Synthesis And Studies Of Titanium Based Films Deposited At Different Oxygen Flow Rates

Braic, 2007, Preparation and characterization of titanium oxy-nitride thin films, Appl. Surf. Sci., 253, 8210, 10.1016/j.apsusc.2007.02.179 Rizzo, 2009, Synthesis and characterization of titanium and zirconium oxynitride coatings, Thin Solid Films, 517, 5956, 10.1016/j.tsf.2009.03.131 Barhai, 2010, Study of the effect of plasma current density on the formation of titanium nitride and titanium oxynitride thin films prepared by reactive DC magnetron sputtering, Vacuum, 84, 896, 10.1016/j.vacuum.2009.12.004 Chappe, 2007, Titanium oxynitride thin films sputter deposited by the reactive gas pulsing process, Appl. Surf. Sci., 253, 5312, 10.1016/j.apsusc.2006.12.004 Rawal, 2012, Structural, Wettability and Optical Investigation of Titanium Oxynitride Coatings: Effect of Various Sputtering Parameters, J. Mater. Sci. Technol., 28, 512, 10.1016/S1005-0302(12)60091-7 Chan, 2008, Preparation of titanium oxynitride thin films by reactive sputtering using air/Ar mixtures, Surf. Coatings Technol., 203, 614, 10.1016/j.surfcoat.2008.04.094 Chan, 2009, X-ray photoelectron spectroscopy analyses of titanium oxynitride films prepared by magnetron sputtering using air/Ar mixtures, Thin Solid Films, 517, 5006, 10.1016/j.tsf.2009.03.100 Li, 2008, Microstructure and properties of nanocrystalline titanium monoxide films synthesized by inductively coupled plasma assisted reactive direct current magnetron sputtering, Appl. Surf. Sci., 255, 2370, 10.1016/j.apsusc.2008.07.108 Rawal, 2011, Optical and hydrophobic properties of co-sputtered chromium and titanium oxynitride films, Appl. Surf. Sci., 257, 8755, 10.1016/j.apsusc.2011.03.012