UV-excimer-laser ablation of polymethylmethacrylate at 248 nm: Characterization of incubation sites with Fourier transform IR- and UV-Spectroscopy

S. Küper1, M. Stuke1
1Max-Planck-Institut für biophysikalische Chemie, Abteilung Laserphysik, P.O. 2841, D-3400, Göttingen, Germany

Tóm tắt

Từ khóa


Tài liệu tham khảo

Y. Kawamura, K. Toyoda, S. Namba: Appl. Phys. Lett.40, 374 (1982); J. Appl. Phys.53, 6489 (1982)

R. Srinivasan, V. Mayne-Banton: Appl. Phys. Lett.41, 576 (1982)

M. Rothschild, D.J. Ehrlich: J. Vac. Sci. Technol. B5, 389 (1987)

S. Küper, M. Stuke: Appl. Phys. B44, 199 (1987)

E. Sutcliffe, R. Srinivasan: J. Appl. Phys.60, 3315 (1986)

G. Koren: Appl. Phys. Lett.50, 1030 (1987)

A.R. Shultz: J. Phys. Chem.65, 967 (1961)

R.B. Fox, L.B. Isaacs, S. Stokes: J. Polymer Sci. A1, 1079 (1963)

J.R. MacCallum, C.K. Schoff: Trans. Faraday Soc.67, 2383 (1971)

K. Morimoto, S. Suzuki: J. Appl. Polym. Sci.16, 2947 (1972)

A. Gupta, R. Liang, F.D. Tsay, J. Moacanin: Macromolecules13, 1696 (1980)

D. Allara, A. Baca, C.A. Pryde: Macromolecules11, 1215 (1978)

H. Kobsa: Dupont, personal communication

C.N.R. Rao: In:Ultra-Violet and Visible Spectroscopy, Chemical Applications, 3rd edn. (Butterworths 1975) p. 57

R.C. Estler, N.S. Nogar: Appl. Phys. Lett.49, 1175 (1986)

R. Larciprete, M. Stuke: Appl. Phys. B42, 181 (1987)

J.G. Calvert, J.N. Pitts, Jr.: In:Photochemistry (Wiley, New York 1966) p. 435

T.J. Chuang, H. Hiraoka, A. Mödl: Appl. Phys. A45, 277 (1988)

R. Srinivasan, B. Braren: Appl. Phys. A45, 289 (1988)

R. Srinivasan, E. Sutcliffe, B. Braren: Appl. Phys. Lett.51, 1285 (1987)

S. Küper, M. Stuke: Proceedings ?Intl. Conf. on Microlithography?, ME '88, Vienna (1988)

S. Küper, M. Stuke: Appl. Phys. Lett.54, 4 (1989)