Synthesis, characterization and gas sensing performance of SnO2 thin films prepared by spray pyrolysis
Tóm tắt
In this work, SnO2 thin films were deposited onto alumina substrates at 350°C by spray pyrolysis technique. The films were studied after annealing in air at temperatures 550°C, 750°C and 950°C for 30 min. The films were characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM) and optical absorption spectroscopy technique. The grain size was observed to increase with the increase in annealing temperature. Absorbance spectra were taken to examine the optical properties and bandgap energy was observed to decrease with the increase in annealing temperature. These films were tested in various gases at different operating temperatures ranging from 50–450°C. The film showed maximum sensitivity to H 2S gas. The H2S sensing properties of the SnO2 films were investigated with different annealing temperatures and H 2S gas concentrations. It was found that the annealing temperature significantly affects the sensitivity of the SnO2 to the H 2S. The sensitivity was found to be maximum for the film annealed at temperature 950°C at an operating temperature of 100°C. The quick response and fast recovery are the main features of this film. The effect of annealing temperature on the optical, structural, morphological and gas sensing properties of the films were studied and discussed.
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