Synthesis, characterization of CeO2@SiO2 nanoparticles and their oxide CMP behavior

Microelectronic Engineering - Tập 87 - Trang 1716-1720 - 2010
Xiaobing Zhao1,2, Renwei Long1, Yang Chen1, Zhigang Chen1
1School of Materials Science and Engineering, Jiangsu Polytechnic University, Changzhou, Jiangsu 213164, China
2Key Laboratory of Polymer Materials, Changzhou, Jiangsu 213164, China

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