An optical gas sensor based on ellipsometric readout
SENSORS, 2002 IEEE - Tập 1 - Trang 339-342 vol.1
Tóm tắt
A gas sensor based on off-null ellipsometric readout is presented. It includes miniaturization of a null ellipsometer facilitating multisensing. and small optical components are used. Some experimental results on low concentration alcoholic gases (methanol, ethanol and 2-propanol) with porous silicon and chemically modified porous silicon as sensing layers are shown. Currently, the lower detection limit for these gases is about 1 ppm. Optimization of the sensor system and improvement of sensitivity or alteration of selectivity by modification of the sensing layer is also discussed.
Từ khóa
#Optical sensors #Gas detectors #Gases #Silicon #Optical devices #Alcoholism #Methanol #Ethanol #Chemicals #Sensor systemsTài liệu tham khảo
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