The theory of surface erosion by ion bombardment

The Royal Society - Tập 407 Số 1833 - Trang 405-433 - 1986
Roger Smith1, G. Carter2, M. J. Nobes2
1Department of Mathematics , Loughborough University of Technology , Loughborough, Leicestershire, LE11 3TU, U.K
2Department of Electronic and Electrical Engineering, University of Salford, Salford M5 4WT, U.K.

Tóm tắt

An eroding or growing solid surface is treated as an advancing nonlinear wavefront and characteristic methods are used to describe its progress, when the normal velocity of erosion is a well-defined function of spatial position, and time and surface orientation. Facets, points and edges can develop as the surface evolves and the formation of these are described in terms of the theory. Some interesting examples are computed that have important application in microfabric­ation, surface analysis and ion beam processing.

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The Royal Society

Tập 407 Số 1833

405-433

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