Vertical etching with isolated catalysts in metal-assisted chemical etching of silicon

Nanoscale - Tập 4 Số 23 - Trang 7532 - 2012
Prayudi Lianto1, Sihang Yu2, Junjie Wu3, Carl V. Thompson1,4, W. K. Choi1,2,3
1Advanced Materials for Micro- and Nano-Systems Programme, Singapore-MIT Alliance, Singapore 117576, Singapore
2Department of Electrical and Computer Engineering, National University of Singapore, Singapore 117576, Singapore
3NUS Graduate School for Integrative Sciences and Engineering, National University of Singapore, Singapore 117456, Singapore
4Department of Materials Science And Engineering, Massachusetts Institute of Technology, Cambridge, MA 02139 USA

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Nanoscale

Tập 4 Số 23

7532

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