Structure and characteristics of a MEMS wave angular rate sensor with a ring resonator

Ayazi, F. and Najafi, K., High aspect-ratio dry-release poly-silicon MEMS technology for inertial-grade microgyroscopes, Position Location and Navigation Symposium, San Diego, California, 2000, pp. 304–308.

Zarabadi, S.A., Resonating comb/ring angular rate sensor, Delphi Delco Electronics Systems, Sensors and Actuators. 1999 (SP-1443).

Hopkin, I., Performance and design of silicon micromachined gyro, Symposium Gyro Technology, Germany, Stuttgart, 1997, pp. 1.0–1.10.

Fell, C.P., Hopkin I., Townsend K., and Sturland, I., a second generation silicon ring gyroscope, Symposium Gyro Technology, Germany, Stuttgart, 1999, pp. 1.0–1.14.

www.siliconsensing.com .

Anchutin, S.A., Kochurina, E.S., Plekhanov, V.E, and Timoshenkov, S.P., Designing a mathematical description of a ring-resonator microgyroscope, Nano i mikrosistemnaya technika, 2014, no. 5., pp. 18–25.

Timoshenkov, S.P., Anchutin, S.A., and Kalugin, V.V., Patent RU 2413926, Sensitive element of a ring microgyroscope, MIET, OOO ”LMS”, 10.03 2011.

Zhuravlev, V.F. and Klimov, D.M., Volnovoi tverdotel’nyi giroskop (A Solid-State Wave Gyroscope ), Moscow: Nauka, 1985.

Matveev, V.L., Lipatnikov, V.I., and Alekhin, A.V., Proektirovanie volnovogo tverdotel’nogo giroskopa (Design of a Solid-State Wave Gyroscope), Moscow: MGTU, 1998.

Severov, L.A., Mekhanika giroskopicheskikh sistem (Mechanics of Gyroscopic Systems), Moscow: MAI, 1996.

Severov, L.A., Ponomarev, V.K., Panferov, A.I., and Ovchinnikova, N.A., Angular velocity sensors based on ring resonators, Proc. 2010 Int. Symp. on Inertial Technology and Navigation, ISITN, Nanjing, China, 2010, October, pp. 58–66.

Panferov, A.I., Ponomarev, V.K., and Severov, L.A., Angular rate sensors based on the MEMS ring resonators, Proc. 5-th Int. Scientific Conf. on Physics and Control, PhysCon., 2011, http://lib.physcon.ru/doc?id=e21f6b87508a .

Panferov, A.I. and Ponomarev, V.K., Algorithms for embedded controllers in microgyros. Proc. IFAC-EGNCA, 2012, Paper ID 474.

Severov, L.A., Ponomarev, V.K., Panferov, A.I., and Ovchinnikova, N.A. Configuration and characteristics of the angular velocity sensor based on the wave solidstate gyroscope with the ring resonator. St. Petersburg Int. Conf. on Integrated Navigation Systems, St. Petersburg: Elektropribor, 2011, pp. 134–141.

Severov, L.A., Zolotarev, S.K., Ovchinnikova, N.A., and Panferov, A.I., Information characteristics of micromechanical gyroscopes using silicon technology for micromechanical systems, Izv. VUZov, Priborostroenie, 2011, no. 8, pp. 12–22.