Wear resistance investigation of titanium nitride-based coatings
Tóm tắt
Từ khóa
Tài liệu tham khảo
Veprek, 1999, The search for novel, superhard materials, J. Vac. Sci. Technol. A, 17, 2401, 10.1116/1.581977
Ceschini, 1999, Frictional behaviour and wear resistance of TiN-based PVD coatings dry sliding against a TiN coated tool steel, Metall. Ital., 91, 45
Huang, 1994, Friction behaviour of TiN, CrN, (TiAl)N coatings, Wear, 173, 13, 10.1016/0043-1648(94)90252-6
Rodriguez, 2002, Tribological behaviour of hard coatings deposited by arc-evaporation PVD, Vacuum, 67, 559, 10.1016/S0042-207X(02)00248-8
Tanno, 2009, Effect of counter materials on coefficients of friction of TiN coatings with preferred grain orientations, Wear, 266, 1178, 10.1016/j.wear.2009.03.020
Jianxin, 2013, Dry sliding wear behavior of PVD TiN, Ti55Al45N, and Ti35Al65N coatings at temperatures up to 600°C, Int. J. Refract. Met. Hard Mater., 41, 241, 10.1016/j.ijrmhm.2013.04.008
Jianxin, 2012, Erosion wear of CrN, TiN, CrAlN, and TiAlN PVD nitride coatings, Int. J. Refract. Met. Hard Mater., 35, 10, 10.1016/j.ijrmhm.2012.03.002
Pelleg, 1991, Reactive-sputter-deposited TiN films on glass substrates, Thin Solid Films, 197, 117, 10.1016/0040-6090(91)90225-M
Takeyama, 2000, Diffusion barrier properties of ZrN films in the Cu/Si contact systems, J. Vac. Sci. Technol. B, 18, 1333, 10.1116/1.591382
Milošev, 1997, Comparison of TiN, ZrN and CrN hard nitride coatings: electrochemical and thermal oxidation, Thin Solid Films, 303, 246, 10.1016/S0040-6090(97)00069-2
Liu, 2001, Corrosion resistance of multi-layered plasma-assisted physical vapour deposition TiN and CrN coatings, Surf. Coat. Technol., 141, 164, 10.1016/S0257-8972(01)01267-1
Zhitomirsky, 1998, Structure and mechanical properties of vacuum arc-deposited NbN coatings, Thin Solid Films, 326, 134, 10.1016/S0040-6090(98)00544-6
Fateh, 2007, Influence of high-temperature oxide formation on the tribological behaviour of TiN and VN coatings, Wear, 262, 1152, 10.1016/j.wear.2006.11.006
Ichimura, 1993, High-temperature oxidation of ion-plated TiN and TiAlN films, J. Mater. Res., 8, 1093, 10.1557/JMR.1993.1093
Hsieh, 1998, Deposition and characterization of TiAlN and multi-layered TiN/TiAlN coatings using unbalanced magnetron sputtering, Surf. Coat. Technol., 108–109, 132, 10.1016/S0257-8972(98)00684-7
M. Arndt, H. Westphal, Influence of residual stresses and nanostructure on the properties and applications of PVD coatings, in: Proceedings of the 7th International Conference of Coatings in Manufacturing Processes, vols. 1–3 (2008) pp. 151–155.
Bull, 2003, Properties and performance of commercial TiCN coatings. Part 1: coating architecture and hardness modeling, Surf. Coat. Technol., 163–164, 499, 10.1016/S0257-8972(02)00650-3
Jehn, 1999, Homogeneity of multi-component PVD hard coatings deposited by multi-source arrangements, Surf. Coat. Technol., 112, 103, 10.1016/S0257-8972(98)00774-9
Liang, 2011, Fabrication and performance of TiN/TiAlN nanometer modulated coatings, Thin Solid Films, 520, 813, 10.1016/j.tsf.2011.04.159
Zalnezhad, 2013, Surface hardness prediction of CrN thin film coating on AL7075-T6 alloy using fuzzy logic system, Int. J. Precis. Eng. Manuf., 14, 467, 10.1007/s12541-013-0063-5
Zalnezhad, 2014, Multilayer thin film CrN coating on aerospace AL7075-T6 alloy for surface integrity enhancement, Int. J. Adv. Manuf. Technol., 72, 1491, 10.1007/s00170-014-5757-z
Cecchini, 2011, Mechanical, microstructural and oxidation properties of reactively sputtered thin Cr–N coatings on steel, Thin Solid Films, 519, 6515, 10.1016/j.tsf.2011.04.115
Zalnezhad, 2013, Fretting fatigue life evaluation of multilayer Cr–CrN-coated Al7075-T6 with higher adhesion strength—fuzzy logic approach, Int. J. Adv. Manuf. Technol., 69, 1153, 10.1007/s00170-013-5093-8
Bars, 1977, Etude cinétique, diffusionnelle et morphologique de la nitruration du titane par l’azote à haute temperature, J. Less Common Met., 52, 51, 10.1016/0022-5088(77)90234-X
PalDey, 2003, Single layer and multilayer wear resistant coatings of (Ti,Al)N: a review, Mater. Sci. Eng. A, 342, 58, 10.1016/S0921-5093(02)00259-9
Souto, 2000, Electrochemical characteristics of steel coated with TiN and TiAlN coatings, Corros. Sci., 42, 2201, 10.1016/S0010-938X(00)00057-3
Liu, 2004, Surface modification of titanium, titanium alloys, and related materials for biomedical applications, Mater. Sci. Eng. R, 47, 49, 10.1016/j.mser.2004.11.001
Wolfe, 1999, Microstructural evolution of titanium nitride (TiN) coatings produced by reactive ion beam-assisted, electron beam physical vapor deposition (RIBA, EB-PVD), J. Mater. Sci., 34, 2997, 10.1023/A:1004668325924
Starosvetsky, 2001, Corrosion behavior of titanium nitride coated Ni–Ti shape memory surgical alloy, Biomaterials, 22, 1853, 10.1016/S0142-9612(00)00368-9
Kao, 2002, The anticorrosion ability of titanium nitride (TiN) plating on an orthodontic metal bracket and its biocompatibility, J. Biomed. Mater. Res., 63, 786, 10.1002/jbm.10484
Roşu, 2012, Deposition of titanium nitride and hydroxyapatite-based biocompatible composite by reactive plasma spraying, Appl. Surf. Sci., 258, 3871, 10.1016/j.apsusc.2011.12.049
