1.3 micron InGaAsN oxide-confined VCSELs grown by MOCVD

LEOS Summer Topical Meeting - Trang TuH3-TuH3
C.S. Murray1, F.D. Newman1, Shangzhu Sun2, J.B. Clevenger1, D.J. Bossert1, C.X. Wang1, H.Q. Hou1, R. Stall2
1EMCORE Optical Devices, USA
2EMCORE Corporation, USA

Tóm tắt

Summary form only given. An Emcore D 180 metalorganic chemical vapor deposition (MOCVD) system was used to develop 1.3 micron InGaAsN/GaAs vertical cavity surface emitting lasers (VCSELs). The InGaAsN VCSELs are dry etched to form a 42 micron mesa that is subsequently wet oxidized to form apertures ranging from 6.0 to 8.5 microns. The quasi-single mode laser was modulated with a pseudorandom bit sequence at 2.5 Gbit/sec at room temperature.

Từ khóa

#Vertical cavity surface emitting lasers #MOCVD #Chemical lasers #Laser modes #Surface emitting lasers #Chemical vapor deposition #Gallium arsenide #Dry etching #Wet etching #Apertures