Sơ đồ cảm biến ba tín hiệu dựa trên các cộng hưởng vi cơ phi tuyến

Hajjaj, A.Z., Jaber, N., Ilyas, S., Alfosail, F.K., Younis, M.I.: Linear and nonlinear dynamics of micro and nano-resonators: review of recent advances. Int. J. Non-Linear Mech. 119, 103328 (2020). https://doi.org/10.1016/j.ijnonlinmec.2019.103328 Dastider, S.G., Abdullah, A., Jasim, I., Yuksek, N.S., Dweik, M., Almasri, M.: Low concentration E. coli O157:H7 bacteria sensing using microfluidic MEMS biosensor. Rev. Sci. Instrum. 89(12), 125009 (2018). https://doi.org/10.1063/1.5043424 Noi, K., Iwata, A., Kato, F., Ogi, H.: Ultrahigh-frequency, wireless mems qcm biosensor for direct, label-free detection of biomarkers in a large amount of contaminants. Anal. Chem. 91(15), 9398–9402 (2019). https://doi.org/10.1021/acs.analchem.9b01414 Gopinath, P.G., Anitha, V.R., Mastani, S.A.: Microcantilever based biosensor for disease detection applications. J. Med. Bioeng. 4(4), 307–311 (2015). https://doi.org/10.12720/jomb.4.4.307-311 Pengwang, E., Rabenorosoa, K., Rakotondrabe, M., Andreff, N.: Scanning micromirror platform based on MEMS technology for medical application. Micromachines 7(2), 24 (2016). https://doi.org/10.3390/mi7020024 Gafford, J., et al.: Toward medical devices with integrated mechanisms, sensors, actuators via printed-circuit MEMS. J. Med. Devices Trans. ASME (2017). https://doi.org/10.1115/1.4035375 Shikida, M., Hasegawa, Y., Al Farisi, M.S., Matsushima, M., Kawabe, T.: “Advancements in MEMS technology for medical applications: microneedles and miniaturized sensors. Jpn. J. Appl. Phys. 61, SA0803 (2022). https://doi.org/10.35848/1347-4065/ac305d5 Rahmani, M.: MEMS gyroscope control using a novel compound robust control. ISA Trans 72, 37–43 (2018). https://doi.org/10.1016/J.ISATRA.2017.11.009 Zhanshe, G., Fucheng, C., Boyu, L., Le, C., Chao, L., Ke, S.: Research development of silicon MEMS gyroscopes: a review. Microsyst. Technol. 21(10), 2053–2066 (2015). https://doi.org/10.1007/s00542-015-2645-x Shao, X., Shi, Y.: Neural adaptive control for MEMS gyroscope with full-state constraints and quantized input. IEEE Trans. Industr. Inform. (2020). https://doi.org/10.1109/TII.2020.2968345 Christensen D. L. et al.: Hermetically encapsulated differential resonant accelerometer. In: 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), IEEE, Jun. 2013, pp. 606–609. doi: https://doi.org/10.1109/Transducers.2013.6626839. Kim, B.-J., Kim, J.-S.: Gas sensing characteristics of MEMS gas sensor arrays in binary mixed-gas system. Mater. Chem. Phys. 138(1), 366–374 (2013). https://doi.org/10.1016/j.matchemphys.2012.12.002 Zotov, S.A., Simon, B.R., Trusov, A.A., Shkel, A.M.: High quality factor resonant MEMS accelerometer with continuous thermal compensation. IEEE Sens. J. 15(9), 5045–5052 (2015). https://doi.org/10.1109/JSEN.2015.2432021 Park, K., Kim, N., Morisette, D.T., Aluru, N.R., Bashir, R.: Resonant MEMS Mass Sensors for Measurement of Microdroplet Evaporation. J. Microelectromech. Syst. 21(3), 702–711 (2012). https://doi.org/10.1109/JMEMS.2012.2189359 Kiracofe, D., Raman, A.: Microcantilever dynamics in liquid environment dynamic atomic force microscopy when using higher-order cantilever eigenmodes. J. Appl. Phys. 108(3), 034320 (2010). https://doi.org/10.1063/1.3457143 Joshi, P., Kumar, S., Jain, V.K., Akhtar, J., Singh, J.: Distributed MEMS mass-sensor based on piezoelectric resonant micro-cantilevers. J. Microelectromech. Syst. 28(3), 382–389 (2019). https://doi.org/10.1109/JMEMS.2019.2908879 Kessler, Y., Liberzon, A., Krylov, S.: Flow velocity gradient sensing using a single curved bistable