Technological principles of motion parameter transducers based on mass and charge transport in electrochemical microsystems
Tóm tắt
The most important advantage of motion parameter transducers based on mass and charge transport in electrochemical systems is exceptionally high rate of mechanical signal conversion to electric current. Devices of this class are based on the principle of diffusion charge transport under the conditions of forced convection appearing as a result of external acceleration. This work shows the possibility of development of modern high-technology devices based on an electrochemical transducer developed using up-to-date microelectronic technologies.
Tài liệu tham khảo
Larkam, C.W., J. Acoustical Soc. America, 1965, vol. 37, no. 4, p. 664.
Agafonov, V.M. and Krishtop, V.G., Russ. J. Electrochem., 2004, vol. 40, p. 537.
Agafonov, V.M. and Krishtop, V.G., Mikrosist. Tekh., 2004, no. 9, p. 40.
Kozlov, V.A. and Terent’ev, D.A., Russ. J. Electrochem., 2002, vol. 38, p. 992.
Kozlov, V.A. and Terent’ev, D.A., Russ. J. Electrochem., 2003, vol. 39, p. 401.
Agafonov, V.M. and Orel, A.A., Nano-Mikrosist. Tekh., 2008, no. 5, p. 50.
Agafonov, V.M., Bugaev, A.S., and Orel, A.A., Nano-Mikrosist. Tekh., 2009, no. 5, p. 32.
Safonov, M.V., Electronic Journal “Issledovano v Rossii”, 2004, p. 2433.
Agafonov, V.M., Krishtop, V.G., and Safonov, M.V., Nano-Mikrosist. Tekh., 2010, no. 6, p. 47.