Mems inertial power generators for biomedical applications
Tóm tắt
An inertial vibration scavenging micro-generator is described which is suitable for biomedical applications. MEMS fabrication techniques have been used to construct a variable capacitor having one moving plate on which a proof mass is attached. Energy is extracted when the plates separate at constant charge. This device is non-resonant, so can operate over a wide range of excitation frequencies and amplitudes. The energy extracted per cycle, 120 nJ, is well above previous reports. The fabrication techniques employed are described, and test data are given and compared to modeling results, showing good agreement.
Tài liệu tham khảo
Amirtharajah R, Chandrakasan AP (1998) Self-powered signal processing using vibration-based power generation. IEEE J Solid State Circuits 33:687–695
Andrews M, Harris I, Turner G (1993) A comparison of squeeze-film theory with measurements on a microstructure. Sens Actuators 36:79–87
von Buren T, Mitcheson PD, Green TC, Yeatman EM, Holmes AS, Troster G (2006) Optimization of inertial micropower generators for human walking motion. IEEE Sens J 6(1):28–38
Mitcheson PD, Green TC, Yeatman EM, Holmes AS (2004a) Architecture for vibration-driven micro-power generators. IEEE/ASME J Microelectromech Syst 13:429–440
Mitcheson PD, Miao P, Stark BH, Yeatman EM, Holmes AS, Green TC (2004b) MEMS electrostatic micro-power generator for low frequency operation. Sens Actuators 115:523–529
Roundy S, Wright PK, Rabaey JS (2004) Energy scavenging for wireless sensor networks. Kluwer, Boston
Stark BH, Mitcheson PD, Miao P, Green TC, Yeatman EM, Holmes AS (2004) Power processing issues for micro-power electrostatic generators. In: Proc. 35th Annual. IEEE power electronics specialist conference (PESC ‘04), pp 4156–4162