1.343888

1973, Sov. Phys. Semicond., 7, 140

1973, Fiz. Tekh. Poluprovodn. (S.-Peterburg), 7, 196

1975, Phys. Rev. B, 12, 5846, 10.1103/PhysRevB.12.5846

1979, Solid State Commun., 30, 631, 10.1016/0038-1098(79)90111-X

1986, Phys. Rev. B, 34, 8650, 10.1103/PhysRevB.34.8650

1998, Phys. Rev. B, 57, 2295, 10.1103/PhysRevB.57.2295

1990, Thin Solid Films, 190, 21, 10.1016/0040-6090(90)90127-Y

1970, Phys. Rev. B, 1, 1436, 10.1103/PhysRevB.1.1436

1957, J. Phys. Chem. Solids, 1, 249, 10.1016/0022-3697(57)90013-6

1998, Opto-Electron. Rev., 6, 155

1980, Can. J. Phys., 58, 560, 10.1139/p80-079

1974, J. Phys. Chem. Solids, 35, 133, 10.1016/0022-3697(74)90026-2

1988, Appl. Phys. Lett., 52, 489, 10.1063/1.99421

1987, Sov. Phys. Semicond., 21, 424

1987, Fiz. Tekh. Poluprovodn. (S.-Peterburg), 21, 694

1985, Appl. Phys. Lett., 46, 986, 10.1063/1.95789

1991, J. Appl. Phys., 69, 3109, 10.1063/1.348576

1961, J. Appl. Phys., 32, 2118, 10.1063/1.1777027

1966, Phys. Rev., 146, 575, 10.1103/PhysRev.146.575

1974, Sov. Phys. Semicond., 7, 1451

1973, Fiz. Tekh. Poluprovodn. (S.-Peterburg), 7, 2179

1978, Phys. Rev. B, 18, 5667, 10.1103/PhysRevB.18.5667

1979, J. Magn. Magn. Mater., 11, 131, 10.1016/0304-8853(79)90248-8

1986, Sov. Phys. Semicond., 20, 603

1986, Fiz. Tekh. Poluprovodn. (S.-Peterburg), 20, 954

1983, Chin. J. Semicond., 4, 549

1983, Chin. J. Semicond., 4, 230

1991, Phys. Status Solidi B, 167, 349, 10.1002/pssb.2221670136

1993, Semicond. Sci. Technol., 8, S417, 10.1088/0268-1242/8/1S/092

1993, Phys. Rev. B, 47, 16274, 10.1103/PhysRevB.47.16274

1993, Phys. Rev. B, 47, 16274, 10.1103/PhysRevB.47.16274

1979, Sov. Phys. Semicond., 13, 178

1979, Fiz. Tekh. Poluprovodn. (S.-Peterburg), 13, 311

1969, Phys. Rev., 186, 824, 10.1103/PhysRev.186.824

1981, J. Phys. Colloq., 42, C7

1983, Phys. Status Solidi B, 116, 557, 10.1002/pssb.2221160217

1987, Sov. Phys. Semicond., 21, 859

1987, Fiz. Tekh. Poluprovodn. (S.-Peterburg), 21, 1413

1990, Sov. Phys. Semicond., 24, 660

1990, Fiz. Tekh. Poluprovodn. (S.-Peterburg), 24, 1047

1980, J. Phys. Soc. Jpn., 49, 1060, 10.1143/JPSJ.49.1060

1973, Phys. Status Solidi B, 55, K139

1986, Phys. Status Solidi B, 135, K129

1977, Phys. Rev. B, 16, 2822, 10.1103/PhysRevB.16.2822

1979, Sov. Phys. Semicond., 13, 773

1979, Fiz. Tekh. Poluprovodn. (S.-Peterburg), 13, 1319

1972, Phys. Rev. Lett., 29, 647, 10.1103/PhysRevLett.29.647

1991, Phys. Rev. B, 44, 9056, 10.1103/PhysRevB.44.9056

1975, RCA Rev., 36, 163

1974, Sov. Phys. Semicond., 8, 147

1974, Fiz. Tekh. Poluprovodn. (S.-Peterburg), 8, 225

2000, J. Appl. Phys., 87, 965, 10.1063/1.371971

1971, Phys. Rev. B, 4, 1211, 10.1103/PhysRevB.4.1211

1972, J. Appl. Phys., 43, 3797, 10.1063/1.1661813

1997, MRS Internet J. Nitride Semicond. Res., 2, 10, 10.1557/S1092578300001368

1974, J. Appl. Phys., 45, 2266, 10.1063/1.1663574

1974, Phys. Rev. B, 10, 676, 10.1103/PhysRevB.10.676

1995, Appl. Phys. Lett., 66, 985, 10.1063/1.113820

1995, Appl. Phys. Lett., 67, 2512, 10.1063/1.114442

1995, Phys. Rev. B, 52, R17028, 10.1103/PhysRevB.52.R17028

1996, Appl. Phys. Lett., 68, 2784, 10.1063/1.116606

1996, Semicond. Sci. Technol., 11, 712, 10.1088/0268-1242/11/5/010

1996, Phys. Rev. B, 53, 16425, 10.1103/PhysRevB.53.16425

1997, Appl. Phys. Lett., 70, 631, 10.1063/1.118293

1997, J. Appl. Phys., 81, 417, 10.1063/1.364074

1997, Phys. Rev. B, 55, 9251, 10.1103/PhysRevB.55.9251

1998, J. Cryst. Growth, 189/190, 652, 10.1016/S0022-0248(98)00236-X

1996, MRS Internet J. Nitride Semicond. Res., 1, 2, 10.1557/S1092578300001745

1996, J. Appl. Phys., 79, 7001, 10.1063/1.362448

1996, J. Appl. Phys., 80, 594, 10.1063/1.362724

1997, Appl. Phys. Lett., 71, 2572, 10.1063/1.120191

1996, J. Appl. Phys., 79, 2784, 10.1063/1.361110

1994, J. Appl. Phys., 76, 2429, 10.1063/1.357592

1995, Phys. Rev. B, 52, 8082, 10.1103/PhysRevB.52.8082

1995, Appl. Phys. Lett., 67, 3322, 10.1063/1.115234

1999, Sov. Phys. Semicond., 33, 1067

1999, Fiz. Tekh. Poluprovodn. (S.-Peterburg), 33, 1173

1997, J. Appl. Phys., 82, 5090, 10.1063/1.366309

1994, Phys. Rev. B, 50, 4397

1994, Phys. Rev. B, 50, 18017, 10.1103/PhysRevB.50.18017

1995, Jpn. J. Appl. Phys., Part 1, 34, 5912, 10.1143/JJAP.34.5912

1996, Phys. Rev. B, 54, 17577, 10.1103/PhysRevB.54.17577

1998, J. Appl. Phys., 83, 1429, 10.1063/1.366847

1997, Phys. Rev. B, 55, 4360

1996, Phys. Rev. B, 54, 2491, 10.1103/PhysRevB.54.2491

1996, Appl. Phys. Lett., 69, 2719, 10.1063/1.117689

1995, Phys. Rev. B, 52, 8132, 10.1103/PhysRevB.52.8132

1973, Phys. Rev. B, 7, 743, 10.1103/PhysRevB.7.743

1974, Phys. Status Solidi B, 64, K123, 10.1002/pssb.2220640116

1976, Sov. Phys. Semicond., 10, 1309

1976, Fiz. Tekh. Poluprovodn. (S.-Peterburg), 10, 2200

1995, Solid State Commun., 95, 597, 10.1016/0038-1098(95)00337-1

1999, Appl. Phys. Lett., 75, 4154, 10.1063/1.125567

1995, Jpn. J. Appl. Phys., Part 2, 34, L1178, 10.1143/JJAP.34.L1178

1996, Appl. Phys. Lett., 68, 1114, 10.1063/1.115730

