A layered structure surface acoustic wave for oxygen sensing
COMMAD 2000 Proceedings. Conference on Optoelectronic and Microelectronic Materials and Devices - Trang 202-205
Tóm tắt
A novel layered structure surface acoustic wave (layered SAW) transducer has been employed for an oxygen sensing application. It is a SiO/sub 2/(0.36 /spl mu/m)/ST-cut quartz crystal transducer. The dominant mode propagating in the transducer is a combination of Rayleigh and Love modes. Such a structure has the advantage of confining the acoustic wave energy to the top selective layer, which increases the sensitivity of the device. A TiO/sub 2/ thin film deposited by the sol-gel process has been used as the oxygen sensitive layer.
Từ khóa
#Surface acoustic waves #Acoustic waves #Oxygen #Acoustic sensors #Acoustic transducers #Delay lines #Substrates #Gas detectors #Boundary conditions #OscillatorsTài liệu tham khảo
atashbar, 1998, Surface Acoustic Wave Oxygen Sensor Based on Nanosized TiO2 Thin Film
jakoby, 1999, A Novel Moleculary Imprinted Thin Film Applied to a Love Wave Gas Sensor, Sensors and Actuators A, 76, 93, 10.1016/S0924-4247(98)00357-4
10.1109/ULTSYM.1988.49444
10.1016/S0041-624X(97)00146-7
10.1021/ac00070a002