Air-based sputtering deposition of TiNxOy films for solar selective absorber coatings applications

Thin Solid Films - Tập 660 - Trang 733-740 - 2018
Yu-Chen Liou1, Fu-Hsing Lu1
1Department of Materials Science Engineering, National Chung Hsing University, 145 Xingda Road, Taichung 402, Taiwan

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