1996, J. Appl. Phys., 79, 8007, 10.1063/1.362351

1997, Appl. Phys. Lett., 70, 2123, 10.1063/1.118967

2000, Phys. Rev. B, 62, 7365

1998, Phys. Rev. B, 57, 1374, 10.1103/PhysRevB.57.1374

2000, J. Appl. Phys., 87, 369, 10.1063/1.371869

1998, Appl. Phys. Lett., 73, 1391, 10.1063/1.121954

2000, Appl. Phys. Lett., 76, 2737, 10.1063/1.126460

1995, Jpn. J. Appl. Phys., Part 2, 34, L822, 10.1143/JJAP.34.822

1970, Phys. Rev. Lett., 24, 1421, 10.1103/PhysRevLett.24.1421

1972, J. Lumin., 5, 21, 10.1016/0022-2313(72)90032-4

1995, Semicond. Sci. Technol., 10, 101, 10.1088/0268-1242/10/1/017

1997, Appl. Phys. Lett., 71, 948, 10.1063/1.119697

2000, Phys. Rev. B, 61, 12933, 10.1103/PhysRevB.61.12933

1996, Phys. Rev. B, 53, 16310, 10.1103/PhysRevB.53.16310

1996, Phys. Rev. B, 54, 13460, 10.1103/PhysRevB.54.13460

1997, J. Appl. Phys., 82, 1518, 10.1063/1.365951

1997, J. Appl. Phys., 82, 2833, 10.1063/1.366114

1979, Izv. Akad. Nauk SSSR, Neorg. Mater., 15, 1598

1979, Inorg. Mater., 15, 1257

1996, J. Appl. Phys., 79, 3343, 10.1063/1.361236

1996, Physica B, 219–220, 547

1997, Appl. Phys. Lett., 70, 1122, 10.1063/1.118503

1998, Appl. Phys. Lett., 72, 1896, 10.1063/1.121219

1999, Appl. Phys. Lett., 75, 4133, 10.1063/1.125560

1999, J. Non-Cryst. Solids, 254, 123, 10.1016/S0022-3093(99)00383-X

1996, Appl. Phys. Lett., 68, 818, 10.1063/1.116543

1997, Phys. Rev. B, 56, R10024, 10.1103/PhysRevB.56.R10024

1998, J. Appl. Phys., 84, 4951, 10.1063/1.368739

2000, Phys. Rev. B, 62, 8003, 10.1103/PhysRevB.62.8003

1974, Phys. Status Solidi B, 66, 161, 10.1002/pssb.2220660117

1991, J. Vac. Sci. Technol. B, 9, 1924

1992, J. Mater. Sci. Lett., 11, 261, 10.1007/BF00729406

1993, J. Appl. Phys., 73, 189, 10.1063/1.353882

1994, Appl. Phys. Lett., 64, 2997, 10.1063/1.111383

1994, Phys. Rev. B, 50, 8433, 10.1103/PhysRevB.50.8433

1996, J. Appl. Phys., 79, 188, 10.1063/1.360930

1999, J. Phys. Chem. Solids, 60, 419, 10.1016/S0022-3697(98)00005-5

1999, Semicond. Sci. Technol., 14, 23, 10.1088/0268-1242/14/1/003

1996, Phys. Rev. B, 53, 1881, 10.1103/PhysRevB.53.1881

1997, Appl. Phys. Lett., 71, 2067, 10.1063/1.119344

2000, Appl. Phys. Lett., 76, 3025, 10.1063/1.126567

1993, Phys. Rev. B, 48, 15144, 10.1103/PhysRevB.48.15144

1996, Appl. Phys. Lett., 68, 296, 10.1063/1.116064

1996, J. Appl. Phys., 79, 7731, 10.1063/1.362377

1996, Appl. Phys. Lett., 69, 3378, 10.1063/1.117265

1996, Semicond. Sci. Technol., 11, 897, 10.1088/0268-1242/11/6/008

1998, IEEE J. Sel. Top. Quantum Electron., 4, 527, 10.1109/2944.704113

1997, Appl. Phys. Lett., 70, 2577, 10.1063/1.118924

1997, Phys. Rev. B, 56, 7018

1973, J. Appl. Phys., 44, 292, 10.1063/1.1661876

1978, Appl. Phys. Lett., 33, 319, 10.1063/1.90354

1994, Jpn. J. Appl. Phys., Part 1, 33, 2454

1995, Appl. Phys. Lett., 67, 1549, 10.1063/1.114489

1998, Appl. Phys. Lett., 72, 1501, 10.1063/1.121039

1997, Phys. Rev. B, 56, 7363, 10.1103/PhysRevB.56.7363

1998, Appl. Phys. Lett., 72, 2274, 10.1063/1.121277

1993, J. Am. Ceram. Soc., 76, 1132, 10.1111/j.1151-2916.1993.tb03730.x

1996, Jpn. J. Appl. Phys., Part 1, 35, 4421, 10.1143/JJAP.35.4421

1999, Phys. Rev. B, 60, 1496, 10.1103/PhysRevB.60.1496

1999, J. Appl. Phys., 86, 3714, 10.1063/1.371241

1999, Appl. Phys. Lett., 75, 2407, 10.1063/1.125029

2000, Appl. Phys. Lett., 76, 1428, 10.1063/1.126053

2000, Appl. Phys. Lett., 76, 1981, 10.1063/1.126229

2000, Phys. Rev. B, 61, 2711, 10.1103/PhysRevB.61.2711

1997, Phys. Rev. B, 56, 7404, 10.1103/PhysRevB.56.7404

1975, J. Appl. Phys., 46, 3432, 10.1063/1.322064

1976, Thin Solid Films, 36, 141, 10.1016/0040-6090(76)90423-5

1977, Sov. Phys. Semicond., 11, 1257

1977, Fiz. Tekh. Poluprovodn. (S.-Peterburg), 11, 2142

1986, J. Appl. Phys., 59, 3241, 10.1063/1.336906

1990, Thin Solid Films, 192, 227, 10.1016/0040-6090(90)90068-O

1990, Vacuum, 41, 1071, 10.1016/0042-207X(90)93870-O

1992, J. Vac. Sci. Technol. B, 10, 1237, 10.1116/1.585897

1970, Phys. Rev. B, 1, 3351, 10.1103/PhysRevB.1.3351

1988, Phys. Rev. B, 38, 3263, 10.1103/PhysRevB.38.3263

1987, Appl. Phys. Lett., 51, 505, 10.1063/1.98380

1987, Semicond. Sci. Technol., 2, 468, 10.1088/0268-1242/2/7/015

1988, J. Appl. Phys., 63, 5447, 10.1063/1.340366

1985, J. Appl. Phys., 57, 512, 10.1063/1.334784

1986, J. Appl. Phys., 60, 754, 10.1063/1.337426

1991, Phys. Rev. B, 44, 8672, 10.1103/PhysRevB.44.8672

1995, Phys. Rev. B, 51, 10462, 10.1103/PhysRevB.51.10462

1981, J. Appl. Phys., 52, 3586, 10.1063/1.329090

1986, J. Phys. C, 19, L335, 10.1088/0022-3719/19/15/005

1985, J. Appl. Phys., 58, 3481, 10.1063/1.335771

1990, Solid State Commun., 76, 1087, 10.1016/0038-1098(90)90970-M

1998, Appl. Phys. Lett., 73, 665, 10.1063/1.121941

1992, IEEE J. Quantum Electron., 28, 1248, 10.1109/3.135265

1997, Solid State Commun., 102, 231, 10.1016/S0038-1098(96)00711-9

1969, Can. J. Phys., 47, 1661, 10.1139/p69-211

1978, Appl. Phys. Lett., 33, 659, 10.1063/1.90455

1983, Phys. Rev. B, 27, 2587, 10.1103/PhysRevB.27.2587

