The constituent equations of piezoelectric bimorphs
Tóm tắt
Từ khóa
Tài liệu tham khảo
Sawyer, 1931, The use of rochelle salt crystals for electrical reproducers and microphones, Proc. Inst. Radio Eng., 19, 2020
Keller, 1951, Piezoelectric crystals in flexural vibration, Wireless Eng., 179
Thurston, 1953, The theoretical sensitivity of three types of rectangular bimorph transducers, J. Acoust. Soc. Am., 25, 870, 10.1121/1.1907210
L.A. Petermann and L.C. Oakley, Bender tuned array, U.S. Patent No. 2 842 685 (July 8, 1958).
J.T. McNaney, Electrostrictive apparatus for changing displays, U.S. Patent No. 3 146 367 (Aug. 25, 1964).
Fiebiger, 1967, Electrical performance of metal-insulator-piezoelectric semiconductor transducers, J. Appl. Phys., 38, 1948, 10.1063/1.1709788
Bauer, 1970, Sound recording method and apparatus
Kagawa, 1970, Finite element analysis of flexure-type vibrators with electrostrictive transducers, IEEE Trans. Sonics Ultrason., SU-17, 41, 10.1109/T-SU.1970.29543
Keuning tiApproximate equations for the flexure of thin incomplete piezolectric bimorphs, 1971, J. Eng. Math., 5, 307, 10.1007/BF01548248
Germano, 1971, Flexure mode piezoelectric transducers, IEEE Trans. Audio Electroacoust., AU-19, 6, 10.1109/TAU.1971.1162159
Denkmann, 1973, Analysis of structural acoustic interactions in metal-ceramic transducers, IEEE Trans. Audio Electroacoust., AU-21, 317, 10.1109/TAU.1973.1162492
Burfoot, 1974, 392
Ivanov, 1975, Device for the precision displacement of an article within a plane
Gallantree, 1976, Polarized poly(vinylidene fluoride) - Its application to pyroelectric and piezoelectric devices, Marconi Rev., 4, 189
Toda, 1977, Type of electro-motional device - PVF2 piezoelectric material, 171
Cragg, 1977, Telephone transducers using piezoelectric polymer foil, Elect. Commun., 52, 312
Ishida, 1977, Preparation properties of ferroelectric PLZT thin films by rf sputtering, J. Appl. Phys., 48, 951, 10.1063/1.323714
Steel, 1978, The piezoelectric bimorph: an experimental and theoretical study of its quasistatic response, J. Phys. D: Appl. Phys., 11, 979, 10.1088/0022-3727/11/6/017
Lee, 1979, Piezoelectric bimorph optical scanners: analysis and construction, Appl. Opt., 18, 454, 10.1364/AO.18.000454
Spencer, 1978, An electronically controlled piezoelectric insulin pump and valves, IEEE Trans. Sonics Ultrason., SU-25, 153, 10.1109/T-SU.1978.31006
Toda, 1978, Design of piezoelectric polymer motional devices with various structures, Trans., IECE Jpn., E 61, 513
Toda, 1979, A new electromotional device, RCA Eng., 25, 24
Toda, 1979, High field dielectric loss of PVF2 and the electromechanical conversion efficiency of a PVF2 Fan, Ferroelectrics, 22, 919, 10.1080/00150197908239446
Toda, 1979, Theory of air flow generation by a resonant type PVF2 bimorph cantilever vibrator, Ferroelectrics, 22, 911, 10.1080/00150197908239445
Kokorowski, 1979, Analysis of adaptive optical elements made from piezoelectric bimorphs, J. Optical Soc. Am., 69, 181, 10.1364/JOSA.69.000181
Kubota, 1980, Rotating magnetic head piezoelectric assembly and drive circuitry for video tape recorder
Jackson, 1980, Elimination of drift in a single-mode optical fiber interferometer using a piezoelectrically stretched coiled fiber, Appl. Opt., 19, 2926, 10.1364/AO.19.002926
Kepler, 1980, Piezoelectricity in polymers, CRC Critical Revs. Solid State Mater. Sci., 399, 10.1080/10408438008243576
Lee, 1981, The deflection bandwidth product of polyvinylidene fluoride benders and related structures, Ferroelectrics, 32, 93, 10.1080/00150198108238679
Nakamura, 1981, ZnO/SiO2-diaphragm composite resonator on a silicon wafer, Electron. Lett., 17, 507, 10.1049/el:19810355
Chen, 1982, Integrated silicon microbeam PI-FET accelerometer, IEEE Trans. Electron Devices, ED-29, 27, 10.1109/T-ED.1982.20654
Smits, 1982, Resonant diaphragm pressure gauge, Proc. Symp. Force, Displacement, Pressure and Flow Sensors, Twente University, The Netherlands, 135
Koo, 1982, An electric field sensor utilizing a piezoelectric polyvinylidene fluoride (PVF2) film in a single-mode fiber interferometer, IEEE J. Quant. Electron., QE-18, 670, 10.1109/JQE.1982.1071604
Pointon, 1982, Piezoelectric devices, IEE Proc., 129, 285
Gallantree, 1982, Ultrasonic applications of PVDF transducers, Marconi Rev., 1, 49
S. Osaka and M. Toda, Rotative motor using plural arrays of piezoelectric elements, U.S. Patent No. 4 399 386 (Aug. 16, 1983).
