The Influence of the InAlAs Layer Surface Morphology on the Temperature Dependence of Parameters of Au/Ti/n-InAlAs(001) Schottky Diodes

Pleiades Publishing Ltd - Tập 45 - Trang 180-184 - 2019
I. B. Chistokhin1, M. S. Aksenov1,2, N. A. Valisheva1, D. V. Dmitriev1, I. V. Marchishin1, A. I. Toropov1, K. S. Zhuravlev1,2
1Rzhanov Institute of Semiconductor Physics, Siberian Branch, Russian Academy of Sciences, Novosibirsk, Russia
2Novosibirsk State University, Novosibirsk, Russia

Tóm tắt

Growth-related structural defects present on the surface of InAlAs layers grown by molecular beam epitaxy on InP(001) substrates influence the temperature dependences of the current–voltage characteristics of Au/Ti/InAlAs Schottky barriers. It is established that these defects in the form of pits cause the appearance of regions with reduced barrier height. At a surface density of ≥107 cm–2, these defects significantly influence the parameters of the Schottky barriers at temperatures below 200 K.

Tài liệu tham khảo

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