1982, J. Appl. Phys., 53, 8775, 10.1063/1.330480

1983, J. Appl. Phys., 54, 4543, 10.1063/1.332655

1991, J. Appl. Phys., 69, 827, 10.1063/1.348919

1992, Appl. Phys. Lett., 60, 630, 10.1063/1.106575

1996, J. Appl. Phys., 80, 6229, 10.1063/1.363699

1994, Sov. Phys. Semicond., 28, 691

1994, Fiz. Tekh. Poluprovodn. (S.-Peterburg), 28, 1211

1976, J. Appl. Phys., 47, 5405, 10.1063/1.322570

1986, J. Appl. Phys., 59, 2196, 10.1063/1.336358

1980, Phys. Rev. B, 21, 1311, 10.1103/PhysRevB.21.1311

1982, J. Appl. Phys., 53, 5136, 10.1063/1.331349

1984, Solid State Commun., 49, 907, 10.1016/0038-1098(84)90452-6

1991, Can. J. Phys., 69, 441, 10.1139/p91-072

1999, J. Appl. Phys., 86, 2584, 10.1063/1.371096

1991, Phys. Rev. B, 44, 10546, 10.1103/PhysRevB.44.10546

1980, Appl. Phys. Lett., 36, 978, 10.1063/1.91389

1982, Appl. Phys. Lett., 40, 423, 10.1063/1.93126

1972, Phys. Rev. Lett., 29, 1400, 10.1103/PhysRevLett.29.1400

1973, Phys. Rev. B, 8, 3794, 10.1103/PhysRevB.8.3794

1996, J. Appl. Phys., 80, 6761, 10.1063/1.363804

1979, Appl. Phys. Lett., 34, 492, 10.1063/1.90860

1980, Appl. Phys. Lett., 37, 178, 10.1063/1.91815

1980, J. Electron. Mater., 9, 459, 10.1007/BF02670862

1980, J. Appl. Phys., 51, 2277, 10.1063/1.327859

1985, J. Phys. C, 18, 2667, 10.1088/0022-3719/18/13/013

1979, Appl. Phys. Lett., 35, 772, 10.1063/1.90972

1993, Phys. Rev. B, 48, 8102, 10.1103/PhysRevB.48.8102

1993, Phys. Rev. B, 48, 8848, 10.1103/PhysRevB.48.8848

1982, Appl. Phys. Lett., 41, 476, 10.1063/1.93537

1993, Appl. Phys. Lett., 63, 1804, 10.1063/1.110668

1996, J. Appl. Phys., 80, 1239, 10.1063/1.362862

1981, Appl. Phys. Lett., 38, 450, 10.1063/1.92393

1999, J. Appl. Phys., 85, 4071, 10.1063/1.370312

1988, Appl. Phys. Lett., 52, 2124, 10.1063/1.99554

1990, Phys. Rev. B, 42, 3113, 10.1103/PhysRevB.42.3113

1979, Sov. Phys. Semicond., 13, 1194

1979, Fiz. Tekh. Poluprovodn. (S.-Peterburg), 13, 2046

1984, Appl. Phys. Lett., 44, 341, 10.1063/1.94726

1992, Appl. Phys. Lett., 60, 2386, 10.1063/1.107005

1995, Semicond. Sci. Technol., 10, 1585, 10.1088/0268-1242/10/12/006

1989, Semicond. Sci. Technol., 4, 590, 10.1088/0268-1242/4/7/018

1995, Appl. Phys. Lett., 67, 1256, 10.1063/1.114389

1997, J. Phys. Condens. Matter, 9, 3151, 10.1088/0953-8984/9/15/008

1989, Semicond. Sci. Technol., 4, 243, 10.1088/0268-1242/4/4/014

1995, Phys. Rev. B, 52, 14682, 10.1103/PhysRevB.52.14682

1971, J. Appl. Phys., 42, 3420, 10.1063/1.1660748

1971, Solid State Commun., 9, 245, 10.1016/0038-1098(71)90127-X

1972, Phys. Rev. B, 6, 1301, 10.1103/PhysRevB.6.1301

1972, J. Electron. Mater., 1, 437, 10.1007/BF02659168

1972, Solid State Commun., 10, 353, 10.1016/0038-1098(72)90440-1

1976, Phys. Status Solidi B, 73, 633, 10.1002/pssb.2220730231

1977, Solid State Commun., 21, 437, 10.1016/0038-1098(77)91369-2

1977, Phys. Rev. B, 15, 2032

1983, Phys. Rev. B, 28, 7105, 10.1103/PhysRevB.28.7105

1988, J. Cryst. Growth, 93, 406, 10.1016/0022-0248(88)90560-X

1991, Opt. Quantum Electron., 23, S909, 10.1007/BF00624980

1993, Phys. Rev. B, 48, 11833, 10.1103/PhysRevB.48.11833

1999, J. Appl. Phys., 85, 3561, 10.1063/1.369715

1994, J. Electron. Mater., 23, 125, 10.1007/BF02655258

1988, Jpn. J. Appl. Phys., Part 2, 27, L1553, 10.1143/JJAP.27.L1553

1990, Appl. Phys. Lett., 57, 2698, 10.1063/1.104193

1991, Appl. Phys. Lett., 59, 1034, 10.1063/1.106336

1991, Appl. Phys. Lett., 58, 744, 10.1063/1.104534

1992, Appl. Phys. Lett., 61, 3169, 10.1063/1.107948

1993, Phys. Rev. B, 47, 12598, 10.1103/PhysRevB.47.12598

1995, J. Phys. Chem. Solids, 56, 349, 10.1016/0022-3697(94)00206-1

1994, Appl. Phys. Lett., 64, 2849, 10.1063/1.111445

1989, Phys. Rev. B, 39, 3178, 10.1103/PhysRevB.39.3178

1993, Appl. Phys. Lett., 62, 2369, 10.1063/1.109367

1995, IEEE J. Sel. Top. Quantum Electron., 1, 697, 10.1109/2944.401259

1989, Sov. Phys. Semicond., 23, 557

1989, Fiz. Tekh. Poluprovodn. (S.-Peterburg), 23, 887

1996, J. Appl. Phys., 79, 439, 10.1063/1.360850

1998, IEEE J. Quantum Electron., 34, 93, 10.1109/3.655012

1996, J. Appl. Phys., 35, 537, 10.1143/JJAP.35.537

1996, Semicond. Sci. Technol., 11, 1847, 10.1088/0268-1242/11/12/014

1994, Appl. Phys. Lett., 65, 213, 10.1063/1.112676

1994, Phys. Rev. B, 50, 11190, 10.1103/PhysRevB.50.11190

1995, J. Appl. Phys., 77, 3412, 10.1063/1.358631

1999, J. Appl. Phys., 86, 2025, 10.1063/1.371003

1997, J. Electron. Mater., 26, 944, 10.1007/s11664-997-0279-1

1991, Phys. Status Solidi A, 128, K89, 10.1002/pssa.2211280237

1974, Appl. Phys. Lett., 24, 77, 10.1063/1.1655101

1989, J. Appl. Phys., 66, 3929, 10.1063/1.344019

1991, J. Appl. Phys., 69, 965, 10.1063/1.347341

2000, Sov. Phys. Semicond., 34, 405

2000, Fiz. Tekh. Poluprovodn. (S.-Peterburg), 34, 418

1997, Appl. Phys. Lett., 71, 3251, 10.1063/1.120551

1995, Infrared Phys. Technol., 36, 755, 10.1016/1350-4495(94)00006-7

1997, Phys. Status Solidi B, 199, 403, 10.1002/1521-3951(199702)199:2<403::AID-PSSB403>3.0.CO;2-L

