Thin film and interface properties during ZnO deposition onto high-barrier hybrid/PET flexible substrates

Micron - Tập 40 - Trang 130-134 - 2009
C. Koidis1, S. Logothetidis1, A. Laskarakis1, I. Tsiaoussis1, N. Frangis1
1Lab for Thin Films-Nanosystems & Nanometrology (LTFN), Physics Department, Aristotle University of Thessaloniki, GR-54124 Thessaloniki, Greece

Tài liệu tham khảo

Amberg-Schwab, 2006, Development of passive and active barrier coatings on the basis of inorganic-organic polymers, Monatshefte für Chemie, 137, 657, 10.1007/s00706-006-0466-4 Azzam, 1977 Banerjee, 2006, Low-temperature deposition of ZnO thin films on PET and glass substrates by DC-sputtering technique, Thin Solid Films, 496, 112, 10.1016/j.tsf.2005.08.258 Cullity, 1978 Fortunato, 2005, Recent advances in ZnO transparent thin film transistors, Thin Solid Films, 487, 205, 10.1016/j.tsf.2005.01.066 Irene, 2005 Jellison, 1996, Parameterization of the optical functions of amorphous materials in the interband region, Applied Physics Letters, 69, 371, 10.1063/1.118064 Koidis, C., Logothetidis, S., Georgiou, D., Laskarakis, A., Goktsis, N., Lousinian, S., Tsiaoussis, I., Frangis, N. Growth, optical and nanostructural properties of magnetron sputtered ZnO thin films deposited on polymeric substrates. Physica Status Solidi A (E-MRS Spring Meeting 2007), under review. Lin, 2005, Band gap variation of size-controlled ZnO quantum dots synthesized by sol–gel method, Chemical Physics Letters, 409, 208, 10.1016/j.cplett.2005.05.027 Logothetidis, 2005, Polymeric substrates and encapsulation for flexible electronics: bonding structure, surface modification and functional nanolayer growth, Review of Advanced Materials Science, 10, 387 Pimentel, 2005, Polycrystalline intrinsic zinc oxide to be used in transparent electronic devices, Thin Solid Films, 487, 212, 10.1016/j.tsf.2005.01.067 Rebien, 2002, Optical properties of ZnO thin films: Ion layer gas reaction compared to sputter deposition, Applied Physics Letters, 80, 3518, 10.1063/1.1479211 Suchea, 2005, Nanostructured ZnO and ZAO transparent thin films by sputtering-surface characterization, Review of Advanced Materials Science, 10, 335