Royer, 1983, ZnO on Si integrated acoustic sensor, Sensors and Actuators, 4, 357, 10.1016/0250-6874(83)85044-6
Smits, 1983, Resonant diaphragm pressure measurement system with ZnO on Si excitation, Sensors and Actuators, 4, 565, 10.1016/0250-6874(83)85068-9
Smits, 1983, Dynamic properties and equivalent circuit of mass loaded piezoelectric bimorph, Int. Sym. Piezoelectricity in Biomaterials and Biomedical Devices, Pisa, Italy
Mulder, 1983, Resonant membrane pressure transducer, 7, 1.7.12
Schmidt, 1983, PVF2 bimorphs as active elements in wind generators, Ferroelectrics, 51, 105, 10.1080/00150198308009060
Doughty, 1984, Some parametric considerations for piezoelectric sensors with polyvinylidene fluoride films, Thin Solid Films, 112, 203, 10.1016/0040-6090(84)90210-4
Chen, 1984, Integrated silicon PI-FET accelerometer with proof mass, Sensors and Actuators, 5, 119, 10.1016/0250-6874(84)80002-5
Smits, 1984, Pressure dependence of resonant diaphragm transfer function, 117
Andrews, 1985, Monolithic bandpass filter using piezoelectric cantilevers
Assard, 1985, Precise bearing support ditherer with piezoelectric drive means
Kumada, 1985, A piezoelectric ultrasonic motor, Jpn. J. Appl. Physics, 24, 739, 10.7567/JJAPS.24S2.739
Smits, 1985, Pressure dependence of resonant diaphragm pressure sensor, Proc. 4th Int. Conf Solid-State Sensors and Actuators (Transducers'85), Philadelphia, PA, U.S.A., 93
Ricketts, 1985, Transverse vibrations of composite piezoelectric polymer plates, J. Acoust. Soc. Am., 77, 1939, 10.1121/1.391839
Bailey auJ.E. Hubbard, 1985, Distributed piezoelectric-polymer active vibration control of a cantilever beam, J. Guidance, 8, 605, 10.2514/3.20029
Carey, 1986, Chemical piezoelectric sensor and sensor array characterization, Anal. Chem., 58, 3077, 10.1021/ac00127a037
Bryant, 1986, A characterization of the linear and non-linear dynamic performance of a practical piezoelectric actuator. Part II: Theory, Sensors and Actuators, 9, 105, 10.1016/0250-6874(86)80012-9
Bryant, 1986, A characterization of the linear and non-linear dynamic performance of a practical piezoelectric actuator. Part I: Measurements, Sensors and Actuators, 9, 95, 10.1016/0250-6874(86)80011-7
Ricketts, 1986, The frequency of flexural vibration of completely free composite piezoelectric polymer plates, J. Acoust. Soc. Am., 80, 723, 10.1121/1.393945
Muralt, 1986, Wide-range, low-operating-voltage, bimorph STM: application as potentiometer, IBM J. Res. Develop., 30, 443, 10.1147/rd.305.0443
Carlisle tiPiezoelectric plastics promise new sensors, 1986, Mach. Des., 105
Hodges, 1986, Silicon transducer
Heiserman, 1986, Piezoelectric polymer micromanipulator
Duffield, 1986, Problems with cryogenic operation of piezoelectric bending elements, Rev. Sci. Instrum., 57, 990, 10.1063/1.1138652
Tzou, 1987, A multi-purpose dynamic and tactile sensor for robot manipulators, J. Robotic Syst., 4, 719, 10.1002/rob.4620040603
Kawasaki, 1987, Ultrasonic motors, IEEE Tokyo Section, Denshi Tokyo, 26, 158
Tritt, 1987, Response of piezoelectric bimorphs as a function of temperature, Rev. Sci. Instrum., 58, 780, 10.1063/1.1139632
Crawley, 1987, Use of piezoelectric actuators as elements of intelligent structures, AIAA J., 1373, 10.2514/3.9792
Baz, 1988, Performance of an active control system with piezoelectric actuators, J. Sound Vib., 126, 327, 10.1016/0022-460X(88)90245-3