1969, IBM J. Res. Dev., 13, 583, 10.1147/rd.135.0583

1986, Phys. Rev. B, 34, 2638

1975, Phys. Status Solidi B, 68, K81, 10.1002/pssb.2220680106

1997, IEEE Photonics Technol. Lett., 9, 170, 10.1109/68.553079

1972, Sov. Phys. Semicond., 5, 1330

1971, Fiz. Tekh. Poluprovodn. (S.-Peterburg), 5, 1523

1974, Phys. Status Solidi B, 65, 213, 10.1002/pssb.2220650119

1998, Appl. Phys. Lett., 73, 3132, 10.1063/1.122696

1988, Electron. Lett., 24, 1378, 10.1049/el:19880943

1993, Appl. Phys. Lett., 63, 776, 10.1063/1.109904

1996, J. Cryst. Growth, 160, 211, 10.1016/0022-0248(95)00748-2

1999, Phys. Rev. B, 59, 12272, 10.1103/PhysRevB.59.12272

1977, Sov. Phys. Semicond., 11, 913

1977, Fiz. Tekh. Poluprovodn. (S.-Peterburg), 11, 1555

1970, J. Appl. Phys., 41, 2165, 10.1063/1.1659183

1970, Phys. Status Solidi A, 2, K141, 10.1002/pssa.19700020332

1971, Phys. Status Solidi A, 4, K143, 10.1002/pssa.2210040245

1974, Can. J. Phys., 52, 743, 10.1139/p74-101

1977, J. Appl. Phys., 48, 1607, 10.1063/1.323841

1978, Jpn. J. Appl. Phys., Part 1, 17, 2091, 10.1143/JJAP.17.2091

1985, Appl. Phys. Lett., 46, 659, 10.1063/1.95520

1987, Appl. Phys. Lett., 50, 1364, 10.1063/1.97857

1988, J. Appl. Phys., 63, 5859, 10.1063/1.340274

1994, J. Appl. Phys., 76, 504, 10.1063/1.357102

1994, Appl. Phys. Lett., 65, 2442, 10.1063/1.112701

1998, Appl. Phys. Lett., 73, 2799, 10.1063/1.122594

1987, J. Appl. Phys., 61, 2101, 10.1063/1.337966

1999, J. Appl. Phys., 86, 4706, 10.1063/1.371426

1981, Can. J. Phys., 52, 743

1995, Semicond. Sci. Technol., 10, 1177, 10.1088/0268-1242/10/8/023

1992, Appl. Phys. Lett., 60, 3256, 10.1063/1.106711

1971, J. Electrochem. Soc., 118, 805, 10.1149/1.2408169

1989, Infrared Phys., 29, 35, 10.1016/0020-0891(89)90006-7

1995, Phys. Rev. B, 52, 12039, 10.1103/PhysRevB.52.12039

1987, Appl. Phys. Lett., 50, 927, 10.1063/1.97982

1995, Cryst. Res. Technol., 30, 603, 10.1002/crat.2170300505

1997, Jpn. J. Appl. Phys., Part 1, 36, 738, 10.1143/JJAP.36.738

1993, J. Phys. D, 26, 159, 10.1088/0022-3727/26/1/026

1991, Appl. Phys. Lett., 58, 2684, 10.1063/1.104807

1992, Phys. Rev. B, 46, 1909, 10.1103/PhysRevB.46.1909

1998, J. Appl. Phys., 84, 480, 10.1063/1.368051

2000, Semicond. Sci. Technol., 15, 34, 10.1088/0268-1242/15/1/306

1987, Rev. Phys. Appl., 22, 1459, 10.1051/rphysap:0198700220110145900

1998, Solid-State Electron., 42, 2101, 10.1016/S0038-1101(98)00157-9

1997, Phys. Status Solidi A, 163, 101, 10.1002/1521-396X(199709)163:1<101::AID-PSSA101>3.0.CO;2-S

1997, Jpn. J. Appl. Phys., Part 2, 36, L757, 10.1143/JJAP.36.L757

1972, J. Appl. Phys., 43, 4075, 10.1063/1.1660876

1966, Phys. Rev., 146, 601, 10.1103/PhysRev.146.601

1976, Phys. Rev. B, 13, 5415, 10.1103/PhysRevB.13.5415

1981, J. Phys. (Paris), 42, 1151, 10.1051/jphys:019810042080115100

1996, Phys. Rev. Lett., 76, 664, 10.1103/PhysRevLett.76.664

1998, J. Appl. Phys., 84, 3696, 10.1063/1.368546

1972, J. Appl. Phys., 43, 5084, 10.1063/1.1661076

1977, Phys. Rev. B, 15, 2048, 10.1103/PhysRevB.15.2048

1994, J. Appl. Phys., 76, 1951, 10.1063/1.357653

1971, J. Appl. Phys., 42, 3201, 10.1063/1.1660707

1979, J. Phys. C, 12, 1641, 10.1088/0022-3719/12/9/007

1996, Phys. Rev. B, 53, 1990

2000, Appl. Phys. Lett., 76, 2722, 10.1063/1.126455

1979, J. Phys. C, 12, 1653, 10.1088/0022-3719/12/9/008

1982, Sov. Phys. Semicond., 16, 596

1982, Fiz. Tekh. Poluprovodn. (S.-Peterburg), 16, 928

1987, Semicond. Sci. Technol., 2, 323, 10.1088/0268-1242/2/6/001

1988, Appl. Phys. Lett., 52, 549, 10.1063/1.99413

1988, J. Cryst. Growth, 93, 62, 10.1016/0022-0248(88)90507-6

1981, J. Electron. Mater., 10, 919, 10.1007/BF02661008

1991, Appl. Phys. Lett., 59, 423, 10.1063/1.105450

1996, J. Cryst. Growth, 162, 121, 10.1016/0022-0248(95)00950-7

1981, Jpn. J. Appl. Phys., 20, 587, 10.1143/JJAP.20.587

1988, Sov. Phys. Semicond., 22, 211

1988, Fiz. Tekh. Poluprovodn. (S.-Peterburg), 22, 342

1990, J. Appl. Phys., 68, 4604, 10.1063/1.346169

1993, J. Cryst. Growth, 133, 38, 10.1016/0022-0248(93)90101-2

1998, Appl. Surf. Sci., 123/124, 746, 10.1016/S0169-4332(97)00549-7

1999, Phys. Rev. Lett., 82, 237, 10.1103/PhysRevLett.82.237

1989, Jpn. J. Appl. Phys., Part 2, 28, L1334, 10.1143/JJAP.28.L1334

1991, Appl. Phys. Lett., 59, 2251, 10.1063/1.106086

1995, Appl. Phys. Lett., 66, 3051, 10.1063/1.114274

1995, J. Vac. Sci. Technol. A, 13, 705, 10.1116/1.579811

1996, Appl. Phys. Lett., 69, 3390, 10.1063/1.117269

2000, Appl. Phys. Lett., 76, 291, 10.1063/1.125725

1998, Phys. Rev. B, 57, 4425, 10.1103/PhysRevB.57.4425

1998, Appl. Phys. Lett., 72, 2725, 10.1063/1.121072

1997, Jpn. J. Appl. Phys., Part 2, 36, L177, 10.1143/JJAP.36.L177

1998, Appl. Phys. Lett., 73, 1994, 10.1063/1.122346

1998, J. Appl. Phys., 84, 4452, 10.1063/1.368669

1999, Appl. Phys. Lett., 75, 2566, 10.1063/1.125079

1999, Appl. Phys. Lett., 75, 2587, 10.1063/1.125086

1999, Appl. Phys. Lett., 75, 3315, 10.1063/1.125336

2000, Appl. Phys. Lett., 76, 2832, 10.1063/1.126488

1978, J. Phys. C, 11, L143, 10.1088/0022-3719/11/4/005

1982, J. Appl. Phys., 53, 6844, 10.1063/1.329998

1983, Appl. Phys. Lett., 43, 492, 10.1063/1.94363

1986, Solid State Commun., 60, 509, 10.1016/0038-1098(86)90727-1

1987, J. Appl. Phys., 61, 4540, 10.1063/1.338387

1994, Appl. Phys. Lett., 65, 2024, 10.1063/1.112782

1998, Phys. Rev. B, 58, 1928, 10.1103/PhysRevB.58.1928

1996, MRS Internet J. Nitride Semicond. Res., 1, 8, 10.1557/S1092578300001800

2000, Sov. Phys. Semicond., 34, 35

2000, Fiz. Tekh. Poluprovodn. (S.-Peterburg), 34, 36

1998, Phys. Status Solidi B, 205, R7, 10.1002/(SICI)1521-3951(199801)205:1<R7::AID-PSSB99997>3.0.CO;2-7

