A ZnO/SiO/sub 2//Si[100] Love mode transducer
COMMAD 2000 Proceedings. Conference on Optoelectronic and Microelectronic Materials and Devices - Trang 367-370
Tóm tắt
ZnO/SiO/sub 2//Si[100] Love mode transducers were fabricated. SiO/sub 2/ films were deposited using electron beam evaporation. ZnO films were deposited using r.f. magnetron sputtering. ZnO and SiO/sub 2/ films were examined by SEM and the performance of the transducers was examined by their acoustic response. The observation of the SAW Love mode delay line was performed under untuned conditions. Operating frequencies of the transducers were around 85 MHz.
Từ khóa
#Zinc oxide #Transducers #Sputtering #Substrates #Scanning electron microscopy #Piezoelectric films #Gold #Electron beams #Crystallization #TemperatureTài liệu tham khảo
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