Chung, 2004, Biocompatibility of a titanium–aluminum nitride film coating on a dental alloy, Surf. Coat. Technol., 188–189, 745, 10.1016/j.surfcoat.2004.07.050
Şerban, 2013, Deposition of titanium nitride layers by electric arc – reactive plasma spraying method, Appl. Surf. Sci., 265, 245, 10.1016/j.apsusc.2012.10.187
Shtansky, 2005, Design, characterization and testing of Ti-based multicomponent coatings for load-bearing medical applications, Biomaterials, 26, 2909, 10.1016/j.biomaterials.2004.09.010
Hoseini, 2008, Tribological investigation of coatings for artificial joints, Wear, 264, 958, 10.1016/j.wear.2007.07.003
Sedira, 2014, Physical deposition of carbon doped titanium nitride film by DC magnetron sputtering for metallic implant coating use, Appl. Surf. Sci., 295, 81, 10.1016/j.apsusc.2014.01.010
Bay, 2008, Lubricant test methods for sheet metal forming, Tribol. Int., 41, 844, 10.1016/j.triboint.2007.11.017
Kataoka, 2004, Tribology of dry deep-drawing of various metal sheets with use of ceramics tools, Surf. Coat. Technol., 177–178, 582, 10.1016/S0257-8972(03)00930-7
Podgornik, 2011, Application of hard coatings for blanking and piercing tools, Wear, 270, 850, 10.1016/j.wear.2011.02.013
Aizawa, 2007, Development of nano-columnar carbon coating for dry micro-stamping, Surf. Coat. Technol., 202, 1177, 10.1016/j.surfcoat.2007.05.059
Kuram, 2013, Environmentally friendly machining: vegetable based cutting fluids, 23, 10.1007/978-3-642-33792-5_2
G.T. Taylor, V.C.M. Freestone, Experience of biodegradation for the disposal of waste machine tool cutting fluid, in: Proceedings of the Waste Management 2001 Conference, Tucson.
Adler, 2006, Examining the role of cutting fluids in machining and efforts to address associated environmental/health concerns, Mach. Sci. Technol., 10, 23, 10.1080/10910340500534282
Sreejith, 2000, Dry machining: machining of the future, J. Mater. Process. Technol., 101, 287, 10.1016/S0924-0136(00)00445-3
Schulz, 1992, High-speed machining, CIRP – Ann. Manuf. Technol., 41, 637, 10.1016/S0007-8506(07)63250-8
Dudzinski, 2004, A review of developments towards dry and high speed machining of Inconel 718 alloy, Int. J. Mach. Tool Manuf., 44, 439, 10.1016/S0890-6955(03)00159-7
Liu, 2012, Sustainable high speed dry cutting of magnesium alloys, Mater. Sci. Forum, 723, 3, 10.4028/www.scientific.net/MSF.724.3
Abukhshi, 2006, Heat generation and temperature prediction in metal cutting: a review and implications for high speed machining, Int. J. Mach. Tool Manuf., 46, 782, 10.1016/j.ijmachtools.2005.07.024
Agapiou, 2013, Cutting tool wear and failure mechanisms, 661
Trent, 2000
Zhu, 2014, Cutting temperature, tool wear, and tool life in heat-pipe-assisted end-milling operations, Int. J. Adv. Manuf. Technol., 72, 995, 10.1007/s00170-014-5699-5
Bunshah, 2001
Ananthapadmanabhan, 1999, Titanium carbide–iron composite coatings by reactive plasma spraying of ilmenite, J. Alloy. Compd., 287, 121, 10.1016/S0925-8388(99)00061-4
Braüer, 2010, Magnetron sputtering – milestones of 30 years, Vacuum, 84, 1354, 10.1016/j.vacuum.2009.12.014
Kelly, 2000, Magnetron sputtering: a review of recent developments and applications, Vacuum, 56, 159, 10.1016/S0042-207X(99)00189-X
Randhawa, 1988, Cathodic arc plasma deposition technology, Thin Solid Films, 167, 175, 10.1016/0040-6090(88)90494-4
Sanders, 2000, Review of cathodic arc deposition technology at the start of the new millennium, Surf. Coat. Technol., 133–134, 78, 10.1016/S0257-8972(00)00879-3
Zhang, 2011, Thermal barrier coatings prepared by electron beam physical vapor deposition (EB-PVD), 3
Mazurkiewicz, 2014, Innovative technical solutions for evaporation of multilayer coatings by EB-PVD method, Arch. Civ. Mech. Eng., 14, 250, 10.1016/j.acme.2013.09.008
Krebs, 2003, Pulsed Laser deposition (PLD) – a versatile thin film technique, Adv. Solid State Phys., 43, 505, 10.1007/978-3-540-44838-9_36
Eason, 2007
Zhang, 2007, Influence of Si content and growth condition on the microstructure and mechanical properties of Ti–Si–N nanocomposite films, Surf. Coat. Technol., 201, 6819, 10.1016/j.surfcoat.2006.09.119
Smidt, 1990, Use of ion beam assisted deposition to modify the microstructure and properties of thin films, Int. Mater. Rev., 35, 61, 10.1179/095066090790323975
Holmberg, 1994
Alfonso, 2012, Thin film growth through sputtering technique and its applications, 397
Sarakinos, 2010, High power pulsed magnetron sputtering: a review on scientific and engineering state of the art, Surf. Coat. Technol., 204, 1661, 10.1016/j.surfcoat.2009.11.013
Sánchez-López, 2012, Phase composition and tribomechanical properties of Ti–B–C nanocomposite coatings prepared by magnetron sputtering, J. Phys. D: Appl. Phys., 45, 375401, 10.1088/0022-3727/45/37/375401
Zhao, 2006, AlxTi1−xN hard coatings synthesized by reactive sputtering using mosaic target, J. Mater. Process. Technol., 176, 179, 10.1016/j.jmatprotec.2006.03.129
Barshilia, 2006, Deposition and characterization of TiAlN/Si3N4 superhard nanocomposite coatings prepared by reactive direct current unbalanced magnetron sputtering, Vacuum, 81, 479, 10.1016/j.vacuum.2006.07.003
