Thermodynamic study on the role of hydrogen during the MOVPE growth of group III nitrides

Journal of Crystal Growth - Tập 197 - Trang 99-105 - 1999
Akinori Koukitu1, Tetsuya Taki1, Naoyuki Takahashi1, Hisashi Seki1
1Department of Applied Chemistry, Faculty of Technology, Tokyo University of Agriculture and Technology, Koganei, Tokyo 184-8588, Japan

Tài liệu tham khảo

Scholz, 1997, J. Crystal Growth, 170, 321, 10.1016/S0022-0248(96)00606-9 Piner, 1997, Appl. Phys. Lett., 70, 461, 10.1063/1.118181 Koukitu, 1996, Jpn. J. Appl. Phys., 35, L673, 10.1143/JJAP.35.L673 Koukitu, 1996, Jpn. J. Appl. Phys., 35, L1638, 10.1143/JJAP.35.L1638 Koukitu, 1997, J. Crystal Growth, 170, 306, 10.1016/S0022-0248(96)00535-0 Koukitu, 1997, Jpn. J. Appl. Phys., 36, L1136, 10.1143/JJAP.36.L1136 Koukitu, 1998, J. Crystal Growth, 189/190, 13, 10.1016/S0022-0248(98)00147-X Ban, 1972, J. Electrochem. Soc., 119, 761, 10.1149/1.2404322 Sedgwick, 1976, J. Electrochem. Soc., 123, 254, 10.1149/1.2132798 Liu, 1978, J. Electrochem. Soc., 125, 1161, 10.1149/1.2131641 Shaw, 1978, 1, 1 Keller, 1996, Appl. Phys. Lett., 68, 3147, 10.1063/1.115806 Koukitu, 1998, Jpn. J. Appl. Phys., 37, 762, 10.1143/JJAP.37.762