Trifluoroethylene bond enrichment in P(VDF-TrFE) copolymers with enhanced ferroelectric behaviors by plasma fluorination on bottom electrode

Jer-Chyi Wang1,2,3, Yi-Pei Jiang1, Yu-Jie Lin1, Shun-Hsiang Chan4,5, Ming-Chung Wu4,5,6
1Department of Electronic Engineering, Chang Gung University, Guishan Dist. 33302, Taoyuan, Taiwan
2Department of Neurosurgery, Chang Gung Memorial Hospital, Linkou, Guishan Dist., 33305, Taoyuan, Taiwan
3Department of Electronic Engineering, Ming Chi University of Technology, Taishan Dist., 24301 New Taipei City, Taiwan
4Department of Chemical and Materials Engineering, Chang Gung University, Guishan Dist., 33302 Taoyuan, Taiwan
5Green Technology Research Center, Chang Gung University, Guishan Dist., 33302 Taoyuan, Taiwan
6Division of Neonatology, Department of Pediatrics, Chang Gung Memorial Hospital, Linkou, Guishan Dist., 33305 Taoyuan, Taiwan

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