microbeam. J. Microelectromech. Syst. 29(5), 1020–1025 (2020). https://doi.org/10.1109/JMEMS.2020.3012690 Elshenety, A., El-Kholy, E.E., Abdou, A.F., Soliman, M.: H2S MEMS-based gas sensor. J. Micro. Nanolithogr. MEMS MOEMS 18(02), 1 (2019). https://doi.org/10.1117/1.JMM.18.2.025001 Asri, M.I.A., Hasan, M.N., Fuaad, M.R.A., Yunos, Y.M., Ali, M.S.M.: MEMS gas sensors: a review. IEEE Sens. J. 21(17), 18381–18397 (2021). https://doi.org/10.1109/JSEN.2021.3091854 Roessig T. A., Howe R. T., Pisano A. P., Smith J. H.: Surface-micromachined resonant accelerometer. In: Proceedings of International Solid State Sensors and Actuators Conference (Transducers ’97), IEEE, pp. 859–862. doi: https://doi.org/10.1109/SENSOR.1997.635237. Zribi, A., Knobloch, A., Tian, W.-C., Goodwin, S.: Micromachined resonant multiple gas sensor. Sens. Actuators A. Phys. 122(1), 31–38 (2005). https://doi.org/10.1016/j.sna.2004.12.034 Choi, J.-S., Park, W.-T.: MEMS particle sensor based on resonant frequency shifting. Micro. Nano Syst. Lett. 8(1), 17 (2020). https://doi.org/10.1186/s40486-020-00118-9 Shi, H., Fan, S., Zhang, Y., Sun, J.: Nonlinear dynamics study based on uncertainty analysis in electro-thermal excited MEMS resonant sensor. Sens. Actuators A: Phys. 232, 103–114 (2015). https://doi.org/10.1016/j.sna.2015.05.016 Spletzer, M., Raman, A., Wu, A.Q., Xu, X., Reifenberger, R.: Ultrasensitive mass sensing using mode localization in coupled microcantilevers. Appl. Phys. Lett. 88(25), 254102 (2006). https://doi.org/10.1063/1.2216889 Chatani K., Wang D. F., Ikehara T., Maeda R.: Vibration mode localization in coupled beam-shaped resonator array. In: 2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS), IEEE, 2012, pp. 69–72. doi: https://doi.org/10.1109/NEMS.2012.6196725. Alneamy, A.M., Ouakad, H.M.: Investigation into mode localization of electrostatically coupled shallow microbeams for potential sensing applications. Micromachines (Basel) 13(7), 989 (2022). https://doi.org/10.3390/mi13070989 Ruzziconi, L., Lenci, S., Younis, M.I.: An imperfect microbeam under an axial load and electric excitation: nonlinear phenomena and dynamical integrity. Int. J. Bifurc. Chaos 23(02), 1350026 (2013). https://doi.org/10.1142/S0218127413500260 Ruzziconi, L., Jaber, N., Kosuru, L., Bellaredj, M.L., Younis, M.I.: Two-to-one internal resonance in the higher-order modes of a MEMS beam: Experimental investigation and theoretical analysis via local stability theory. Int. J. Non Linear Mech. 129, 103664 (2021). https://doi.org/10.1016/j.ijnonlinmec.2020.103664 Cho, H., Yu, M.-F., Vakakis, A.F., Bergman, L.A., McFarland, D.M.: Tunable, broadband nonlinear nanomechanical resonator. Nano Lett. 10(5), 1793–1798 (2010). https://doi.org/10.1021/nl100480y Hajjaj, A.Z., Jaber, N., Alcheikh, N., Younis, M.I.: A resonant gas sensor based on multimode excitation of a buckled microbeam. IEEE Sens. J. 20(4), 1778–1785 (2020). https://doi.org/10.1109/JSEN.2019.2950495 Jaber, N., Ilyas, S., Shekhah, O., Eddaoudi, M., Younis, M.I.: Multimode MEMS resonator for simultaneous sensing of vapor concentration and temperature. IEEE Sens. J. 18(24), 10145–10153 (2018). https://doi.org/10.1109/JSEN.2018.2872926 Yaqoob, U., Lenz, W.B., Alcheikh, N., Jaber, N., Younis, M.I.: Highly selective multiple gases detection using a thermal-conductivity-based MEMS resonator and machine learning. IEEE Sens. J. 22, 1–1 (2022). https://doi.org/10.1109/JSEN.2022.3203816 Homeijer B. et al.: Hewlett packard’s seismic grade MEMS accelerometer. In: Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 2011, pp. 585–588. doi: https://doi.org/10.1109/MEMSYS.2011.5734492. Milligan