A multiwavelength low-pressure radiation source based on argon and xenon chlorides
Tóm tắt
The characteristics of an excimer radiation source pumped by a subnormal dc glow discharge in an Ar/Xe/Cl2 mixture with the source operating in a spectral range of 160–310 nm were studied. The emission intensities of the 175, 236, 258, and 308 nm bands due to the transitions ArCl (B-X), XeCl (D-X), Cl2 (D′-A′), and XeCl (B-X), respectively, were optimized in relation to the pressure, composition, and discharge current of the mixture.
Tài liệu tham khảo
A. P. Golovitskii and S. N. Kan, Opt. Spektrosk. 75, 604 (1993) [Opt. Spectrosc. 75, 357 (1993)].
A. P. Golovitskii and S. V. Lebedev, Opt. Spektrosk. 82, 251 (1997) [Opt. Spectrosc. 82, 227 (1997)].
A. K. Panchenko and V. F. Tarasenko, Opt. Spektrosk. 84, 389 (1998) [Opt. Spectrosc. 84, 337 (1998)].
A. K. Shuaibov, L. L. Shimon, A. I. Dashchenko, and I. V. Shevera, Zh. Tekh. Fiz. 71(2), 77 (2001) [Tech. Phys. 46, 207 (2001)].
A. K. Shuaibov, L. L. Dashchenko, and I. V. Shevera, Kvantovaya Élektron. (Moscow) 31, 371 (2001).
A. K. Shuaibov, L. L. Shimon, A. I. Dashchenko, and I. V. Shevera, Pis’ma Zh. Tekh. Fiz. 27(9), 8 (2001) [Tech. Phys. Lett. 27, 354 (2001)].
Yu. P. Raizer, Gas Discharge Physics (Nauka, Moscow, 1987; Springer-Verlag, Berlin, 1991).
V. V. Datsyuk, I. A. Izmailov, and V. A. Kochelap, Usp. Fiz. Nauk 168, 439 (1998) [Phys. Usp. 41, 379 (1998)].
V. V. Datsyuk and I. A. Izmailov, J. Phys. Stud. 4, 274 (2000).
M. Rokni, J. H. Jacob, J. A. Mangano, and B. Brochy, Appl. Phys. Lett. 31, 79 (1977).
A. K. Shuaibov and V. S. Shevera, Opt. Spektrosk. 47, 409 (1979) [Opt. Spectrosc. 47, 224 (1979)].