1998, Appl. Phys. Lett., 72, 1158, 10.1063/1.121033

2000, Appl. Phys. Lett., 76, 3028, 10.1063/1.126568

1997, Appl. Phys. Lett., 70, 2720, 10.1063/1.119003

1989, J. Appl. Phys., 66, 2984, 10.1063/1.344181

1995, J. Cryst. Growth, 146, 462, 10.1016/0022-0248(94)00464-1

1997, Appl. Phys. Lett., 71, 800, 10.1063/1.119650

1997, Appl. Phys. Lett., 71, 2439, 10.1063/1.120112

1998, J. Cryst. Growth, 195, 309, 10.1016/S0022-0248(98)00629-0

1995, Appl. Phys. Lett., 66, 3465, 10.1063/1.113389

1992, Jpn. J. Appl. Phys., Part 2, 31, L853, 10.1143/JJAP.31.L853

1993, Appl. Phys. Lett., 62, 1396, 10.1063/1.108691

1998, Appl. Phys. Lett., 73, 2630, 10.1063/1.122535

1993, Jpn. J. Appl. Phys., Part 1, 32, 4413, 10.1143/JJAP.32.4413

1994, Jpn. J. Appl. Phys., Part 2, 33, L1056, 10.1143/JJAP.33.L1056

1998, J. Appl. Phys., 84, 3830, 10.1063/1.368562

2000, Appl. Phys. Lett., 76, 2859, 10.1063/1.126497

1997, Appl. Phys. Lett., 70, 2861, 10.1063/1.119025

1997, Appl. Phys. Lett., 70, 2984, 10.1063/1.118764

2000, Phys. Rev. B, 61, R7861, 10.1103/PhysRevB.61.R7861

1995, Phys. Rev. B, 51, 10568, 10.1103/PhysRevB.51.10568

1995, Phys. Rev. B, 51, 4343, 10.1103/PhysRevB.51.4343

1996, Phys. Rev. B, 54, 17568, 10.1103/PhysRevB.54.17568

1997, Appl. Phys. Lett., 70, 3558, 10.1063/1.119232

1999, Phys. Rev. B, 60, R11245, 10.1103/PhysRevB.60.R11245

1999, Solid State Commun., 112, 443, 10.1016/S0038-1098(99)00361-0

1997, Appl. Phys. Lett., 70, 1608, 10.1063/1.118630

1997, Mater. Sci. Eng., B, 50, 148, 10.1016/S0921-5107(97)00153-0

1999, Appl. Phys. Lett., 74, 1254, 10.1063/1.123516

2000, Appl. Phys. Lett., 76, 3439, 10.1063/1.126671

2000, Solid State Commun., 114, 623, 10.1016/S0038-1098(00)00119-8

1998, J. Electron. Mater., 27, 484, 10.1007/s11664-998-0181-5

2000, Appl. Phys. Lett., 76, 1285, 10.1063/1.126010

1999, Phys. Rev. Lett., 82, 3312, 10.1103/PhysRevLett.82.3312

1997, Phys. Rev. B, 56, 10233, 10.1103/PhysRevB.56.10233

2000, Phys. Rev. B, 61, 7479, 10.1103/PhysRevB.61.7479

2000, Appl. Phys. Lett., 77, 1843, 10.1063/1.1311324

1999, Phys. Status Solidi B, 216, 135, 10.1002/(SICI)1521-3951(199911)216:1<135::AID-PSSB135>3.0.CO;2-#

