Dieter Pohl1, Winfried Denk1, M. Lanz1
1IBM Zurich Research Laboratory, 8803 Rüschlikon, Switzerland
Tóm tắt
Subwave length-resolution optical image recording is demonstrated by moving an extremely narrow aperture along a test object equipped with fine-line structures. Details of 25-nm size can be recognized using 488-nm radiation. The result indicates a resolving power of at least λ/20 which is to be compared with the values of λ/2.3 obtainable in conventional optical microscopy.