Yue, 2009, Microstructure and mechanical properties of TiAlN/Si3N4 nano-multilayers synthesized by reactive magnetron sputtering, J. Alloy. Compd., 481, 710, 10.1016/j.jallcom.2009.03.103
Iosad, 2001, Reactive magnetron sputter-deposition of NbN and (Nb,Ti)N films related to sputtering source characterization and optimization, J. Vac. Sci. Technol. A, 19, 1840, 10.1116/1.1349189
Oliveira, 2008, Hard amorphous Ti–Al–N coatings deposited by sputtering, Thin Solid Films, 516, 5032, 10.1016/j.tsf.2008.02.006
Zalnezhad, 2013, Investigating the fretting fatigue life of thin film titanium nitride coated aerospace Al7075-T6 alloy, Mater. Sci. Eng. A, 559, 436, 10.1016/j.msea.2012.08.123
Zalnezhad, 2012, Prediction of TiN coating adhesion strength on aerospace AL7075-T6 alloy using fuzzy rule based system, Int. J. Precis. Eng. Manuf., 13, 1453, 10.1007/s12541-012-0191-3
Fabrizi, 2009, Oxidation behaviour and thermal stability of nanocomposited Ti–Al–Si–B–N and Ti–Cr–B–N coatings, Mater. Sci. Forum, 604–605, 19
Zalnezhad, 2013, Optimizing the PVD TiN thin film coating׳s parameters on aerospace AL7075-T6 alloy for higher coating hardness and adhesion with better tribological properties of the coating surface, Int. J. Adv. Manuf. Technol., 64, 281, 10.1007/s00170-012-4022-6
Zalnezhad, 2014, A fuzzy logic predictive model for better surface roughness of Ti–TiN coating on AL7075-T6 alloy for longer fretting fatigue life, Measurement, 49, 256, 10.1016/j.measurement.2013.11.042
Ezazi, 2014, Enhancing the tribo-mechanical properties of aerospace AL7075-T6 by magnetron-sputtered Ti/TiN, Cr/CrN & TiCr/TiCrN thin film ceramic coatings, Ceram. Int., 40, 15603, 10.1016/j.ceramint.2014.07.067
Cabibbo, 2011, Oxidation behaviour of nanostructured Ti-B-N based coatings, Metall. Ital., 6, 17
Zalnezhad, 2013, A fuzzy logic based model to predict surface hardness of thin film TiN coating on aerospace AL7075-T6 alloy, Int. J. Adv. Manuf. Technol., 68, 415, 10.1007/s00170-013-4738-y
Friesen, 1991, Ultrahard coatings from Ti-BN multilayers and by co-sputtering, Surf. Coat. Technol., 48, 169, 10.1016/0257-8972(91)90141-I
García-González, 2007, A study of TiaAlN coatings prepared by RF co-sputtering, Braz. J. Chem. Eng., 24, 249, 10.1590/S0104-66322007000200009
Miyamura, 2007, Ti–Al–Si–N films for superhard coatings deposited by reactive cosputtering using Ti, Al, and Si targets, J. Vac. Sci. Technol. A, 25, 1103, 10.1116/1.2721577
Saha, 2014, Effect of sputtering power on friction coefficient and surface energy of co-sputtered titanium and molybdenum disulfide coatings and its performance in micro hot-embossing, Microsyst. Technol., 20, 1069, 10.1007/s00542-013-1783-2
Wei, 2006, Deposition of thick nitrides and carbonitrides for sand erosion protection, Surf. Coat. Technol., 201, 4453, 10.1016/j.surfcoat.2006.08.091
Matossian, 1998, Plasma-enhanced, magnetron-sputtered deposition (PMD) of materials, Surf. Coat. Technol., 108–109, 496, 10.1016/S0257-8972(98)00632-X
Fortuna, 2000, Microstructural features of wear-resistant titanium nitride coatings deposited by different methods, Thin Solid Films, 377–378, 512, 10.1016/S0040-6090(00)01438-3
Wei, 2002, Aspects of plasma-enhanced magnetron-sputtered deposition of hard coatings on cutting tools, Surf. Coat. Technol., 158–159, 465, 10.1016/S0257-8972(02)00289-X
Wei, 2008, Plasma enhanced magnetron sputter deposition of Ti–Si–C–N based nanocomposite coatings, Surf. Coat. Technol., 203, 538, 10.1016/j.surfcoat.2008.05.019
Anders, 2002, Energetic deposition using filtered cathodic arc plasmas, Vacuum, 67, 673, 10.1016/S0042-207X(02)00260-9
Zhang, 2012, Influence of pulsed substrate bias on the structure and properties of Ti–Al–N films deposited by cathodic vacuum arc, Appl. Surf. Sci., 258, 7274, 10.1016/j.apsusc.2012.03.100
Vlasveld, 2002, Characterisation and performance of partially filtered arc TiAlN coatings, Surf. Coat. Technol., 149, 217, 10.1016/S0257-8972(01)01448-7
Zhao, 2010, TiN/TiC multilayer films deposited by pulse biased arc ion plating, Vacuum, 85, 1, 10.1016/j.vacuum.2009.04.043
Tanaka, 2001, Structure and properties of Al–Ti–Si–N coatings prepared by the cathodic arc ion plating method for high speed cutting applications, Surf. Coat. Technol., 146–147, 215, 10.1016/S0257-8972(01)01391-3
Neidhardt, 2010, Wear-resistant Ti–B–N nanocomposite coatings synthesized by reactive cathodic arc evaporation, Int. J. Refract. Met. Hard Mater., 28, 23, 10.1016/j.ijrmhm.2009.07.016
Dobrzanski, 2010, Structure and properties PVD and CVD coatings deposited onto edges of sintered cutting tools, Arch. Metall. Mater., 55, 187
Liu, 2003, Tribological and electrochemical performance of PVD TiN coatings on the femoral head of Ti–6Al–4V artificial hip joints, Surf. Coat. Technol., 163–164, 597, 10.1016/S0257-8972(02)00630-8
C. Leyens, U. Schulz, B.A. Pint, I.G. Wright, Influence of EB-PVD TBC microstructure on thermal barrier coating system performance under cyclic oxidation and hot corrosion conditions, in: Proceedings of the International Conference on Metallurgical Coatings and Thin Films, 1999.
