A new technique for measuring the mechanical properties of thin films

10.1115/1.2899507

voigt, 1910, Lehrbuch der Krystallphsik

reuss, 1929, Zeitschrift fu&#x00A8 r angewandte Mathematik und Mechanik, 49, 10.1002/zamm.19290090104

smithells, 1976, Metals Reference Book, 978

holman, 1994, Experimental Methods for Engineers

10.1557/S0883769400041646

weihs, 1989, measuring the strength and stiffness of thin film materials by mechanically deflecting cantilever microbeams, Thin Films Stress and Mechanical Properties, 130, 87

10.1088/0960-1317/3/1/004

0, Standard Test Method for Young s Modulus Tangent Modulus and Chord Modulus

10.1016/0924-4247(90)87048-N

sharpe jr, 1993, crack tip opening displacement measurement techniques, Experimental Techniques in Fracture, 219

10.1520/STP11889S

10.1557/PROC-130-105

10.1557/JMR.1992.3242

sharpe jr, 1989, An interferometric strain/displacement measurement system