The linear piezoresistance effect in p-Ge/sub x/Si/sub 1-x/ alloys

V.P. Dragunov1, A.A. Shishkov1
1Novosibirsk State Technical University, Novosibirsk, Russia

Tóm tắt

Based un three-band spectrum model taking into account main scattering mechanisms the concentration dependencies of linear piezoresistance coefficients in p-Ge/sub x/Si/sub 1-x/ alloys were calculated. It is shown that the piezoresistance dependence upon the alloy composition X has a non-monotonous character.

Từ khóa

#Piezoresistance #Silicon alloys #Impurities #Temperature dependence #Optical scattering #Capacitive sensors #Germanium alloys #Acoustic scattering #Fluctuations #Stress

Tài liệu tham khảo

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