Hongda Chen1, Luhong Mao1, Jun Tiang1, Kun Liang1, Rongxuan Shen1, Yun Du1, Yongzhen Huang1, Ronghan Wu1, Jun Feng2, Ximing Ke2, Huanyan Liu2, Zhigong Wang2
1State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy and Sciences, Beijing, China
2Institution of RF-& OE-ICs, South-East University, Nanjing, China
Tóm tắt
Summary form only given. We designed and fabricated the hybrid integrated CMOS-VCSEL multiple chip modules. The VCSEL operate at 850nm wavelength. A typical VCSEL has a threshold current of 4 mA, and quantum efficiency of 0.3 mW/mA. Operating at 8 mA modulation current, the VCSEL 3-dB modulation bandwidth was measured more than 5 GHz.