Thermal transition behaviors of vanadium pentoxide film during post-deposition annealing

Surface and Coatings Technology - Tập 405 - Trang 126637 - 2021
Fei Xia1, Lei Yang2, Bing Dai1, Zhenhuai Yang1, Liangge Xu1, Gang Gao1, Chunqiang Sun1, Zicheng Song1, Victor Ralchenko1,3, Jiaqi Zhu1,4
1Center for Composite Materials and Structures, Harbin Institute of Technology, Harbin 150001, China
2Center of Analysis Measurement, Harbin Institute of Technology, Harbin 150001, China
3General Physics Institute, Russian Academy of Sciences, Moscow 119991, Russia
4Key Laboratory of Micro-Systems and Micro-Structures Manufacturing, Ministry of Education, Harbin 150001, China

Tài liệu tham khảo

Yang, 2011, Oxide electronics utilizing ultrafast metal-insulator transitions, Annu. Rev. Mater. Res., 41, 337, 10.1146/annurev-matsci-062910-100347 Xu, 2016, Effects of annealing ambient on oxygen vacancies and phase transition temperature of VO2 thin films, RSC Adv., 6, 79383, 10.1039/C6RA13189A Zhang, 2016, Characterization of vanadium oxide thin films with different stoichiometry using Raman spectroscopy, Thin Solid Films, 620, 64, 10.1016/j.tsf.2016.07.082 Hryha, 2012, Stoichiometric vanadium oxides studied by XPS, Surf. Interface Anal., 44, 1022, 10.1002/sia.3844 Zhang, 2017, Structural and optical properties of vanadium pentoxide nano-thin films with different thickness, Integr. Ferroelectr., 182, 139, 10.1080/10584587.2017.1352408 Aissani, 2015, Influence of vanadium on structure, mechanical and tribological properties of crn coatings, Surf. Eng., 31, 779, 10.1179/1743294415Y.0000000043 Urena-Begara, 2017, Raman and XPS characterization of vanadium oxide thin films with temperature, Appl. Surf. Sci., 403, 717, 10.1016/j.apsusc.2017.01.160 Bahlawane, 2014, Vanadium oxide compounds: structure, properties, and growth from the gas phase, Chem. Vap. Dep., 20, 299, 10.1002/cvde.201400057 Chernova, 2009, Layered vanadium and molybdenum oxides: batteries and electrochromics, J. Mater. Chem., 19, 2526, 10.1039/b819629j Zhang, 2017, Influence of film thickness on structural and optical-switching properties of vanadium pentoxide films, Surf. Eng., 33, 292, 10.1080/02670844.2016.1252897 Sinha, 2019, Effect of temperature on structural, optical and electrical properties of pulsed-laser deposited W-doped V2O5 thin films, Superlattice. Microst., 125, 88, 10.1016/j.spmi.2018.10.029 Kang, 2011, Metal-insulator transition without structural phase transition in V2O5 film, Appl. Phys. Lett., 98, 10.1063/1.3571557 Zhang, 2016, Optical and elec-trical properties of vanadium pentoxide films deposited on different substrates, Acta Opt. Sin., 36, 0431001, 10.3788/AOS201636.0431001 Zairi, 2014, Effect of O2 increase on properties of vanadium oxide coatings, Surf. Eng., 30, 606, 10.1179/1743294414Y.0000000280 Wu, 2008, Infuence of thermal cycling on structural, optical and electrical properties of vanadium oxide thin films, Appl. Surf. Sci., 255, 2840, 10.1016/j.apsusc.2008.08.048 Liu, 2008, Vanadium oxide thin films prepared by reactive magnetron sputtering, Rare Met. Mater. Eng., 37, 2221 Miyazaki, 2017, Vanadium oxide-based photochromic composite film, RSC Adv., 7, 2388, 10.1039/C6RA25892A Ramana, 2004, Growth and surface characterization of V2O5 thin films made by pulsed-laser deposition, J. Vac. Sci. Technol. A, 22, 2453, 10.1116/1.1809123 Zhang, 2016, In situ characterization on thermal transitions of VO2(B): toward VO2(R) and V2O3, Rare Metal Mat. Eng., 45, 1374, 10.1016/S1875-5372(16)30116-3 Gu, 2019, Facile fabrication of composite vanadium oxide thin films with enhanced thermochromic properties, ACS Appl. Mater. Interfaces, 11, 37617, 10.1021/acsami.9b11376 Goltvyanskyi, 2014, Structural transformation and functional properties of vanadium oxide films after low-temperature annealing, Thin