Haynes, 2001, Characterization of commercial EB-PVD TBC systems with CVD (Ni,Pt)Al bond coatings, Surf. Coat. Technol., 146–147, 140, 10.1016/S0257-8972(01)01483-9
Fähler, 1996, Calculations and experiments of material removal and kinetic energy during pulsed laser ablation of metals, Appl. Surf. Sci., 96–98, 61, 10.1016/0169-4332(95)00466-1
Craciun, 2012, Very hard TiN thin films grown by pulsed laser deposition, Appl. Surf. Sci., 260, 2, 10.1016/j.apsusc.2011.11.128
Krishnan, 2009, Synthesis of nanostructured titanium nitride films by PLD through reactive processing, Surf. Eng., 25, 218, 10.1179/174329407X265866
Major, 2004, Pulsed laser deposition of advanced titanium nitride thin layers, Surf. Coat. Technol., 180–181, 580, 10.1016/j.surfcoat.2003.10.154
Craciun, 1999, Growth of thin transparent titanium nitride layers by reactive laser ablation, Appl. Surf. Sci., 138–139, 593, 10.1016/S0169-4332(98)00458-9
Kim, 2009, Structure and mechanical properties of titanium nitride thin films grown by reactive pulsed laser deposition, J. Ceram. Process. Res., 10, 49
Giardini, 2002, Titanium nitride thin films deposited by reactive pulsed-laser ablation in RF plasma, Surf. Coat. Technol., 151–152, 316, 10.1016/S0257-8972(01)01563-8
Krishnan, 2013, Reactive pulsed laser deposition of titanium nitride thin films: effect of reactive gas pressure on the structure, composition, and properties, J. Mater., 10.1155/2013/128986
Ensinger, 1993, A comparison of IBAD films for wear and corrosion protection with other PVD coatings, Nucl. Instrum. Methods Phys. B, 80–81, 445, 10.1016/0168-583X(93)96158-9
Hirvonen, 1991, Ion beam assisted thin film deposition, Mater. Sci. Rep., 6, 215, 10.1016/0920-2307(91)90008-B
Nakagawa, 1993, Titanium nitride film formation by the dynamic ion beam mixing method, Nucl. Instrum. Methods Phys. B, 80–81, 1402, 10.1016/0168-583X(93)90808-J
Celis, 1996, A systems approach to the tribological testing of coated materials, Surf. Coat. Technol., 74–75, 15
Zeitler, 1998, In-situ stress-analysis of boron-nitride films prepared by ion-beam-assisted deposition, Nucl. Instrum. Methods Phys. B, 139, 327, 10.1016/S0168-583X(98)00045-7
Škorić, 2004, Microstructural studies of TiN coatings prepared by PVD and IBAD, Surf. Sci., 566–568, 40, 10.1016/j.susc.2004.06.060
Han, 1995, Development and characterization of TiN coatings by ion beam assisted deposition process for improved wear resistance, Surf. Coat. Technol., 76–77, 437, 10.1016/0257-8972(95)02635-5
Li, 1991, Characterization of TiN coatings prepared by ion-beam-enhanced deposition, Mater. Sci. Eng. A, 139, 225, 10.1016/0921-5093(91)90621-S
Thobor, 2003, Ion bombardment: a means to improve the properties of TiN/AlN multilayered coatings, Surf. Coat. Technol., 174–175, 1264, 10.1016/S0257-8972(03)00358-X
Vera, 1999, Optimisation of TiN-IBAD coatings for wear reduction and corrosion protection, Nucl. Instrum. Methods Phys. B, 148, 917, 10.1016/S0168-583X(98)00869-6
Budzynski, 2008, Properties and phase transition of (Ti,Al)N thin films prepared by ion beam-assisted deposition, Intermetallics, 16, 987, 10.1016/j.intermet.2008.04.017
Aouadi, 2002, Characterization of TiBN films grown by ion beam assisted deposition, Surf. Coat. Technol., 160, 145, 10.1016/S0257-8972(02)00330-4
Wang, 2007, Ion irradiation effects in nanocrystalline TiN coatings, Nucl. Instrum. Methods Phys. B, 261, 1162, 10.1016/j.nimb.2007.04.248
Abadias, 2006, Interdependence between stress, preferred orientation, and surface morphology of nanocrystalline TiN thin films deposited by dual ion beam sputtering, J. Appl. Phys., 99, 113519, 10.1063/1.2197287
Pierson, 1992
Jensen, 1991, Thermal chemical vapor deposition, 283
Hersee, 1982, Low-pressure chemical vapor deposition, Annu. Rev. Mater. Sci., 12, 65, 10.1146/annurev.ms.12.080182.000433
Bachmann, 1998, Plasma-assisted chemical vapor deposition processes, MRS Bull., 13, 52, 10.1557/S0883769400063703
Mitsuharu, 1992
Mitsuharu, 2005
Nable, 2006, Atmospheric pressure chemical vapor deposition of titanium nitride on metal, Surf. Coat. Technol., 200, 2821, 10.1016/j.surfcoat.2005.02.171
Kuo, 2001, Kinetics and microstructure of TiN coatings by CVD, Surf. Coat. Technol., 135, 150, 10.1016/S0257-8972(00)00986-5
Kuo, 2001, A new class of Ti–Si–C–N coatings obtained by chemical vapor deposition, Part 1: 1000°C process, Thin Solid Films, 394, 72
Kuo, 2001, A new class of Ti–Si–C–N coatings obtained by chemical vapor deposition, Part II: low-temperature process, Thin Solid Films, 394, 81
Kuo, 2002, A new class of Ti–Si–C–N coatings obtained by chemical vapor deposition, Part III: 650–800°C process, Thin Solid Films, 419, 11, 10.1016/S0040-6090(02)00333-4
Wagner, 2008, The effect of deposition temperature on microstructure and properties of thermal CVD TiN coatings, Int. J. Refract. Met. Hard Mater., 26, 120, 10.1016/j.ijrmhm.2007.01.010
Wagner, 2008, Deposition of Ti–Al–N coatings by thermal CVD, Int. J. Refract. Met. Hard Mater., 26, 563, 10.1016/j.ijrmhm.2008.01.003
Hegde, 1991, Thin film properties of LPCVD TiN barrier for silicon device technology, MRS Proc., 250, 199, 10.1557/PROC-250-199
G.S. Sandhu, T.W. Buley, Low-Pressure Chemical Vapor Deposition Process for Depositing High-density, Highly-Conformal, Titanium Nitride Films of Low Bulk Resistivity, US Patent 5246881 A, 1993.
