A high sensitive Fabry-Perot shear stress sensor employing flexible membrane and double SU-8 structures
SENSORS, 2002 IEEE - Tập 2 - Trang 969-972 vol.2
Tóm tắt
This paper reports a novel shear stress sensor utilizing flexible membrane and double SU-8 resist structures as a Fabry-Perot interferometer. Through UV lithography on thick resist, the surface roughness of the reflection surface was better than 7 nm (Ra value trough 10*10 /spl mu/m/sup 2/ area), suitable for optical application. A single mode optical fiber was employed for detecting the displacement of the floating element representing the shear stress force on the flexible membrane. A test has been successfully carried out and demonstrated the possibility of detection of a 10 nm displacement, representing a minimum detectable wall shear stress of 0.065 Pa from simulation, comparable to its counterparts with resolutions from 0.1-1 Pa.
Từ khóa
#Stress #Biomembranes #Resists #Rough surfaces #Surface roughness #Fabry-Perot interferometers #Lithography #Optical reflection #Optical interferometry #Optical sensorsTài liệu tham khảo
jerman, 1991, Miniuature Fabry-Perot Interferometers Micromachined in Silicon for use in Optical Fiber WDM Systems, 372
10.1109/68.477286
10.1109/16.2527
liu, 1999, A Micromachined Flow Shear-Stress Sensor Based on Thermal Transfer Principles, IEEE/ASME J of Microelectromechanical Systems (J MEMS), 8, 90, 10.1109/84.749408
10.1109/84.157363
10.1177/002199839302701702
10.1016/S0924-4247(00)00494-5