Solid Films, 564, 179, 10.1016/j.tsf.2014.05.067 Liu, 2015, Tuning phase transition temperature of VO2 thin films by annealing atmosphere, J. Phys. D. Appl. Phys., 48, 10.1088/0022-3727/48/26/265104 Wang, 2013, Performance limits of microactuation with vanadium dioxide as a solid engine, ACS Nano, 7, 2266, 10.1021/nn305419e Beydaghyan, 2012, High contrast thermochromic switching in vanadium dioxide (VO2) thin films deposited on indium tin oxide substrates, Thin Solid Films, 522, 204, 10.1016/j.tsf.2012.07.107 Xu, 2018, Recent advances in VO2-based thermochromic composites for smart windows, J. Mater. Chem. C, 6, 1903, 10.1039/C7TC05768G Oka, 1989, Phase transition and electrical properties of VO2 (A), J. Ceram. Soc. Jpn., 97, 1134, 10.2109/jcersj.97.1134 Li, 2011, High-surface vanadium oxides with large capacities for lithium-ion batteries:from hydrated aerogel to nanocrystalline VO2(B), V6O13and V2O5, J. Mater. Chem., 21, 10999, 10.1039/c1jm11523e Valmalette, 1998, High efficiency thermochromic VO2(R) resulting from the irreversible transformation of VO2(B), Mater. Sci. Eng. B, 54, 168, 10.1016/S0921-5107(98)00148-2 Minch, 2014, The influence of processing conditions on the morphology andthermochromic properties of vanadium oxide films, Thin Solid Films, 556, 277, 10.1016/j.tsf.2014.02.049 Beke, 2011, A review of the growth of V2O5 films from 1885 to 2010, Thin Solid Films, 519, 1761, 10.1016/j.tsf.2010.11.001 Qing, 2006, Influence of temperature on the microstructure of V2O5 film prepared by DC magnetron sputtering, Rare Metals, 25, 82, 10.1016/S1001-0521(07)60050-3 Ingole, 2016, Effect of pyrolysis temperature onstructural, morphological and electrochemical properties of vanadiumoxide thin flms, J. Anal. Appl. Pyrolysis, 120, 434, 10.1016/j.jaap.2016.06.015 Sullivan, 2015, Optical scattering during phase transition of vanadium dioxide, Opt. Commun., 356, 395, 10.1016/j.optcom.2015.08.019 Akl, 2010, Thermal annealing effect on the crystallization and optical dispersion of sprayed V2O5 thin films, J. Phys. Chem. Solids, 71, 223, 10.1016/j.jpcs.2009.11.009 Abello, 1983, Vibrational spectra and valence force field of crystalline V2O5, Spectroc. Acta Pt. A, 39, 641, 10.1016/0584-8539(83)80040-3 Kang, 2017, Electrical and thermal characteristics of the insulator-metal transition in crystalline V2O5 films, Int. J. Thermophys., 38, 152, 10.1007/s10765-017-2290-y Shvets, 2019, A review of Raman spectroscopy of vanadium oxides, J. Raman Spectrosc., 8, 1 Bian, 2016, Thickness-modulated metal-insulator transition of VO2 film grown on sapphire substrate by MBE, J. Mater. Sci., 51, 6149, 10.1007/s10853-016-9863-1 Fadlelmula, 2017, Effects of thickness on the metal-insulator transition in free-standing vanadium dioxide nanocrystals, Nano Lett., 17, 1762, 10.1021/acs.nanolett.6b05067 Zhu, 2018, Thermochromism of vanadium dioxide films controlled by the thickness of Zn O buffer layer under low substrate temperature, J. Alloy. Compd., 740, 844, 10.1016/j.jallcom.2018.01.066 Marvel, 2015, Influence of deposition process and substrate on the phase transition of vanadium dioxide thin films, Acta Mater., 91, 217, 10.1016/j.actamat.2015.03.009 Liu, 2018, Recent progresses on physics andapplications of vanadium dioxide, Mater. Today, 21, 875, 10.1016/j.mattod.2018.03.029 Zhu, 2019, Thickness-modulated thermochromism of vanadium dioxide thin films grown by magnetron sputtering, Surf. Coat. Technol., 359, 396, 10.1016/j.surfcoat.2018.12.077 Cormier, 2017, Vanadium dioxide as a material to control light polarization in the visible and near infrared, Opt. Commun., 382, 80, 10.1016/j.optcom.2016.07.070 Huang, 2018, Phase transition analysis of thermochromic VO2 thin films by temperature-dependent Raman scattering and ellipsometry, Appl. Surf. Sci., 456, 545, 10.1016/j.apsusc.2018.06.125