A new S-shaped MEMS PZT cantilever for energy harvesting from low frequency vibrations below 30 Hz

Huicong Liu1, Chengkuo Lee2, Takeshi Kobayashi3, Cho Jui Tay1, Chenggen Quan1
1Department of Mechanical Engineering, National University of Singapore, Singapore, Singapore
2Department of Electrical and Computer Engineering, National University of Singapore, Singapore, Singapore
3National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Japan

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