2000, Phys. Rev. B, 61, 4433, 10.1103/PhysRevB.61.4433

1992, Appl. Phys. Lett., 60, 2540, 10.1063/1.106906

1993, Appl. Phys. Lett., 63, 208, 10.1063/1.110371

1994, J. Cryst. Growth, 145, 87, 10.1016/0022-0248(94)91033-2

1998, Jpn. J. Appl. Phys., Part 1, 37, 4680, 10.1143/JJAP.37.4680

2000, Appl. Phys. Lett., 76, 1267, 10.1063/1.126005

2000, Appl. Phys. Lett., 77, 1946, 10.1063/1.1311957

2000, Appl. Phys. Lett., 76, 3251, 10.1063/1.126597

2000, Appl. Phys. Lett., 77, 2180, 10.1063/1.1313813

1996, J. Appl. Phys., 80, 1934, 10.1063/1.362945

1997, Jpn. J. Appl. Phys., Part 2, 36, L320, 10.1143/JJAP.36.L320

1998, J. Vac. Sci. Technol. B, 16, 1293

2000, Appl. Phys. Lett., 76, 3576, 10.1063/1.126711

1978, J. Electron. Mater., 7, 639, 10.1007/BF02655439

1974, J. Electron. Mater., 3, 635, 10.1007/BF02655291

1981, J. Mater. Sci., 16, 2935, 10.1007/BF00540299

1989, Solid State Commun., 70, 33, 10.1016/0038-1098(89)90462-6

1976, Phys. Status Solidi B, 73, K135

1977, Sov. Phys. Semicond., 11, 910

1977, Fiz. Tekh. Poluprovodn. (S.-Peterburg), 11, 1550

1999, Appl. Phys. Lett., 75, 2891, 10.1063/1.125181

1999, Phys. Rev. B, 60, 4430, 10.1103/PhysRevB.60.4430

1998, Appl. Phys. Lett., 73, 3703, 10.1063/1.122869

1999, Phys. Rev. Lett., 82, 1221, 10.1103/PhysRevLett.82.1221

1999, Appl. Phys. Lett., 75, 2578, 10.1063/1.125083

1999, Appl. Phys. Lett., 74, 1287, 10.1063/1.123526

2000, Appl. Phys. Lett., 76, 2409, 10.1063/1.126360

1980, Solid State Commun., 36, 419, 10.1016/0038-1098(80)90924-2

1981, IEEE J. Quantum Electron., 17, 139, 10.1109/JQE.1981.1071081

1985, Phys. Status Solidi B, 130, 637, 10.1002/pssb.2221300227

1981, Solid State Commun., 39, 639, 10.1016/0038-1098(81)90340-9

1988, J. Appl. Phys., 63, 5485, 10.1063/1.340373

1983, Phys. Rev. B, 28, 3632, 10.1103/PhysRevB.28.3632

1987, Solid-State Electron., 30, 217, 10.1016/0038-1101(87)90153-5

1993, J. Appl. Phys., 74, 737, 10.1063/1.355242

1993, Appl. Phys. Lett., 63, 1918, 10.1063/1.110648

1986, Appl. Phys. Lett., 48, 419, 10.1063/1.96517

1999, Appl. Phys. Lett., 75, 238, 10.1063/1.124334

2000, J. Cryst. Growth, 216, 97, 10.1016/S0022-0248(00)00363-8

1986, J. Electron. Mater., 15, 41, 10.1007/BF02649949

1991, Sov. Phys. Semicond., 25, 167

1991, Fiz. Tekh. Poluprovodn. (S.-Peterburg), 25, 276

1997, J. Cryst. Growth, 179, 1, 10.1016/S0022-0248(97)00117-6

1999, Infrared Phys. Technol., 40, 423, 10.1016/S1350-4495(99)00030-4

1996, Mater. Sci. Eng., B, 41, 314, 10.1016/S0921-5107(96)01668-6

1991, Sov. Phys. Semicond., 25, 989

1991, Fiz. Tekh. Poluprovodn. (S.-Peterburg), 25, 1639

1992, J. Cryst. Growth, 121, 463, 10.1016/0022-0248(92)90158-F

1999, Jpn. J. Appl. Phys., Part 1, 38, 1314, 10.1143/JJAP.38.1314

1993, Sov. Phys. Semicond., 27, 978

1993, Fiz. Tekh. Poluprovodn. (S.-Peterburg), 27, 1777

1994, Semicond. Sci. Technol., 9, 1279, 10.1088/0268-1242/9/7/001

1997, Appl. Phys. Lett., 70, 2931, 10.1063/1.118747

1985, J. Electron. Mater., 14, 729, 10.1007/BF02654308

1990, Sov. Phys. Semicond., 24, 876

1990, Fiz. Tekh. Poluprovodn. (S.-Peterburg), 24, 1397

2000, J. Appl. Phys., 87, 1780, 10.1063/1.372092

1992, J. Appl. Phys., 71, 6116, 10.1063/1.350419

1993, J. Appl. Phys., 73, 3958, 10.1063/1.352859

1988, Sov. J. Quantum Electron., 18, 117, 10.1070/QE1988v018n01ABEH011229

1992, Chin. Phys. Lett., 9, 53, 10.1088/0256-307X/9/1/015

1998, Thin Solid Films, 313–314, 667

1999, Superlattices Microstruct., 26, 279, 10.1006/spmi.1999.0777

1972, Sov. Phys. Semicond., 6, 77

1972, Fiz. Tekh. Poluprovodn. (S.-Peterburg), 6, 97

1992, Jpn. J. Appl. Phys., Part 1, 31, 2514, 10.1143/JJAP.31.2514

1992, J. Electron. Mater., 21, 977, 10.1007/BF02684206

2000, Appl. Phys. Lett., 76, 1161, 10.1063/1.125970

2000, Appl. Phys. Lett., 77, 791, 10.1063/1.1306540

2000, Appl. Phys. Lett., 77, 2136, 10.1063/1.1314288

1992, Solid State Phys., 46, 1, 10.1016/S0081-1947(08)60397-5

1983, Surf. Sci., 132, 543, 10.1016/0039-6028(83)90561-7

1986, Surf. Sci., 174, 299, 10.1016/0039-6028(86)90425-5

1974, Phys. Rev. Lett., 33, 827, 10.1103/PhysRevLett.33.827

1975, Phys. Rev. Lett., 34, 1327, 10.1103/PhysRevLett.34.1327

1986, J. Appl. Phys., 59, 200, 10.1063/1.336864

1984, Appl. Phys. Lett., 45, 1237, 10.1063/1.95076

1986, Appl. Phys. Lett., 48, 541, 10.1063/1.96500

1986, Phys. Rev. B, 33, 8863, 10.1103/PhysRevB.33.8863

1987, Appl. Phys. Lett., 50, 404, 10.1063/1.98213

1995, J. Appl. Phys., 77, 4541, 10.1063/1.359415

1985, J. Appl. Phys., 57, 5340, 10.1063/1.334852

1992, J. Appl. Phys., 72, 4134, 10.1063/1.352221

1992, Superlattices Microstruct., 12, 163, 10.1016/0749-6036(92)90329-4

1992, Semicond. Sci. Technol., 7, B21, 10.1088/0268-1242/7/3B/005

1993, J. Appl. Phys., 73, 8480, 10.1063/1.353422

1993, Appl. Phys. Lett., 62, 2813, 10.1063/1.109218

1994, J. Appl. Phys., 75, 1010, 10.1063/1.356507

1994, Phys. Rev. B, 49, 10444, 10.1103/PhysRevB.49.10444

1995, J. Cryst. Growth, 150, 49, 10.1016/0022-0248(95)80179-G

1995, Phys. Rev. B, 52, 14693, 10.1103/PhysRevB.52.14693

1996, Semicond. Sci. Technol., 11, 766, 10.1088/0268-1242/11/5/019

1997, Appl. Phys. Lett., 71, 2292, 10.1063/1.120053

1997, Phys. Rev. B, 56, 2026, 10.1103/PhysRevB.56.2026

1999, Sov. Phys. Semicond., 33, 858

1999, Fiz. Tekh. Poluprovodn. (S.-Peterburg), 33, 940

2000, Solid State Commun., 113, 201

1988, Phys. Rev. B, 37, 4528, 10.1103/PhysRevB.37.4528

1990, Phys. Rev. B, 41, 2813, 10.1103/PhysRevB.41.2813

1998, Appl. Phys. Lett., 72, 2011, 10.1063/1.121249

1988, Phys. Rev. B, 38, 7723, 10.1103/PhysRevB.38.7723

1987, Phys. Rev. B, 35, 6182, 10.1103/PhysRevB.35.6182

1990, Phys. Rev. B, 41, 2832, 10.1103/PhysRevB.41.2832

1992, J. Phys.: Condens. Matter, 4, 8083

1998, Phys. Rev. B, 58, 7864

1984, J. Appl. Phys., 55, 3176, 10.1063/1.333348

1991, Phys. Rev. B, 43, 2263, 10.1103/PhysRevB.43.2263

1993, Appl. Phys. Lett., 62, 291, 10.1063/1.108994

1993, Appl. Surf. Sci., 63, 172, 10.1016/0169-4332(93)90084-O

1993, J. Appl. Phys., 74, 1437, 10.1063/1.354904

1994, J. Appl. Phys., 76, 1077, 10.1063/1.357826

1998, Superlattices Microstruct., 23, 253, 10.1006/spmi.1996.0310

1993, Phys. Rev. B, 47, 6439, 10.1103/PhysRevB.47.6439

1994, J. Appl. Phys., 76, 2893, 10.1063/1.357527

1991, J. Appl. Phys., 69, 372, 10.1063/1.347724

1999, J. Appl. Phys., 85, 4071, 10.1063/1.370312

