Submicron enhancement-mode AlGaN/GaN HEMTs

J.S. Moon1, D. Wong1, T. Hussain1, M. Micovic1, P. Deelman1, Ming Hu1, M. Antcliffe1, C. Ngo1, P. Hashimoto1, L. McCray1
1HRL Laboratories LLC, Malibu, CA, USA

Tóm tắt

Most recent GaN-based HEMT technology has been focused toward microwave power applications. In this work, we report DC and RF characteristics of the first E-mode AlGaN/GaN HEMTs fabricated down to 0.2 /spl mu/m gatelength, and having an f/sub t/ reaching 25 GHz. Further improvement of E-mode GaN HEMTs could open potential applications for mixed-signal ICs with a high dynamic range.

Từ khóa

#Aluminum gallium nitride #Gallium nitride #HEMTs #MODFETs #Threshold voltage #Radio frequency #Schottky diodes #Moon #Laboratories #Microwave devices

Tài liệu tham khảo

moon, 2001, Recessed gate AIGaN/GaN power HEMTs, Proc Int Symp Compound Semiconductors kumar, 2001, High performance 0.15 µm recessed gate AIGaN/GaN HEMT on Sappahire, IEDM Technical Digest