A. Bouteville, L. Imhoff, J.C. Remy, Rapid thermal low pressure chemical vapor deposition of TiN layers from the TiCl4–NH3–H2 gaseous phase, in: Proceedings of the Materials for Advanced Metallization, 1997.
Gordon, 1992, Low-temperature atmospheric pressure chemical vapor deposition of polycrystalline tin nitride thin films, Chem. Mater., 4, 68, 10.1021/cm00019a016
Intemann, 1993, Film properties of CVD titanium nitride deposited with organometallic precursors at low pressure using inert gases, ammonia, or remote activation, J. Electrochem. Soc., 140, 3215, 10.1149/1.2221013
Endler, 2010, Aluminum-rich TiAlCN coatings by low pressure CVD, Surf. Coat. Technol., 205, 1307, 10.1016/j.surfcoat.2010.09.002
Randhawa, 1991, Review of plasma-assisted deposition processes, Thin Solid Films, 196, 329, 10.1016/0040-6090(91)90377-A
Raoufi, 2011, Correlation between the surface characteristics and the duty cycle for the PACVD-derived TiN nanostructured films, Surf. Coat. Technol., 205, 4980, 10.1016/j.surfcoat.2011.04.091
Lundin, 2013, High power pulsed plasma enhanced chemical vapor deposition: a brief overview of general concepts and early results, Phys. Procedia, 46, 3, 10.1016/j.phpro.2013.07.039
Veprek, 1985, Plasma-induced and plasma-assisted chemical vapor deposition, Thin Solid Films, 130, 135, 10.1016/0040-6090(85)90303-7
Pedersen, 2012, A novel high-power pulse PECVD method, Surf. Coat. Technol., 206, 4562, 10.1016/j.surfcoat.2012.05.007
Alexandrov, 2009, Plasma enhanced chemical vapor deposition processes, 494
Profijt, 2011, Plasma-assisted atomic layer deposition: basics, opportunities and challenges, J. Vac. Sci. A, 29, 0508011, 10.1116/1.3609974
Kyrylov, 2002, Correlation between plasma conditions and properties of (Ti,Al)N coatings deposited by PECVD, Surf. Coat. Technol., 151–152, 359, 10.1016/S0257-8972(01)01653-X
Son, 2002, Properties of TiBN coating on the tool steels by PECVD and its applications, J. Mater. Process. Technol., 130–131, 266, 10.1016/S0924-0136(02)00748-3
Park, 2002, Coating materials of TiN, Ti–Al–N, and Ti–Si–N by plasma-enhanced chemical vapor deposition for mechanical applications, J. Mater. Process. Technol., 130–131, 254, 10.1016/S0924-0136(02)00807-5
Shin, 2012, Microstructure evolution and mechanical properties of Ti–B–N coatings deposited by plasma-enhanced chemical vapor deposition, Trans. Nonferr. Met. Soc., 22, s722, 10.1016/S1003-6326(12)61794-4
Mitterer, 2003, Industrial applications of PACVD hard coatings, Surf. Coat. Technol., 163–164, 716, 10.1016/S0257-8972(02)00685-0
Rie, 1995, Synthesis of TiN/TiCN/TiC layer systems on steel and cermet substrates by PACVD, Surf. Coat. Technol., 74–75, 375, 10.1016/0257-8972(95)08243-3
Hedenqvist, 1990, How TiN coatings improve the performance of high speed tools, Surf. Coat. Technol., 41, 243, 10.1016/0257-8972(90)90172-9
Eckel, 1999, Investigation of TiN deposition in different sized PACVD reactors by means of optical emission spectroscopy, Surf. Coat. Technol., 116–119, 1037, 10.1016/S0257-8972(99)00091-2
Heim, 1999, Hard coatings produced by PACVD applied to aluminium die casting, Surf. Coat. Technol., 116–119, 530, 10.1016/S0257-8972(99)00104-8
Stoiber, 2003, Low-friction TiN coatings deposited by PACVD, Surf. Coat. Technol., 163–164, 451, 10.1016/S0257-8972(02)00642-4
Stoiber, 2004, PACVD TiN/Ti–B–N multilayers: from micro- to nano-scale, Surf. Coat. Technol., 177–178, 348, 10.1016/j.surfcoat.2003.09.025
Lee, 2003, Nanoscale multilayer TiN/BN films deposited by plasma enhanced chemical vapor deposition, Surf. Coat. Technol., 174–175, 758, 10.1016/S0257-8972(03)00571-1
Park, 2003, Improvement of the biocompatibility and mechanical properties of surgical tools with TiN coating by PACVD, Thin Solid Films, 435, 102, 10.1016/S0040-6090(03)00412-7
Kim, 1999, Properties of TiN–TiC multilayer coatings using plasma-assisted chemical vapor deposition, Surf. Coat. Technol., 116–119, 906, 10.1016/S0257-8972(99)00149-8
Lugsheider, 2006, High kinetic process developments in thermal spray technology, J. Therm. Spray Technol., 15, 155, 10.1361/105996306X108246
American Welding Society Committee, 1985
Pawlowski, 2008
Davis, 2004
Matejka, 1989
Liang, 1996, In-situ carburized coating produced by reactive plasma spraying of low carbon steel using methane, Mater. Sci. Eng. A, 212, 51, 10.1016/0921-5093(96)10174-X
Wang, 2012, Electrical and mechanical properties of nano-structured TiN coatings deposited by vacuum cold spray, Vacuum, 86, 953, 10.1016/j.vacuum.2011.06.026
Ma, 2013, Reactive HVOF sprayed TiN-matrix composite coating and its corrosion and wear resistance properties, Trans. Nonferr. Met. Soc. China, 23, 1011, 10.1016/S1003-6326(13)62560-1
