Advances in the elucidation of hydrogen-related defects in hydrogenated amorphous silicon
COMMAD 2000 Proceedings. Conference on Optoelectronic and Microelectronic Materials and Devices - Trang 527-530
Tóm tắt
The role of interstitial (mobile) hydrogen in the creation of structural defects in doped hydrogenated amorphous silicon (a-Si:H) is elucidated by first reviewing recent calculations of their electronic states. Two new processes involving hydrogen interstitials are proposed. In the first, a neutral hydrogen atom reacts with a dopant atom to produce a charged dopant-interstitial pair. In the other process, suggested by Muon Spin Resonance (MuSR) experiments, neutral hydrogen diffuses to charged silicon dangling bonds, where charge transfer occurs between the two species. These two chemical processes are then put together to show how dopants may produce charged defects in a-Si:H.
Từ khóa
#Amorphous silicon #Hydrogen #Semiconductor process modeling #Doping #Bonding #Energy states #Physics #Mesons #Resonance #Charge transferTài liệu tham khảo
10.1016/S0022-3093(98)00167-7
10.1016/0921-4526(91)90121-T
singh, 2000, J Non-Cryst Solids
10.1016/S0022-3093(05)80080-8
staebler, 1771, Appl Phys Lett, 31, 272
10.1016/S0022-3093(05)80045-6
10.1016/S0022-3093(99)00763-2
10.1016/S0022-3093(99)00739-5
10.1063/1.102633
singh, 1995, 23rd International Conference on the Physics of Semiconductors, 3, 2697
10.1016/0921-4526(91)90108-Q
10.1017/CBO9780511525247
10.1103/PhysRevLett.73.130