The introduction of powder blasting for sensor and microsystem applications

Sensors and Actuators A: Physical - Tập 84 Số 3 - Trang 330-337 - 2000
E. Belloy1, S. Thurre1, E. Walckiers1, A. Sayah1, Martin A. M. Gijs1
1Institute of Microsystems, Swiss Federal Institute of Technology of Lausanne, EPFL, CH-1015 Lausanne, Switzerland

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