Mao, 2009, Properties of TiN-matrix coating deposited by reactive HVOF spraying, J. Coat. Technol. Res., 6, 243, 10.1007/s11998-008-9105-9
Kobayashi, 1990, New applied technology of plasma heat source, Weld. Int., 4, 276, 10.1080/09507119009447723
Valente, 2000, Corrosion resistance properties of reactive plasma-sprayed titanium composite coatings, Surf. Coat. Technol., 127, 86, 10.1016/S0257-8972(00)00549-1
Yanchun, 2008, Studies on nanocrystalline TiN coatings prepared by reactive plasma spraying, J. Nanomater., 10.1155/2008/690951
Smith, 1992, Reactive plasma spraying of wear-resistant coatings, J. Therm. Spray Technol., 1, 57, 10.1007/BF02657018
Mao, 2009, The effect of powder preparation method on the corrosion and mechanical properties of TiN-based coatings by reactive plasma spraying, Appl. Surf. Sci., 255, 3784, 10.1016/j.apsusc.2008.10.047
Zou, 2008, Characterization of nanostructured TiN coatings fabricated by reactive plasma spraying, Surf. Coat. Technol., 202, 1928, 10.1016/j.surfcoat.2007.08.022
Feng, 2005, Microhardness and toughness of the TiN coating prepared by reactive plasma spraying, Appl. Surf. Sci., 243, 204, 10.1016/j.apsusc.2004.09.064
Borgioli, 2006, Sliding wear resistance of reactive plasma sprayed Ti–TiN coatings, Wear, 260, 832, 10.1016/j.wear.2005.04.004
Zou, 2007, Reactive Plasma sprayed TiN coating and its thermal stability, J. Iron Steel Res. Int., 14, 71, 10.1016/S1006-706X(07)60078-8
Tahara, 2009, Study of titanium nitride deposition by supersonic plasma spraying, Vacuum, 83, 98, 10.1016/j.vacuum.2008.03.088
Zhang, 2000, Tribological behavior of TiN and CrN coatings sliding against an epoxy molding compound, Surf. Coat. Technol., 130, 240, 10.1016/S0257-8972(00)00709-X
Wuhrer, 1996, Study on d.c. magnetron sputter deposition of titanium aluminium nitride thin films: effect of aluminium content on coating, Thin Solid Films, 290–291, 339, 10.1016/S0040-6090(96)09057-8
Wahlström, 1993, Crystal growth and microstructure of polycrystalline Ti1−xAlxN alloy films deposited by ultra-high-vacuum dual-target magnetron sputtering, Thin Solid Films, 235, 62, 10.1016/0040-6090(93)90244-J
Keunecke, 2010, Modified TiAlN coatings prepared by d.c. pulsed magnetron sputtering, Surf. Coat. Technol., 205, 1273, 10.1016/j.surfcoat.2010.09.023
Grzesik, 2006, Investigations on friction and wear mechanisms of the PVD-TiAlN coated carbide in dry sliding against steels and cast iron, Wear, 261, 1191, 10.1016/j.wear.2006.03.004
Shtansky, 2005, Hard tribological Ti–B–N, Ti–Cr–B–N, Ti–Si–B–N and Ti–Al–Si–B–N coatings, Surf. Coat. Technol., 200, 208, 10.1016/j.surfcoat.2005.02.126
He, 2001, Improved anti-wear performance of nanostructured titanium boron nitride coatings, Wear, 249, 498, 10.1016/S0043-1648(01)00582-8
Shtansky, 1999, Synthesis and characterization of Ti–Si–C–N films, Metall. Mater. Trans. A, 30, 2439, 10.1007/s11661-999-0252-0
Rebholz, 1999, Structure, mechanical and tribological properties of sputtered TiAlBN thin films, Surf. Coat. Technol., 113, 126, 10.1016/S0257-8972(98)00840-8
Aouadi, 2004, Characterization of titanium chromium nitride nanocomposite protective coatings, Appl. Surf. Sci., 229, 387, 10.1016/j.apsusc.2004.02.019
Pogrebnjak, 2013, Investigation of element profiles, defects, phase composition and physical and mechanical properties of superhard coatings Ti–Hf–Si–N, Mater. Sci. Appl., 4, 24
Lao, 2005, Mutual promotion effect of crystal growth in TiN/SiC nanomultilayers, Appl. Phys. Lett., 86, 0119021, 10.1063/1.1844045
Setoyama, 1996, Formation of cubic AlN in TiN/AlN superlattice, Surf. Coat. Technol., 86-87, 225, 10.1016/S0257-8972(96)03033-2
Nordin, 1998, Mechanical and tribological properties of multilayered PVD TiN/CrN, TiN/MoN, TiN/NbN and TiN/TaN coatings on cemented carbide, Surf. Coat. Technol., 106, 234, 10.1016/S0257-8972(98)00544-1
Musil, 2012, Hard nanocomposite coatings: thermal stability, oxidation resistance and toughness, Surf. Coat. Technol., 207, 50, 10.1016/j.surfcoat.2012.05.073
Martev, 2010, Nanolaminated TiN/Mo2N hard multilayer coatings, J. Phys.: Conf. Ser., 223, 012
Pogrebnjak, 2015, Structure and properties of arc evaporated nanoscale TiN/MoN multilayered systems, Int. J. Refract. Met. Hard Mater., 48, 222, 10.1016/j.ijrmhm.2014.07.043
Bemporad, 2006, High thickness Ti/TiN multilayer thin coatings for wear resistant applications, Surf. Coat. Technol., 201, 2155, 10.1016/j.surfcoat.2006.03.042
Bhushan, 1987, Overview of coating materials, surface treatments, and screening techniques for tribological applications Part 2: screening techniques, 310
Yust, 1988
Bhushan, 1991
Bhushan, 2001
〈http://www.astm.org/Standards/G99.htm〉.
