Miniaturized inductive sensors for industrial applications

SENSORS, 2002 IEEE - Tập 2 - Trang 771-778 vol.2
M. Jagiella1, S. Fericean1
1Balluff GmbH, Neuhausen, Germany

Tóm tắt

Measuring distances, position and travel using the inductive proximity sensors (IPS) based on contactless target-approach detection is a widely used technique. In comparison to optical and capacitive technologies the biggest advantage of inductive sensors in industrial applications is the immunity against oil, water and dirt. In addition, current developments and trends in the industrial fields, especially micro-system and micromechanical applications like robotics and manipulator applications, require small, and fully integrated displacement and position sensors. The new series of Balluff sensors featuring new techniques and technologies, with single sensor calibration, improved accuracy and linearity; in addition excellent temperature stability is "the state of the art" in inductive sensors with complete integrated electronics. The paper includes the latest theoretical considerations and practical realizations about the miniaturized analog and binary inductive sensors for industrial applications, which at the same time show excellent electrical, mechanical and EMC-parameters.

Từ khóa

#Temperature sensors #Optical sensors #Mechanical sensors #Position measurement #Capacitive sensors #Petroleum #Micromechanical devices #Service robots #Robot sensing systems #Manipulators

Tài liệu tham khảo

jagiella, 2000, Mit Abstand besser, Trends at Inductive Sensors, IEEE Automatisierung und Datentechnik Heft 4 2001, 140s 0, Technical Manual Maxwell-Simulator kurz, 1994, Oszillatoren andronov, 1987, Theory of Oszillators hödlmayr, 1990, TCA505: Näherungsschalter-IC mit Kurzschlußschutz, SIEMENS Components, 172 kamiya, 1987, Proximity Switch jagiella, 1990, Inductive Sensor System fericean, 1996, Inductive Sensor Responsive to the Distance to a Conductive or Magnetisable Object fericean, 2001, Moderne Wirbelstromsensoren — linear und tempera-turstabil, Elektronik, 98 fericean, 2000, Kalibrie-rung und Kompensation von Näherungsschaltern durch integriertes Teach-in-Verfahren, VDI Berichte Sensoren und Messsysteme 2000, 977 jagiella, 1992, LasermaticII, A new developed Capacitive clearance sensor system for high quality ND:YAG Cutting and welding of sheet metals, Lasers Eng jagiella, 1991, Measuring device and method for ist operational setting herold, 1993, Sensortechnik pallas-areny, 2001, Sensors and Signal Conditioning loos, 1992, Systemtechnik induktiver Wegund Kraft-aufnehmer asch, 1991, Les Capteurs en Instrumentation Industrielle jagiella, 1992, Capacitive Clearance Sensor System Laser Treatment of materials 0, Sensors Worldwide Catalog tränkler, 1998, (Hrsg ) Sensor-technik fericean, 1995, Proximity Switch Operating in a non-contacting Manner jagiella, 2002, Bisher unerreichte Präzision bei induktiven Abstands-sensoren, 2nd Band 8 Stutensee Fachpressetage jagiella, 2002, Induktive, analoge Miniatursensoren, Elektrotechnik, 7,3/ jagiella, 2002, Balluff GmbH, Flip-Chip Technology, Presentation at Microsystem technologie for automation lau, 1996, Flip Chip Technologies 0, Low-voltage switchgear and control-gear, Part 5: Control circuit devices and switching elements, Section 2: Proximity switches, IEC 947-5-2