1991, Appl. Phys. Lett., 58, 1759, 10.1063/1.105082

1997, Phys. Rev. B, 55, 2274, 10.1103/PhysRevB.55.2274

1997, J. Phys.: Condens. Matter, 9, 439

1991, J. Appl. Phys., 69, 342, 10.1063/1.347718

1996, J. Electron. Mater., 26, L6

1992, Appl. Phys. Lett., 60, 1241, 10.1063/1.107418

1992, Phys. Rev. B, 45, 6259

1987, Phys. Rev. B, 35, 8154, 10.1103/PhysRevB.35.8154

1990, J. Vac. Sci. Technol. B, 8, 768, 10.1116/1.584963

1988, Appl. Phys. Lett., 53, 1620, 10.1063/1.99930

1992, Semicond. Sci. Technol., 7, 524, 10.1088/0268-1242/7/4/014

1999, J. Appl. Phys., 85, 4184, 10.1063/1.370329

1993, Solid State Commun., 86, 1, 10.1016/0038-1098(93)90236-G

1987, Appl. Phys. Lett., 51, 1632, 10.1063/1.98578

1982, J. Vac. Sci. Technol., 20, 705, 10.1116/1.571635

1989, Appl. Phys. Lett., 54, 1878, 10.1063/1.101246

1989, J. Vac. Sci. Technol. B, 7, 815, 10.1116/1.584606

1991, Phys. Rev. B, 44, 1734, 10.1103/PhysRevB.44.1734

1995, J. Vac. Sci. Technol. B, 13, 1728

1987, Phys. Rev. B, 36, 8165, 10.1103/PhysRevB.36.8165

1991, Phys. Status Solidi A, 124, K111, 10.1002/pssa.2211240233

1991, Appl. Phys. Lett., 58, 1047, 10.1063/1.104419

1991, Appl. Phys. Lett., 59, 1329, 10.1063/1.105490

1991, Phys. Rev. B, 44, 3144

1991, Solid State Commun., 79, 889, 10.1016/0038-1098(91)90437-Z

1991, J. Appl. Phys., 70, 7537, 10.1063/1.349706

1993, Semicond. Sci. Technol., 8, 477, 10.1088/0268-1242/8/3/030

1994, Appl. Phys. Lett., 65, 2728, 10.1063/1.112549

1994, Phys. Rev. B, 50, 18147, 10.1103/PhysRevB.50.18147

1995, Semicond. Sci. Technol., 10, 127, 10.1088/0268-1242/10/2/002

1995, Phys. Rev. B, 51, 13274, 10.1103/PhysRevB.51.13274

1996, J. Appl. Phys., 79, 7775, 10.1063/1.362383

1996, J. Appl. Phys., 79, 8121, 10.1063/1.362372

1996, Phys. Rev. B, 54, 13820, 10.1103/PhysRevB.54.13820

1997, Phys. Rev. B, 55, 2406

1997, Mater. Sci. Eng., B, 44, 147, 10.1016/S0921-5107(96)01801-6

1997, J. Electron. Mater., 26, 922, 10.1007/s11664-997-0275-5

1998, J. Appl. Phys., 83, 2093, 10.1063/1.366942

2000, Appl. Phys. Lett., 77, 776, 10.1063/1.1306660

1999, Phys. Rev. B, 59, 5056, 10.1103/PhysRevB.59.5056

1994, Phys. Rev. B, 50, 1628, 10.1103/PhysRevB.50.1628

1999, Phys. Rev. B, 59, 10315, 10.1103/PhysRevB.59.10315

1998, J. Vac. Sci. Technol. A, 16, 805, 10.1116/1.581062

2000, Appl. Phys. Lett., 76, 1146, 10.1063/1.125965

2000, Appl. Phys. Lett., 76, 2571, 10.1063/1.126411

1991, Phys. Rev. B, 43, 2050

1991, Appl. Phys. Lett., 58, 842, 10.1063/1.104507

1985, Phys. Rev. B, 32, 6968, 10.1103/PhysRevB.32.6968

1988, Phys. Rev. B, 38, 6305, 10.1103/PhysRevB.38.6305

1991, J. Appl. Phys., 70, 405, 10.1063/1.350289

1991, J. Electron. Mater., 20, 1117, 10.1007/BF03030218

1994, J. Appl. Phys., 75, 4673, 10.1063/1.355920

1996, J. Appl. Phys., 80, 846, 10.1063/1.362921

1998, J. Cryst. Growth, 188, 332, 10.1016/S0022-0248(98)00069-4

1998, Jpn. J. Appl. Phys., Part 1, 37, 3915, 10.1143/JJAP.37.3915

1993, Semicond. Sci. Technol., 8, 1666, 10.1088/0268-1242/8/8/030

1995, Nuovo Cimento D, 17, 1367, 10.1007/BF02457211

1992, Appl. Phys. Lett., 61, 2317, 10.1063/1.108229

1999, Appl. Phys. Lett., 74, 410, 10.1063/1.123044

2000, J. Cryst. Growth, 209, 540

1989, J. Cryst. Growth, 95, 363, 10.1016/0022-0248(89)90419-3

1986, Jpn. J. Appl. Phys., Part 2, 25, L127, 10.1143/JJAP.25.L127

1987, Appl. Phys. Lett., 50, 906, 10.1063/1.98028

1987, J. Appl. Phys., 61, 643, 10.1063/1.338931

1992, Appl. Phys. Lett., 60, 474, 10.1063/1.106639

1993, Semicond. Sci. Technol., 8, 2092, 10.1088/0268-1242/8/12/010

1990, Appl. Phys. Lett., 56, 833, 10.1063/1.102677

1989, J. Appl. Phys., 65, 4898, 10.1063/1.343205

1991, Appl. Phys. Lett., 58, 744, 10.1063/1.104534

1992, Phys. Rev. B, 46, 1886

1991, Appl. Phys. Lett., 58, 616, 10.1063/1.104574

1993, Phys. Rev. B, 47, 6465, 10.1103/PhysRevB.47.6465

1996, J. Appl. Phys., 79, 2162, 10.1063/1.361077

1996, Appl. Phys. Lett., 69, 1288, 10.1063/1.117394

1996, Appl. Phys. Lett., 69, 3022, 10.1063/1.116826

1995, Appl. Phys. Lett., 67, 1718, 10.1063/1.115027

1997, J. Electron. Mater., 26, 944, 10.1007/s11664-997-0279-1

1997, J. Appl. Phys., 82, 3374, 10.1063/1.365650

1998, J. Appl. Phys., 84, 2127, 10.1063/1.368357

1992, J. Vac. Sci. Technol. B, 10, 1754, 10.1116/1.586235

1987, J. Appl. Phys., 61, 1713, 10.1063/1.338067

1993, Appl. Phys. Lett., 63, 1240, 10.1063/1.110772

1995, Appl. Phys. Lett., 66, 619, 10.1063/1.114032

1998, Appl. Phys. Lett., 73, 1098, 10.1063/1.122096

1993, Phys. Rev. B, 48, 18031, 10.1103/PhysRevB.48.18031

1995, J. Phys. Chem. Solids, 56, 423, 10.1016/0022-3697(94)00216-9

1995, Appl. Phys. Lett., 66, 2852, 10.1063/1.113451

1996, Mater. Sci. Eng., B, 39, 79, 10.1016/0921-5107(95)01443-8

1996, J. Appl. Phys., 80, 4592, 10.1063/1.363829

1992, Jpn. J. Appl. Phys., Part 2, 31, L1161, 10.1143/JJAP.31.L1161

1993, J. Vac. Sci. Technol. B, 11, 1617, 10.1116/1.586491

1997, J. Appl. Phys., 81, 1417, 10.1063/1.363899

1997, J. Phys.: Condens. Matter, 9, L279

1997, Z. Phys. B: Condens. Matter, 102, 61

1983, Phys. Rev. B, 28, 1944, 10.1103/PhysRevB.28.1944

1984, Appl. Phys. Lett., 45, 749, 10.1063/1.95385

1988, Phys. Rev. B, 37, 4664, 10.1103/PhysRevB.37.4664

1992, Phys. Rev. B, 45, 4312

1997, Appl. Phys. Lett., 70, 3449, 10.1063/1.119198

1991, Jpn. J. Appl. Phys., Part 2, 30, L1631, 10.1143/JJAP.30.L1631

1993, Jpn. J. Appl. Phys., Part 1, 32, 544

1993, Appl. Phys. Lett., 62, 2078, 10.1063/1.109484

1994, J. Cryst. Growth, 145, 746, 10.1016/0022-0248(94)91137-1

1996, Phys. Rev. B, 54, 5691, 10.1103/PhysRevB.54.5691

1997, Surf. Sci., 387, 371, 10.1016/S0039-6028(97)00401-9

1998, J. Phys.: Condens. Matter, 10, 577

1984, Phys. Rev. B, 30, 4874, 10.1103/PhysRevB.30.4874

1977, J. Vac. Sci. Technol., 14, 1016, 10.1116/1.569312

1983, J. Appl. Phys., 54, 2522, 10.1063/1.332320

1993, J. Appl. Phys., 74, 2112, 10.1063/1.354734

1993, Phys. Rev. B, 47, 16299, 10.1103/PhysRevB.47.16299

1985, Phys. Rev. B, 32, 5303, 10.1103/PhysRevB.32.5303

1986, Appl. Phys. Lett., 49, 1037, 10.1063/1.97464

1987, Appl. Phys. Lett., 50, 1763

1987, Appl. Phys. Lett., 50, 1763

1987, Solid State Commun., 61, 703, 10.1016/0038-1098(87)90720-4

1988, Phys. Rev. B, 37, 6278, 10.1103/PhysRevB.37.6278

1992, Phys. Rev. B, 46, 13379, 10.1103/PhysRevB.46.13379

1989, Superlattices Microstruct., 5, 591, 10.1016/0749-6036(89)90392-3