Bhushan, 2013
Schulz, 2001, Performance of oxide PVD-coatings in dry cutting operations, Surf. Coat. Technol., 146–147, 4480
Lii, 1998, The effects of TiAl interlayer on PVD TiAlN films, Surf. Coat. Technol., 99, 197, 10.1016/S0257-8972(97)00104-7
Panjan, 1996, Oxidation of TiN, ZrN, TiZrN, CrN, TiCrN and TiN/CrN multilayer hard coatings reactively sputtered at low temperature, Thin Solid Films, 281–282, 298, 10.1016/0040-6090(96)08663-4
Chen, 2011, Improved properties of Ti–Al–N coating by multilayer structure, Int. J. Refract. Met. Hard Mater., 29, 681, 10.1016/j.ijrmhm.2011.05.001
Pei, 2012, Friction and wear behavior of the PVD (Zr,Ti)N coated cemented carbide against 40Cr hardened steel, Int. J. Refract. Met. Hard Mater., 35, 213, 10.1016/j.ijrmhm.2012.06.003
Scholl, 1997, Abrasive wear of titanium nitride coatings, Wear, 203–204, 57, 10.1016/S0043-1648(96)07408-X
Lin, 1994, Analysis of the tribological behaviour and wear mechanisms titanium nitride coating, Wear, 171, 59, 10.1016/0043-1648(94)90348-4
Hainsworth, 2003, The effect of the substrate on the mechanical properties of TiN coatings, Surf. Coat. Technol., 163–164, 515, 10.1016/S0257-8972(02)00652-7
Guu, 1996, The tribological characteristics of titanium nitride coatings Part I. Coating thickness effects, Wear, 194, 12, 10.1016/0043-1648(95)06630-6
Guu, 1996, The tribological characteristics of titanium nitride coatings Part II. Comparisons of two deposition processes, Wear, 194, 22, 10.1016/0043-1648(95)06631-4
Arndt, 2003, Performance of new AlTiN coatings in dry and high speed cutting, Surf. Coat. Technol., 163, 674, 10.1016/S0257-8972(02)00694-1
Nose, 2003, Influence of sputtering conditions on the structure and properties of Ti–Si–N thin films prepared by r.f.-reactive sputtering, Surf. Coat. Technol., 174, 261, 10.1016/S0257-8972(03)00710-2
Hsieh, 2003, Deposition and characterization of Ti(C,N,O) coatings by unbalanced magnetron sputtering, Surf. Coat. Technol., 163–164, 233, 10.1016/S0257-8972(02)00494-2
Hsieh, 2006, Oxidation and wear behaviors of Ti-based thin films, Surf. Coat. Technol., 201, 4094, 10.1016/j.surfcoat.2006.08.026
Azushima, 2008, Coefficients of friction of TiN coatings with preferred grain orientations under dry condition, Wear, 265, 1017, 10.1016/j.wear.2008.02.019
Grzesik, 2003
Prengel, 2001, A new class of high performance PVD coatings for carbide cutting tools, Surf. Coat. Technol., 139, 25, 10.1016/S0257-8972(00)01080-X
Aihua, 2012, Friction and wear properties of TiN, TiAlN, AlTiN and CrAlN PVD nitride coatings, Int. J. Refract. Met. Hard. Mater., 31, 82, 10.1016/j.ijrmhm.2011.09.010
Yoon, 2002, A comparative study on tribological behavior of TiN and TiAlN coatings prepared by arc ion plating technique, Surf. Coat. Technol., 161, 237, 10.1016/S0257-8972(02)00474-7
Mo, 2007, Comparison of tribological behaviours of AlCrN and TiAlN coatings—deposited by physical vapor deposition, Wear, 263, 1423, 10.1016/j.wear.2007.01.051
Wei, 2011, Effects of pulsed bias duty ratio on microstructure and mechanical properties of TiN/TiAlN multilayer coatings, Appl. Surf. Sci., 257, 7881, 10.1016/j.apsusc.2011.04.066
Andersen, 2000, Deposition, microstructure and mechanical and tribological properties of magnetron sputtered TiN/TiAlN multilayers, Surf. Coat. Technol., 123, 219, 10.1016/S0257-8972(99)00473-9
Liew, 2013, Frictional and wear behaviour of AlCrN, TiN, TiAlN single-layer coatings, and TiAlN/AlCrN, AlN/TiN nano-multilayer coatings in dry sliding, Procedia Eng., 68, 512, 10.1016/j.proeng.2013.12.214
Nordin, 1999, Wear resistance of multilayered PVD TiN/TaN on HSS, Surf. Coat. Technol., 120–121, 528, 10.1016/S0257-8972(99)00493-4
Kassman, 1991, A new test method for the intrinsic abrasion resistance of thin coating, Surf. Coat. Technol., 50, 75, 10.1016/0257-8972(91)90196-4
Gåhlin, 1997, The crater grinder method as a means for coating wear evaluation – an update, Surf. Coat. Technol., 90, 107, 10.1016/S0257-8972(96)03101-5
Tian, 2014, Microstructure and tribological properties of W-implanted PVD TiN coatings on 316L stainless steel, Vacuum, 99, 68, 10.1016/j.vacuum.2013.04.019
Deng, 2013, The microstructure, mechanical and tribological properties of TiN coatings after Nb and C ion implantation, Appl. Surf. Sci., 284, 405, 10.1016/j.apsusc.2013.07.112
Deng, 2014, The oxidation behavior and tribological properties of Si-implanted TiN coating, Vacuum, 99, 216, 10.1016/j.vacuum.2013.06.006
Deng, 2012, Effects of vanadium ion implantation on microstructure, mechanical and tribological properties of TiN coatings, Appl. Surf. Sci., 258, 9080, 10.1016/j.apsusc.2012.06.001
Bell, 1998, Realising the potential of duplex surface engineering, Tribol. Int., 31, 127, 10.1016/S0301-679X(98)00015-2
Podgornik, 1999, Wear and friction behaviour of duplex-treated AISI 4140 steel, Surf. Coat. Technol., 120–121, 502, 10.1016/S0257-8972(99)00417-X
Podgornik, 2001, Tribological properties of plasma nitrided and hard coated AISI 4140 steel, Wear, 249, 254, 10.1016/S0043-1648(01)00564-6
Quesada, 2006, TiAlN coatings deposited by R.F. magnetron sputtering on previously treated ASTM A36 steel, Surf. Coat. Technol., 201, 2925, 10.1016/j.surfcoat.2006.06.018
