Technological principles of motion parameter transducers based on mass and charge transport in electrochemical microsystems

Russian Journal of Electrochemistry - Tập 48 - Trang 746-755 - 2012
V. G. Krishtop1,2, V. M. Agafonov2, A. S. Bugaev3
1Institute of Microelectronics Technology and High Purity Materials, Russian Academy of Sciences, Chernogolovka, Moscow oblast, Russia
2Department of Physical and Quantum Electronics, Moscow Institute of Physics and Technology (State University), Dolgoprudnyi, Moscow oblast, Russia
3Kotel’nikov Institute of Radio Engineering and Electronics, Russian Academy of Sciences, Moscow, Russia

Tóm tắt

The most important advantage of motion parameter transducers based on mass and charge transport in electrochemical systems is exceptionally high rate of mechanical signal conversion to electric current. Devices of this class are based on the principle of diffusion charge transport under the conditions of forced convection appearing as a result of external acceleration. This work shows the possibility of development of modern high-technology devices based on an electrochemical transducer developed using up-to-date microelectronic technologies.

Tài liệu tham khảo

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