1990, J. Appl. Phys., 68, 3451, 10.1063/1.346355

1996, Appl. Phys. Lett., 68, 54, 10.1063/1.116755

1991, J. Appl. Phys., 69, 3154, 10.1063/1.348584

1992, Solid State Commun., 81, 961, 10.1016/0038-1098(92)90877-C

1991, J. Appl. Phys., 70, 4342, 10.1063/1.349115

1996, Appl. Phys. Lett., 69, 3218, 10.1063/1.118015

1992, Phys. Rev. B, 45, 1317, 10.1103/PhysRevB.45.1317

1992, J. Vac. Sci. Technol. B, 10, 1744, 10.1116/1.586234

1993, J. Vac. Sci. Technol. B, 11, 1693, 10.1116/1.586506

1993, Semicond. Sci. Technol., 8, S106, 10.1088/0268-1242/8/1S/024

1993, Semicond. Sci. Technol., 8, S121, 10.1088/0268-1242/8/1S/027

1993, Semicond. Sci. Technol., 8, S102, 10.1088/0268-1242/8/1S/023

1995, Phys. Rev. B, 51, 1729, 10.1103/PhysRevB.51.1729

1996, Semicond. Sci. Technol., 11, 823, 10.1088/0268-1242/11/5/001

1995, Appl. Phys. Lett., 66, 2981, 10.1063/1.114250

1987, J. Appl. Phys., 61, 5337, 10.1063/1.338270

1986, Appl. Phys. Lett., 49, 41, 10.1063/1.97077

1989, Solid State Commun., 72, 795, 10.1016/0038-1098(89)90911-3

1996, J. Appl. Phys., 79, 8379, 10.1063/1.362557

1978, Solid State Commun., 27, 935, 10.1016/0038-1098(78)91010-4

1981, J. Vac. Sci. Technol., 19, 589, 10.1116/1.571134

1985, J. Appl. Phys., 58, 3933, 10.1063/1.335566

1990, Appl. Phys. Lett., 56, 1418, 10.1063/1.102486

1990, Appl. Phys. Lett., 57, 801, 10.1063/1.103425

1991, Appl. Phys. Lett., 59, 846, 10.1063/1.105255

1992, Appl. Phys. Lett., 61, 207, 10.1063/1.108219

1993, Semicond. Sci. Technol., 8, S106, 10.1088/0268-1242/8/1S/024

1994, Solid-State Electron., 37, 733, 10.1016/0038-1101(94)90288-7

1995, Appl. Phys. Lett., 66, 1921, 10.1063/1.113277

1995, Appl. Phys. Lett., 67, 3700, 10.1063/1.115354

1995, Inst. Phys. Conf. Ser., 144, 219

1995, Electron. Lett., 31, 275, 10.1049/el:19950221

1996, J. Appl. Phys., 80, 1116, 10.1063/1.362849

1996, Appl. Phys. Lett., 68, 2135, 10.1063/1.115609

1997, Appl. Phys. Lett., 71, 1403, 10.1063/1.119906

1997, Phys. Rev. B, 55, 4477

1997, Appl. Phys. Lett., 71, 3251, 10.1063/1.120551

1997, IEEE J. Quantum Electron., 33, 1403, 10.1109/3.605563

1997, Appl. Phys. Lett., 70, 1125, 10.1063/1.118504

1997, IEEE Photonics Technol. Lett., 9, 1573, 10.1109/68.643265

1997, Appl. Phys. Lett., 71, 3281, 10.1063/1.120313

1997, Appl. Phys. Lett., 71, 3764, 10.1063/1.120499

1997, IEEE Photonics Technol. Lett., 9, 735

1997, Appl. Phys. Lett., 71, 3483, 10.1063/1.120366

1998, Appl. Phys. Lett., 72, 3434, 10.1063/1.121657

1999, Phys. Rev. B, 59, 5745, 10.1103/PhysRevB.59.5745

1999, J. Appl. Phys., 86, 1796, 10.1063/1.370971

1998, Appl. Phys. Lett., 73, 3833, 10.1063/1.122909

1999, Appl. Phys. Lett., 74, 1075, 10.1063/1.123486

1999, Electron. Lett., 35, 1743, 10.1049/el:19991204

1998, Electron. Lett., 34, 270, 10.1049/el:19981221

1989, Appl. Phys. Lett., 54, 1893, 10.1063/1.101233

1999, Appl. Phys. Lett., 74, 1135, 10.1063/1.123466

2000, J. Appl. Phys., 87, 8192, 10.1063/1.373517

1992, J. Vac. Sci. Technol. B, 10, 1773, 10.1116/1.586239

1993, Appl. Phys. Lett., 63, 1795, 10.1063/1.110665

1996, Phys. Rev. B, 53, 10852, 10.1103/PhysRevB.53.10852

1997, Phys. Rev. B, 55, 13080, 10.1103/PhysRevB.55.13080

1988, Appl. Phys. Lett., 53, 216, 10.1063/1.100135

1991, Phys. Rev. B, 44, 1143, 10.1103/PhysRevB.44.1143

1996, Appl. Phys. Lett., 69, 2501, 10.1063/1.117720

1997, Phys. Rev. B, 55, 4589

1998, Appl. Phys. Lett., 72, 3473, 10.1063/1.121670

1994, Appl. Phys. Lett., 64, 812, 10.1063/1.111022

1995, Appl. Phys. Lett., 66, 364, 10.1063/1.114214

1995, Appl. Phys. Lett., 66, 118, 10.1063/1.113535

1997, Phys. Rev. B, 56, 3621, 10.1103/PhysRevB.56.3621

1993, Physica B, 184, 106, 10.1016/0921-4526(93)90330-9

1993, J. Vac. Sci. Technol. B, 11, 1652, 10.1116/1.586497

1996, Semicond. Sci. Technol., 11, 1185, 10.1088/0268-1242/11/8/012

1996, Appl. Phys. Lett., 69, 2237, 10.1063/1.117139

2000, Appl. Phys. Lett., 76, 3905, 10.1063/1.126816

1984, Solid State Commun., 49, 663, 10.1016/0038-1098(84)90216-3

1995, Appl. Phys. Lett., 66, 1785, 10.1063/1.113321

1996, Appl. Phys. Lett., 69, 3740, 10.1063/1.117207

1993, Phys. Rev. B, 47, 7588, 10.1103/PhysRevB.47.7588

1979, Appl. Phys. Lett., 34, 862, 10.1063/1.90702

1984, Appl. Phys. Lett., 45, 1199, 10.1063/1.95096

1990, Semicond. Sci. Technol., 5, 918, 10.1088/0268-1242/5/8/021

1997, Mater. Sci. Technol., 13, 971, 10.1179/mst.1997.13.11.971

1998, J. Appl. Phys., 83, 5852, 10.1063/1.367443

1998, IEEE J. Quantum Electron., 34, 1873, 10.1109/3.720221

1999, Appl. Phys. Lett., 74, 717, 10.1063/1.123101

1999, Appl. Phys. Lett., 74, 3495, 10.1063/1.124141

1993, Solid-State Electron., 36, 649, 10.1016/0038-1101(93)90279-Y

1993, J. Appl. Phys., 73, 2360, 10.1063/1.353114

1993, Solid-State Electron., 36, 1371, 10.1016/0038-1101(93)90044-Q

1990, Superlattices Microstruct., 8, 375, 10.1016/0749-6036(90)90334-4

1995, Solid-State Electron., 38, 525, 10.1016/0038-1101(94)00111-R

1995, Appl. Phys. Lett., 67, 3432, 10.1063/1.115270

1996, J. Phys.: Condens. Matter, 8, 4751

1994, Phys. Rev. B, 49, 4710, 10.1103/PhysRevB.49.4710

1997, Appl. Phys. Lett., 70, 2407, 10.1063/1.118886

1991, Appl. Phys. Lett., 58, 2375, 10.1063/1.104875

1995, J. Vac. Sci. Technol. B, 13, 1582, 10.1116/1.588191

1999, Jpn. J. Appl. Phys., Part 1, 38, 5003, 10.1143/JJAP.38.5003

2000, Appl. Phys. Lett., 76, 2862, 10.1063/1.126498

2000, J. Appl. Phys., 88, 4153, 10.1063/1.1290449

1986, J. Vac. Sci. Technol. B, 4, 1068, 10.1116/1.583544

1999, Surf. Sci., 424, 232, 10.1016/S0039-6028(98)00942-X

1994, Appl. Phys. Lett., 65, 2211, 10.1063/1.112764

1995, Appl. Phys. Lett., 67, 3322, 10.1063/1.115234

1996, Appl. Phys. Lett., 68, 2541, 10.1063/1.116177

1996, Appl. Phys. Lett., 68, 2879, 10.1063/1.116355

1998, Mater. Res. Soc. Symp. Proc., 482, 775

1998, J. Appl. Phys., 84, 2086, 10.1063/1.368355

1999, J. Vac. Sci. Technol. B, 17, 1674, 10.1116/1.590808

1994, J. Vac. Sci. Technol. B, 12, 2470, 10.1116/1.587786

1996, Phys. Rev. B, 53, 1377, 10.1103/PhysRevB.53.1377

1996, Mater. Res. Soc. Symp. Proc., 395, 515

1996, J. Appl. Phys., 80, 2918, 10.1063/1.363146

1996, J. Appl. Phys., 80, 5076, 10.1063/1.363486

1998, Mater. Res. Soc. Symp. Proc., 482, 911

1997, Phys. Rev. B, 55, R7323, 10.1103/PhysRevB.55.R7323

1998, Phys. Rev. B, 57, R9427, 10.1103/PhysRevB.57.R9427