Structure and chemistry of silicon surfaces after pre- and backsputtering, studied with Auger spectroscopy, ellipsometry, and RHEED

Surface Science - Tập 38 - Trang 341-356 - 1973
Chuan C. Chang1, P. Petroff1, G. Quintana1, J. Sosniak1
1Bell Laboratories Murray Hill, New Jersey 07974 U.S.A.

Tài liệu tham khảo