A construction and circuitry realization of the combined pressure-temperature sensor based on the shear piezoresistive effect
Proceedings. 3rd Annual Siberian Russian Workshop on Electron Devices and Materials - Tập 1 - Trang 5 pp. - 2002
Tóm tắt
The construction and circuitry realization of the combined pressure-temperature sensor based on the shear piezoresistive effect (SPE) are developed and presented in this paper. The four-terminal silicon transducer (FTT) is used as main sensitive element. The construction of the sensor allows making the adequate measuring of the blood pressure, body temperature and pulse. The circuit of this sensor allows measuring these parameters with good accuracy. The digital output provides the comfort for patient and operator.
Từ khóa
#Temperature sensors #Piezoresistance #Silicon #Bridge circuits #Stress #Water heating #Pulse measurements #Sensor phenomena and characterization #Topology #Surface resistanceTài liệu tham khảo
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