ARROW-based optical accelerometers
SENSORS, 2002 IEEE - Tập 2 - Trang 1075-1079 vol.2
Tóm tắt
Design, fabrication and characterization of silicon-based stress-free self-aligned quad beam accelerometer is presented. Standard total internal reflection waveguides have been replaced by ARROW structures, enhancing the sensitivity to >4dB/g at the wavelength visible range (633nm) Moreover, as the waveguide core has approximately the same size as the input fiber optic, insertion losses have been reduced to 2.5dB. Attenuation in ARROW waveguides is 0.3dB/cm.
Từ khóa
#Accelerometers #Optical waveguides #Optical sensors #Optical attenuators #Electromagnetic waveguides #Optical films #Optical losses #Optical refraction #Integrated optics #SiliconTài liệu tham khảo
10.1117/12.309678
10.1109/5.704269
10.1063/1.97085
kalenik, 1998, A Cantilever Optical-fiber Acceler-ometer, Sens & Act A, 68, 350, 10.1016/S0924-4247(98)00066-1
10.1109/50.495160
10.1109/3.142556
macdonald, 1990, A Review of Low Cost Accelerometers for Vehicle Dynamics, Sens & Act A, 21?23, 281
10.1109/PROC.1982.12331
rudolf, 1990, Precision Accelerometers with ?g Resolution, Sens & Act A, 21?23, 302