D. J., Homeijer B. D., Walmsley R. G.: An ultra-low noise MEMS accelerometer for seismic imaging. In: Proceedings of IEEE Sensors, 2011, pp. 1281–1284. doi: https://doi.org/10.1109/ICSENS.2011.6127185. Zandi K., Wong B., Zou J., Kruzelecky R. V., Jamroz W., Peter Y. A.: In-plane silicon-on-insulator optical MEMS accelerometer using waveguide Fabry-Perot microcavity with silicon/air bragg mirrors. In: Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 2010, pp. 839–842. doi: https://doi.org/10.1109/MEMSYS.2010.5442337. Ahmadian, M., Jafari, K., Sharifi, M.J.: Novel graphene-based optical MEMS accelerometer dependent on intensity modulation. ETRI J. 40(6), 794–801 (2018). https://doi.org/10.4218/etrij.2017-0309 Zou X., Seshia A. A.: A high-resolution resonant MEMS accelerometer. In: 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015, Institute of Electrical and Electronics Engineers Inc., 2015, pp. 1247–1250. doi: https://doi.org/10.1109/TRANSDUCERS.2015.7181156. Mustafazade, Arif, et al.: A vibrating beam MEMS accelerometer for gravity and seismic measurements. Sci. Rep. (2020). https://doi.org/10.1038/s41598-020-67046-x Zhang, H., Li, B., Yuan, W., Kraft, M., Chang, H.: An acceleration sensing method based on the mode localization of weakly coupled resonators. J. Microelectromech. Syst. 25(2), 286–296 (2016). https://doi.org/10.1109/JMEMS.2015.2514092 Kou, H., Tan, Q., Wang, Y., Zhang, G., Su, S., Xiong, J.: A wireless slot-antenna integrated temperature-pressure-humidity sensor loaded with CSRR for harsh-environment applications. Sens. Actuators B. Chem. 311, 127907 (2020). https://doi.org/10.1016/j.snb.2020.127907 Demanega, I., Mujan, I., Singer, B.C., Anđelković, A.S., Babich, F., Licina, D.: Performance assessment of low-cost environmental monitors and single sensors under variable indoor air quality and thermal conditions. Build. Environ. 187, 107415 (2021). https://doi.org/10.1016/j.buildenv.2020.107415 Kenry, J. C. Yeo, Lim C. T.: Emerging flexible and wearable physical sensing platforms for healthcare and biomedical applications. Microsyst. Nanoeng. 2016. doi: https://doi.org/10.1038/micronano.2016.43. C. L. Roozeboom et al.: Multifunctional integrated sensor in A 2×2 mm epitaxial sealed chip operating in a wireless sensor node. In: Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Institute of Electrical and Electronics Engineers Inc., 2014, pp. 773–776. doi: https://doi.org/10.1109/MEMSYS.2014.6765755. Roozeboom, C.L., et al.: Multifunctional integrated sensors for multiparameter monitoring applications. J. Microelectromech. Syst. 24(4), 810–821 (2015). https://doi.org/10.1109/JMEMS.2014.2349894 Thai, N.X., Tonezzer, M., Masera, L., Nguyen, H., van Duy, N., Hoa, N.D.: Multi gas sensors using one nanomaterial, temperature gradient, and machine learning algorithms for discrimination of gases and their concentration. Anal. Chim. Acta. 1124, 85–93 (2020). https://doi.org/10.1016/j.aca.2020.05.015 Kanaparthi, S., Singh, S.G.: Discrimination of gases with a single chemiresistive multi-gas sensor using temperature sweeping and machine learning. Sens. Actuators B. Chem. 348, 130725 (2021). https://doi.org/10.1016/j.snb.2021.130725 Kang, M., et al.: High accuracy real-time multi-gas identification by a batch-uniform gas sensor array and deep learning algorithm. ACS Sens. 7(2), 430–440 (2022). https://doi.org/10.1021/acssensors.1c01204 Potyrailo, R.A., et al.: Multi-gas sensors for enhanced reliability of SOFC operation. ECS Trans. 