Surface passivation of silicon solar cells using plasma-enhanced chemical-vapour-deposited SiN films and thin thermal SiO2/plasma SiN stacks

Semiconductor Science and Technology - Tập 16 Số 3 - Trang 164-170 - 2001
Jan Schmidt1, Mark Kerr1, Andrés Cuevas1
1Centre for Sustainable Energy Systems, Department of Engineering, Faculty of Engineering and Information Technology, Australian National University, Canberra ACT 0200, Australia

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Tài liệu tham khảo

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Semiconductor Science and Technology

Tập 16 Số 3

164-170

Thông tin tác giả