Thin film characterization using a mechanical properties microprobe

Thin Solid Films - Tập 153 - Trang 185-196 - 1987
W.C. Oliver1, C.J. McHargue1, S.J. Zinkle1
1Metals and Ceramics Division, Oak Ridge National Laboratory, Oak Ridge, TN 37831, U.S.A.

Tài liệu tham khảo

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