Uniform deposition of ultra-thin TiO2 film on mica substrate by atmospheric pressure chemical vapor deposition: Effect of precursor concentration

Chinese Journal of Chemical Engineering - Tập 60 - Trang 99-107 - 2023
Ming Liu1, Ying Li2, Rui Wang1, Guoqiang Shao1, Pengpeng Lv1, Jun Li1, Qingshan Zhu1,3
1State Key Laboratory of Multiphase Complex Systems, Institute of Process Engineering, Chinese Academy of Sciences, Beijing 100190, China
2School of Chemical & Environmental Engineering, China University of Mining and Technology (Beijing), Beijing, 100083, China
3School of Chemical Engineering, University of Chinese Academy of Sciences, Beijing 100049, China

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