Novák, 2006, Duplex surface treatment of the Nb-alloyed PM tool steel, Surf. Coat. Technol., 201, 3342, 10.1016/j.surfcoat.2006.07.101
Tillmann, 2010, Mechanical and tribological properties of Ti/TiAlN duplex coatings on high and low alloy tool steels, Vacuum, 84, 387, 10.1016/j.vacuum.2009.08.001
Luo, 2005, Tribological properties of unbalanced magnetron sputtered nano-scale multilayer coatings TiAlN/VN and TiAlCrYN deposited on plasma nitrided steels, Surf. Coat. Technol., 193, 39, 10.1016/j.surfcoat.2004.07.058
Major, 2014, Wear mechanisms of multilayer TiN/Ti/a-C:H coatings investigated by transmission electron microscopy technique, Arch. Civ. Mech. Eng., 14, 615, 10.1016/j.acme.2014.01.007
Hovsepian, 2005, TiAlN based nanoscale multilayer coatings designed to adapt their tribological properties at elevated temperatures, Thin Solid Films, 485, 160, 10.1016/j.tsf.2005.03.048
Luo, 2011, Temperature dependent friction and wear of magnetron sputtered coating TiAlN/VN, Wear, 271, 2058, 10.1016/j.wear.2011.01.054
Münz, 1992, A new method for hard coatings: ABSTM (arc bond sputtering), Surf. Coat. Technol., 50, 169, 10.1016/0257-8972(92)90058-I
Polcar, 2006, The tribological characteristics of TiCN coating at elevated temperatures, Wear, 260, 40, 10.1016/j.wear.2004.12.031
Polcar, 2005, Comparison of tribological behaviour of TiN, TiCN and CrN at elevated temperatures, Surf. Coat. Technol., 193, 192, 10.1016/j.surfcoat.2004.07.098
Wang, 2011, Friction and wear properties of TiCN coatings sliding against SiC and steel balls in air and water, Thin Solid Films, 519, 4830, 10.1016/j.tsf.2011.01.038
Zheng, 2008, Preparation and tribological behavior of TiN/a-C composite films deposited by DC magnetron sputtering, Wear, 26, 261, 10.1016/j.wear.2007.10.007
Rebenne, 1994, Review of CVD TiN coatings for wear-resistant applications: deposition processes, properties and performance, Surf. Coat. Technol., 63, 1, 10.1016/S0257-8972(05)80002-7
Rother, 1997, Effects of low boron concentrations on the thermal stability of hard coatings, Surf. Coat. Technol., 96, 163, 10.1016/S0257-8972(97)00074-1
Tamirisakandala, 2005, Grain refinement of cast titanium alloys via trace boron addition, Scr. Mater., 53, 1421, 10.1016/j.scriptamat.2005.08.020
Vleugels, 1999, Chemical wear mechanisms of innovative ceramic cutting tools in the machining of steel, Wear, 225–229, 285, 10.1016/S0043-1648(98)00362-7
Wagner, 2006, The influence of boron content on the tribological performance of Ti–N–B coatings prepared by thermal CVD, Surf. Coat. Technol., 201, 4247, 10.1016/j.surfcoat.2006.08.071
Ma, 2006, Microstructure and tribological behaviour of super-hard Ti–Si–C–N nanocomposite coatings deposited by plasma enhanced chemical vapor deposition, Thin Solid Films, 496, 438, 10.1016/j.tsf.2005.08.379
Kessler, 2004, Microstructure and wear resistance of CVD TiN-coated and induction surface hardened steels, Surf. Coat. Technol., 182, 184, 10.1016/j.surfcoat.2003.08.054
Su, 2011, Inclined impact–sliding wear tests of TiN/Al2O3/TiCN coatings on cemented carbide substrates, Surf. Coat. Technol., 206, 1998, 10.1016/j.surfcoat.2011.09.067
Bouzakis, 2004, The inclined impact test, an efficient method to characterise coatings׳ cohesion and adhesion properties, Thin Solid Films, 469–470, 254, 10.1016/j.tsf.2004.08.093
Chen, 2011, Study on fatigue and wear behaviors of a TiN coating using an inclined impact-sliding test, Surf. Coat. Technol., 206, 1977, 10.1016/j.surfcoat.2011.09.032
Chakravarthy, 2012, A comparative study on wear behavior of TiN and diamond coated WC–Co substrates against hypereutectic Al–Si alloys, Appl. Surf. Sci., 261, 520, 10.1016/j.apsusc.2012.08.049
Raoufi, 2012, Effect of active screen plasma nitriding pretreatment on wear behavior of TiN coating deposited by PACVD technique, App. Surf. Sci., 258, 7820, 10.1016/j.apsusc.2012.04.041
Nishimoto, 2013, Simultaneous duplex process of TiN coating and nitriding by active screen plasma nitriding, Surf. Coat. Technol., 228, S558, 10.1016/j.surfcoat.2012.04.021
Zhao, 2006, Study on the active screen plasma nitriding and its nitriding mechanism, Surf. Coat. Technol., 201, 2320, 10.1016/j.surfcoat.2006.03.045
Perry, 2000, The effects of metal ion post-implantation on the near surface properties of TiN deposited by CVD, Surf. Coat. Technol., 133–134, 203, 10.1016/S0257-8972(00)00942-7
Perry, 1999, Dislocation network developed in titanium nitride by ion implantation, J. Vac. Sci. Technol. A, 17, 1848, 10.1116/1.581903
Ma, 2005, Comparative study of the tribological behaviour of superhard nanocomposite coatings nc-TiN/a-Si3N4 with TiN, Surf. Coat. Technol., 194, 143, 10.1016/j.surfcoat.2004.05.007
Feng, 2005, Reactive plasma sprayed TiN coating and its tribological properties, Wear, 258, 806, 10.1016/j.wear.2004.09.057
Galvanetto, 2006, Improvement of wear and corrosion resistance of RPS Ti–TiN coatings by means of thermal oxidation, Surf. Coat. Technol., 200, 3650, 10.1016/j.surfcoat.2004.10.003
Casadei, 2013, Combining thermal spraying and PVD technologies: a new approach of duplex surface engineering for Ti alloys, Surf. Coat. Technol., 237, 415, 10.1016/j.surfcoat.2013.08.057
Valente, 2000, High pressure reactive plasma spray synthesis of titanium nitride based coatings, Surf. Eng., 16, 339, 10.1179/026708400101517233