Role of oxygen vacancy defect states in the n-type conduction of β-Ga2O3

Journal of Applied Physics - Tập 86 Số 7 - Trang 3792-3796 - 1999
Z. Hajnal1, József Miró1, G. Kiss1, F. Réti1, Péter Deák1, R.C. Herndon1, J. Michael Kuperberg1
1Center for Hungarian-American Environmental Research, Studies and Exchanges, Department of Atomic Physics, Technical University of Budapest, Budafoki út 8, H-1111 Hungary

Tóm tắt

Based on semiempirical quantum-chemical calculations, the electronic band structure of β-Ga2O3 is presented and the formation and properties of oxygen vacancies are analyzed. The equilibrium geometries and formation energies of neutral and doubly ionized vacancies were calculated. Using the calculated donor level positions of the vacancies, the high temperature n-type conduction is explained. The vacancy concentration is obtained by fitting to the experimental resistivity and electron mobility.

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