Tzou, 1988, Active vibration isolation by polymeric piezoelectret with variable feedback gains, ALAA J., 26, 1014
van de Pol, 1988, Sputtered ZnO films as piezoelectric transducers in micromechanical devices, Poster, EuroSensors II, Enschede, The Netherlands
Blom, 1989, Resonant silicon beam force sensor
van Lintel, 1988, A piezoelectric micropump based on micromachining of silicon, Sensors and Actuators, 15, 153, 10.1016/0250-6874(88)87005-7
Smits, 1989, Piezoelectric micropump with microvalves, Proc. Eighth Biennial University/Government/Industry Microelectronics Symp, Westborough, MA, U.S.A., 92, 10.1109/UGIM.1989.37309
Smits, 1990, Piezoelectric micropump with three microvalves working peristaltically, Sensors and Actuators, A21–A23, 203, 10.1016/0924-4247(90)85039-7
Udagawa, 1987, Grip device
Hatamura, 1987, Fine positioning device
Wang, 1988, Piezoelectric shear wave resonator and method of making same
Staufenberg, 1988, Piezoelectric multiaxis micropositioner
Shimizu, 1988, Piezoelectrically driving device
Delapierre, 1988, Process for the production of a piezoresistive gauge and to an accelerometer incorporating such a gauge
Tzou, 1989, Theoretical analysis of a multi-layered thin shell coupled with piezoelectric shell actuators for distributed vibration controls, J. Sound Vibration, 132, 433, 10.1016/0022-460X(89)90637-8
Peters, 1989, Piezoelectric bimorph-based translation device for two dimensional, remote micropositioning, Rev. Sci. Instrum., 60, 138, 10.1063/1.1140571
Barsky, 1989, Robot gripper control system using PVDF piezoelectric sensors, IEEE Trans. Ultrason., Ferroelectr. Freq. Contr., UFFC-36, 129, 10.1109/58.16980
Blom, 1990, Thin film ZnO as micromechanical actuator at low frequencies, Sensors and Actuators, A21–A23, 226, 10.1016/0924-4247(90)85044-5
Bill, 1990, Measuring simultaneously translational and angular acceleration with the new translational-angular-piezobeam (TAP) system, Sensors and Actuators, A21–A23, 282, 10.1016/0924-4247(90)85055-9
Stupian, 1989, The use of a linear piezoelectric actuator for coarse motion in a vacuum compatible scanning tunneling microscope, J. Vac. Sci. Technol., A7, 2895, 10.1116/1.576165
Fleischer, 1989, New type of piezoelectric ultrasonic motor, IEEE Trans. Ultrason. Ferroelectr. Freq. Control, UFFC-36, 614, 10.1109/58.39111
Fleischer, 1989, Ultrasonic piezomotor with longitudinally oscillating amplitude-transforming resonator, IEEE Trans. Ultrason. Ferroelectr. Freq. Control, UFFC-36, 607, 10.1109/58.39110
Crawley, 1990, Detailed models of piezoelectric actuation of beams, J. Intelligent Mater. Struct., 1, 4, 10.1177/1045389X9000100102
Landolt-Börnstein, Vol III, Book 18, 262.
1949, Standards on piezoelectric crystals 1949, Proc. IRE, 1378
1987, IEEE Standard 176-1987
Nash, 1972, 175
Berlincourt, 1964, Piezoelectric and piezomagnetic materials, 1, 182
Wang, 1989, 809
Quate, 1990, Imaging with the tunneling and the force microscope, Proc. IEEE Conf. Micro Electro Mechanical Systems, Napa Valley, CA, U.S.A., 188
Kenney, 1990, A micromachined silicon electron tunneling sensor, Proc. IEEE Conf. Micro Electro Mechanical Systems, Napa Valley, CA, U.S.A., 188
Piezoelectric Fans, brochure of the Piezo Systems Company, Cambridge, MA, U.S.A.
Lucas, 1975, Transformation of energy in piezoelectric drive systems, Siemens Forsch. Entwicklungsber, 4, 373