Polymer issues in nanoimprinting technique

Solid-State Electronics - Tập 43 - Trang 1079-1083 - 1999
Frank Gottschalch1, Thomas Hoffmann1, Clivia M Sotomayor Torres1, Hubert Schulz2, Hella-Christin Scheer2
1Institute of Materials Science and Department of Electrical Engineering, University of Wuppertal, Gauss-Str. 20, 42097 Wuppertal, Germany
2Micropatterning in Electrical Engineering, University of Wuppertal, Gauss-Str. 20, 42097 Wuppertal, Germany

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