91(1), 319–328 (2019). https://doi.org/10.1149/09101.0319ecst Zhao, W., Alcheikh, N., Khan, F., Yaqoob, U., Younis, M.I.: Simultaneous gas and magnetic sensing using a single heated micro-resonator. Sens. Actuators A. Phys. 344, 113688 (2022). https://doi.org/10.1016/j.sna.2022.113688 Shoaib, M., Hisham, N., Basheer, N., Tariq, M.: Frequency and displacement analysis of electrostatic cantilever-based MEMS sensor. Analog Integr. Circ. Signal Process 88(1), 1–11 (2016). https://doi.org/10.1007/s10470-016-0695-3 Maroufi, M., Alemansour, H., Moheimani, S.O.R.: A high dynamic range closed-loop stiffness-adjustable MEMS force sensor. J. Microelectromech. Syst. 29(3), 397–407 (2020). https://doi.org/10.1109/JMEMS.2020.2983193 Duan, J., et al.: Building safe lithium-ion batteries for electric vehicles: a review. Electrochem. Energy Rev. 3(1), 1–42 (2020). https://doi.org/10.1007/s41918-019-00060-4 Cai, T., Valecha, P., Tran, V., Engle, B., Stefanopoulou, A., Siegel, J.: Detection of Li-ion battery failure and venting with Carbon Dioxide sensors. eTransportation 7, 100100 (2021). https://doi.org/10.1016/j.etran.2020.100100 Mansoor, M., et al.: An SOI CMOS-based multi-sensor MEMS chip for fluidic applications. Sensors (Switzerland) 16(11), 1608 (2016). https://doi.org/10.3390/s16111608 Mescheder U. et al.: Mems-based air quality sensor. Zou, H.X., et al.: Mechanical modulations for enhancing energy harvesting: principles, methods and applications. Appl. Energy 255, 113871 (2019). https://doi.org/10.1016/j.apenergy.2019.113871 Li, L., Liu, H., Shao, M., Ma, C.: A novel frequency stabilization approach for mass detection in nonlinear mechanically coupled resonant sensors. Micromachines (Basel) 12(2), 178 (2021). https://doi.org/10.3390/mi12020178 Timoshenko S.: Strength of materials. 1940. Rabenimanana, T., Walter, V., Kacem, N., Le Moal, P., Bourbon, G., Lardiès, J.: Mass sensor using mode localization in two weakly coupled MEMS cantilevers with different lengths: design and experimental model validation. Sens. Actuators A. Phys. 295, 643–652 (2019). https://doi.org/10.1016/j.sna.2019.06.004 Morozov, N.F., Indeitsev, D.A., Igumnova, V.S., Lukin, A.V., Popov, I.A., Shtukin, L.V.: Nonlinear dynamics of mode-localized MEMS accelerometer with two electrostatically coupled microbeam sensing elements. Int. J. Non Linear Mech. 138, 103852 (2022). https://doi.org/10.1016/j.ijnonlinmec.2021.103852 Younis, M.I.: MEMS Linear and Nonlinear Statics and Dynamics. Springer, Boston (2011) “COMSOL,” 2022. https://www.comsol.com/ (Accessed Nov. 24, 2022). Zhao, C., Montaseri, M.H., Wood, G.S., Pu, S.H., Seshia, A.A., Kraft, M.: A review on coupled MEMS resonators for sensing applications utilizing mode localization. Sens. Actuators A. Phys. 249, 93–111 (2016). https://doi.org/10.1016/j.sna.2016.07.015 Nayfeh, A.H., Ibrahim, R.A.: Nonlinear interactions: analytical, computational, and experimental methods. Appl. Mech. Rev. 54(4), B60–B61 (2001). https://doi.org/10.1115/1.1383674 Lyu, M., et al.: Exploiting nonlinearity to enhance the sensitivity of mode-localized mass sensor based on electrostatically coupled MEMS resonators. Int. J. Non-Linear Mech. 121, 103455 (2020). https://doi.org/10.1016/j.ijnonlinmec.2020.103455 Lyu, M., et al.: Computational investigation of high-order mode localization in electrostatically coupled microbeams with distributed electrodes for high sensitivity mass sensing. Mech. Syst. Signal Process. 158, 107781 (2021). https://doi.org/10.1016/j.ymssp.2021.107781 Hajjaj, A.Z., Ruzziconi, L., Alfosail, F., Theodossiades, S.: Combined internal resonances at crossover of slacked micromachined resonators. Nonlinear Dyn. 110(3), 2033–2048 (2022). https://doi.org/10.1007/s11071-022-07764-1